DE69226228D1 - Optisches Rastertunnelmikroskop - Google Patents

Optisches Rastertunnelmikroskop

Info

Publication number
DE69226228D1
DE69226228D1 DE69226228T DE69226228T DE69226228D1 DE 69226228 D1 DE69226228 D1 DE 69226228D1 DE 69226228 T DE69226228 T DE 69226228T DE 69226228 T DE69226228 T DE 69226228T DE 69226228 D1 DE69226228 D1 DE 69226228D1
Authority
DE
Germany
Prior art keywords
optical scanning
scanning tunneling
tunneling microscope
microscope
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69226228T
Other languages
English (en)
Other versions
DE69226228T2 (de
Inventor
Masamichi Fujihira
Tatsuaki Ataka
Toshihiro Sakuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUJIHIRA, MASAMICHI, YOKOHOMA, KANAGAWA, JP
SII Nanotechnology Inc Chiba Jp
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of DE69226228D1 publication Critical patent/DE69226228D1/de
Application granted granted Critical
Publication of DE69226228T2 publication Critical patent/DE69226228T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/06—SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/20—Fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/002—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure
    • G11B11/007—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by perturbation of the physical or electrical structure with reproducing by means directly associated with the tip of a microscopic electrical probe as defined in G11B9/14
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Light Guides In General And Applications Therefor (AREA)
DE1992626228 1991-10-03 1992-09-29 Optisches Rastertunnelmikroskop Expired - Fee Related DE69226228T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25681791A JP3074357B2 (ja) 1991-10-03 1991-10-03 微細表面観察装置

Publications (2)

Publication Number Publication Date
DE69226228D1 true DE69226228D1 (de) 1998-08-20
DE69226228T2 DE69226228T2 (de) 1998-11-19

Family

ID=17297848

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1992626228 Expired - Fee Related DE69226228T2 (de) 1991-10-03 1992-09-29 Optisches Rastertunnelmikroskop

Country Status (5)

Country Link
US (1) US5304795A (de)
EP (1) EP0535611B1 (de)
JP (1) JP3074357B2 (de)
CA (1) CA2079752A1 (de)
DE (1) DE69226228T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5556204A (en) * 1990-07-02 1996-09-17 Hitachi, Ltd. Method and apparatus for detecting the temperature of a sample
US5673750A (en) * 1990-05-19 1997-10-07 Hitachi, Ltd. Vacuum processing method and apparatus
JP3267685B2 (ja) * 1992-07-28 2002-03-18 セイコーインスツルメンツ株式会社 微細表面観察装置
DE4310349C2 (de) * 1993-03-30 2000-11-16 Inst Mikrotechnik Mainz Gmbh Sensorkopf und Verfahren zu seiner Herstellung
JP2704601B2 (ja) * 1993-04-12 1998-01-26 セイコーインスツルメンツ株式会社 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法
WO1995003561A1 (en) * 1993-07-22 1995-02-02 British Technology Group Limited Intelligent sensor for near field optical device
IL106613A0 (en) * 1993-08-08 1993-12-08 Klony S Lieberman Device and method for probe microscopy
US5677978A (en) * 1993-08-08 1997-10-14 Lewis; Aaron Bent probe microscopy
JP3497244B2 (ja) * 1994-07-06 2004-02-16 オリンパス株式会社 近接場光走査型顕微鏡
US5485536A (en) * 1994-10-13 1996-01-16 Accuphotonics, Inc. Fiber optic probe for near field optical microscopy
DE19604363A1 (de) * 1995-02-23 1996-08-29 Zeiss Carl Fa Zusatzmodul zur ortsaufgelösten Fokusvermessung
DE19512265A1 (de) * 1995-03-24 1996-09-26 Joerg Dr Wrachtrup Optisch detektierte magnetische Resonanz Bilddarstellung an einzelnen Molekülen
DE19531802A1 (de) * 1995-08-30 1997-03-06 Guenter Guttroff Verfahren zur Steigerung des optischen Auflösungsvermögens
JP2934739B2 (ja) * 1996-02-20 1999-08-16 セイコーインスツルメンツ株式会社 走査型近視野原子間力顕微鏡
JP3290586B2 (ja) * 1996-03-13 2002-06-10 セイコーインスツルメンツ株式会社 走査型近視野光学顕微鏡
JP3260619B2 (ja) 1996-03-19 2002-02-25 セイコーインスツルメンツ株式会社 光導波路プロ−ブおよび光システム
JP3618896B2 (ja) * 1996-03-29 2005-02-09 キヤノン株式会社 微小開口を有するプローブの作製法とそれによるプローブ、並びに該プローブを用いた走査型近接場光顕微鏡と走査型トンネル顕微鏡との複合装置、および該プローブを用いた記録再生装置
DE19630650C2 (de) * 1996-07-30 1999-12-02 Univ Dresden Tech Optische Nahfeldsonde
GB2326229A (en) 1997-06-13 1998-12-16 Robert Jeffrey Geddes Carr Detecting and analysing submicron particles
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
JP4083330B2 (ja) * 1998-02-25 2008-04-30 セイコーインスツル株式会社 近視野光メモリヘッド
US6466537B1 (en) * 1998-03-20 2002-10-15 Seiko Instruments Inc. Recording apparatus
DE19822869C2 (de) * 1998-05-22 2001-05-10 Zeiss Carl Jena Gmbh Optisches Nahfeldmikroskop
JP2000030256A (ja) * 1998-07-07 2000-01-28 Seiko Instruments Inc 光記録・再生方法と光記録・再生で用いる記録媒体及び光記録・再生装置
JP2000329677A (ja) 1999-03-17 2000-11-30 Seiko Instruments Inc 光マイクロカンチレバーとその製造方法および光マイクロカンチレバーホルダ
JP4611436B2 (ja) * 1999-03-17 2011-01-12 セイコーインスツル株式会社 光マイクロカンチレバー
US7158224B2 (en) * 2000-06-25 2007-01-02 Affymetrix, Inc. Optically active substrates
US7016026B2 (en) * 2002-04-10 2006-03-21 Baker Hughes Incorporated Method and apparatus for a downhole refractometer and attenuated reflectance spectrometer
US20030232427A1 (en) * 2002-06-18 2003-12-18 Montagu Jean I. Optically active substrates for examination of biological materials
DE10303961B4 (de) * 2003-01-31 2005-03-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Sonde für ein optisches Nahfeldmikroskop und Verfahren zu deren Herstellung
JP2004264043A (ja) * 2003-01-31 2004-09-24 National Institute Of Advanced Industrial & Technology イオン化装置および微小領域分析装置
JP4522884B2 (ja) * 2005-02-17 2010-08-11 株式会社資生堂 試料の光抽出性能の評価方法及び試料の光抽出性能の評価装置
JP6019914B2 (ja) * 2012-08-14 2016-11-02 日本電気株式会社 光分岐装置および光分岐方法
US10883820B2 (en) * 2017-11-13 2021-01-05 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for metrology

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2024468B3 (es) * 1987-09-25 1992-03-01 Ibm Sensor para convertir una distancia a optica y ademas a energia electrica, y aparato de exploracion de superficie que usa el mismo
US5018865A (en) * 1988-10-21 1991-05-28 Ferrell Thomas L Photon scanning tunneling microscopy
FR2654212A1 (fr) * 1989-11-03 1991-05-10 Ardt Procede d'analyse spectroscopique ponctuelle de la lumiere diffractee ou absorbee par une substance placee dans un champ proche, et microscopes optiques a balayage en champ proche mettant en óoeuvre ce procede.
JP2744339B2 (ja) * 1990-08-03 1998-04-28 キヤノン株式会社 情報処理装置及び情報処理方法

Also Published As

Publication number Publication date
JPH0599641A (ja) 1993-04-23
CA2079752A1 (en) 1993-04-04
JP3074357B2 (ja) 2000-08-07
EP0535611B1 (de) 1998-07-15
DE69226228T2 (de) 1998-11-19
US5304795A (en) 1994-04-19
EP0535611A1 (de) 1993-04-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: FUJIHIRA, MASAMICHI, YOKOHOMA, KANAGAWA, JP

Owner name: SII NANOTECHNOLOGY INC., CHIBA, JP

8328 Change in the person/name/address of the agent

Representative=s name: WIESE KONNERTH FISCHER PATENTANWAELTE PARTNERSCHAF

8328 Change in the person/name/address of the agent

Representative=s name: SCHROETER LEHMANN FISCHER & NEUGEBAUER, 81479 MUEN

8339 Ceased/non-payment of the annual fee