DE69435190D1 - Optisches Nahfeld- und Atomkraft-Rastermikroskop - Google Patents

Optisches Nahfeld- und Atomkraft-Rastermikroskop

Info

Publication number
DE69435190D1
DE69435190D1 DE69435190T DE69435190T DE69435190D1 DE 69435190 D1 DE69435190 D1 DE 69435190D1 DE 69435190 T DE69435190 T DE 69435190T DE 69435190 T DE69435190 T DE 69435190T DE 69435190 D1 DE69435190 D1 DE 69435190D1
Authority
DE
Germany
Prior art keywords
near field
atomic force
scanning microscope
optical near
force scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69435190T
Other languages
English (en)
Inventor
Norio Chiba
Hiroshi Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
SII NanoTechnology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SII NanoTechnology Inc filed Critical SII NanoTechnology Inc
Application granted granted Critical
Publication of DE69435190D1 publication Critical patent/DE69435190D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/06—SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69435190T 1993-11-05 1994-10-28 Optisches Nahfeld- und Atomkraft-Rastermikroskop Expired - Lifetime DE69435190D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5276708A JP3047030B2 (ja) 1993-11-05 1993-11-05 走査型近視野原子間力顕微鏡

Publications (1)

Publication Number Publication Date
DE69435190D1 true DE69435190D1 (de) 2009-04-02

Family

ID=17573224

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69418821T Expired - Lifetime DE69418821T2 (de) 1993-11-05 1994-10-28 Kombiniertes Nahfeld- und Atomkraftrastermikroskop
DE69435190T Expired - Lifetime DE69435190D1 (de) 1993-11-05 1994-10-28 Optisches Nahfeld- und Atomkraft-Rastermikroskop

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69418821T Expired - Lifetime DE69418821T2 (de) 1993-11-05 1994-10-28 Kombiniertes Nahfeld- und Atomkraftrastermikroskop

Country Status (3)

Country Link
EP (2) EP0846932B1 (de)
JP (1) JP3047030B2 (de)
DE (2) DE69418821T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3425615B2 (ja) 1994-03-24 2003-07-14 科学技術庁長官官房会計課長 走査型近視野原子間力顕微鏡
DE19531465C2 (de) * 1995-03-30 1997-12-18 Zeiss Carl Jena Gmbh Rastersonde für die optische Nahfeldmikroskopie
WO1996030717A1 (de) * 1995-03-30 1996-10-03 Carl Zeiss Jena Gmbh Mikromechanische sonde für rastermikroskope
JP4146017B2 (ja) 1998-03-24 2008-09-03 セイコーインスツル株式会社 近視野光学ヘッド
DE29814974U1 (de) * 1998-08-21 1999-12-30 Witec Wissenschaftliche Instr Kombinationsmikroskop
DE29814972U1 (de) * 1998-08-21 1999-12-30 Witec Wissenschaftliche Instr Nahfeldoptische Sonde und nahfeldoptisches Mikroskop
WO2000075627A1 (en) * 1999-06-05 2000-12-14 Daewoo Electronics Co., Ltd. Atomic force microscope and driving method therefor
JP4472863B2 (ja) 1999-12-20 2010-06-02 セイコーインスツル株式会社 近視野光プローブおよびその近視野光プローブを用いた近視野光装置
JP4327993B2 (ja) 2000-05-29 2009-09-09 日本分光株式会社 プローブ開口作製装置、及びそれを用いた近接場光学顕微鏡
JP5183989B2 (ja) * 2007-07-19 2013-04-17 株式会社ミツトヨ 形状測定装置
CN116047114B (zh) * 2023-01-05 2024-07-02 北京量子信息科学研究院 表面离子阱囚禁电场分布的测量方法及测量装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260824A (en) * 1989-04-24 1993-11-09 Olympus Optical Co., Ltd. Atomic force microscope
DE69131528T2 (de) * 1990-05-30 2000-05-04 Hitachi Ltd Verfahren und Vorrichtung zur Behandlung eines sehr kleinen Bereichs einer Probe
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool

Also Published As

Publication number Publication date
EP0652414B1 (de) 1999-06-02
JP3047030B2 (ja) 2000-05-29
DE69418821T2 (de) 1999-09-23
EP0846932A3 (de) 2000-12-20
EP0846932B1 (de) 2009-02-18
EP0846932A2 (de) 1998-06-10
JPH07128039A (ja) 1995-05-19
DE69418821D1 (de) 1999-07-08
EP0652414A1 (de) 1995-05-10

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Legal Events

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