DE69131208T2 - Antriebsvorrichtung für einen Ultraschallwellenmotor - Google Patents

Antriebsvorrichtung für einen Ultraschallwellenmotor

Info

Publication number
DE69131208T2
DE69131208T2 DE69131208T DE69131208T DE69131208T2 DE 69131208 T2 DE69131208 T2 DE 69131208T2 DE 69131208 T DE69131208 T DE 69131208T DE 69131208 T DE69131208 T DE 69131208T DE 69131208 T2 DE69131208 T2 DE 69131208T2
Authority
DE
Germany
Prior art keywords
drive device
ultrasonic wave
wave motor
motor
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69131208T
Other languages
English (en)
Other versions
DE69131208D1 (de
Inventor
Ryoichi Suganuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2033460A external-priority patent/JPH03239168A/ja
Priority claimed from JP2074794A external-priority patent/JP2990729B2/ja
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE69131208D1 publication Critical patent/DE69131208D1/de
Publication of DE69131208T2 publication Critical patent/DE69131208T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/145Large signal circuits, e.g. final stages
    • H02N2/147Multi-phase circuits
DE69131208T 1990-02-14 1991-02-13 Antriebsvorrichtung für einen Ultraschallwellenmotor Expired - Lifetime DE69131208T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2033460A JPH03239168A (ja) 1990-02-14 1990-02-14 超音波モータ駆動装置
JP2074794A JP2990729B2 (ja) 1990-03-24 1990-03-24 超音波モータの駆動装置

Publications (2)

Publication Number Publication Date
DE69131208D1 DE69131208D1 (de) 1999-06-10
DE69131208T2 true DE69131208T2 (de) 1999-09-02

Family

ID=26372158

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69131208T Expired - Lifetime DE69131208T2 (de) 1990-02-14 1991-02-13 Antriebsvorrichtung für einen Ultraschallwellenmotor
DE69111481T Expired - Fee Related DE69111481T2 (de) 1990-02-14 1991-02-13 Antriebsvorrichtung für einen Ultraschallwellenmotor.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69111481T Expired - Fee Related DE69111481T2 (de) 1990-02-14 1991-02-13 Antriebsvorrichtung für einen Ultraschallwellenmotor.

Country Status (3)

Country Link
US (4) US5376855A (de)
EP (2) EP0654889B1 (de)
DE (2) DE69131208T2 (de)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5625246A (en) * 1988-10-19 1997-04-29 Nikon Corporation Driving control device for vibration wave motor
US6005328A (en) * 1989-06-15 1999-12-21 Nikon Corporation Driving device and method for ultrasonic wave motor
EP0654889B1 (de) * 1990-02-14 1999-05-06 Nikon Corporation Antriebsvorrichtung für einen Ultraschallwellenmotor
JP2972010B2 (ja) * 1992-01-08 1999-11-08 キヤノン株式会社 振動型アクチュエーター駆動制御装置
JP3169421B2 (ja) * 1992-03-13 2001-05-28 キヤノン株式会社 振動波モータの駆動制御装置
JPH05273361A (ja) * 1992-03-24 1993-10-22 Seiko Instr Inc 超音波モータ付電子機器
JPH05328757A (ja) * 1992-05-21 1993-12-10 Canon Inc 振動波アクチュエータの駆動装置
JPH06178556A (ja) * 1992-12-10 1994-06-24 Asmo Co Ltd 超音波モータの駆動回路
US5563464A (en) * 1993-02-09 1996-10-08 Olympus Optical Co., Ltd. Circuit for rotating ultrasonic motor
JPH07227089A (ja) * 1994-02-08 1995-08-22 Nikon Corp 超音波モータの駆動制御装置
EP0674350B1 (de) * 1994-03-23 2000-05-31 Nikon Corporation Ultraschallmotor
JP3412923B2 (ja) * 1994-09-14 2003-06-03 キヤノン株式会社 振動波駆動装置の制御装置
FR2724788B1 (fr) * 1994-09-19 1997-01-24 Magneti Marelli France Transducteur a onde mecanique progressive
JPH08116685A (ja) * 1994-10-17 1996-05-07 Canon Inc 振動波モータ
MY120661A (en) * 1994-11-18 2005-11-30 Sony Corp Method and apparatus for control of a supersonic motor
JP2757810B2 (ja) * 1995-03-08 1998-05-25 日本電気株式会社 電源装置
JPH0984365A (ja) * 1995-09-18 1997-03-28 Canon Inc 振動型アクチュエーター装置
KR0173941B1 (ko) * 1995-10-25 1999-05-01 김광호 1개의 자기감응소자를 갖는 3상 모터의 구동 시스템
FR2741488B1 (fr) * 1995-11-16 1998-01-09 Asulab Sa Procede et circuit d'excitation et de controle d'un moteur piezo-electrique en mode pas a pas
JP3358418B2 (ja) * 1996-01-04 2002-12-16 ミノルタ株式会社 電気−機械変換素子を使用した駆動機構
JP3437359B2 (ja) * 1996-01-08 2003-08-18 キヤノン株式会社 振動波駆動装置の制御装置
IT1285243B1 (it) * 1996-02-16 1998-06-03 Magneti Marelli Spa Dispositivo correttore dell'assetto di un proiettore, particolarmente per autoveicoli, azionato da un motore piezoelettrico.
US5955819A (en) * 1996-05-15 1999-09-21 Canon Kabushiki Kaisha Standing-wave vibration motor
JP3577177B2 (ja) * 1996-10-11 2004-10-13 愛三工業株式会社 アクチュエータの制御装置及び粉体フィーダ
JP3525015B2 (ja) * 1996-10-14 2004-05-10 愛三工業株式会社 振動体駆動装置及び粉体供給装置
JPH10146072A (ja) * 1996-11-13 1998-05-29 Canon Inc 振動型モータ装置
JPH10178792A (ja) * 1996-12-20 1998-06-30 Canon Inc 駆動制御装置およびこれを用いた装置、複写機
US5976897A (en) * 1997-10-10 1999-11-02 Advanced Micro Devices, Inc. Method of protecting device leads of a packaged integrated circuit
FR2775397A1 (fr) * 1998-02-20 1999-08-27 Somfy Circuit d'alimentation d'un moteur piezo-electrique a onde progressive
US6850623B1 (en) 1999-10-29 2005-02-01 American Technology Corporation Parametric loudspeaker with improved phase characteristics
DE19916161B4 (de) * 1999-04-11 2008-06-05 Dürr Dental GmbH & Co. KG Einrichtung zur Erzeugung hochfrequenter mechanischer Schwingungen für ein dentales Handstück
KR100579768B1 (ko) * 1999-10-20 2006-05-15 미쓰비시덴키 가부시키가이샤 제어장치
US20050195985A1 (en) * 1999-10-29 2005-09-08 American Technology Corporation Focused parametric array
JP2001258278A (ja) * 2000-03-15 2001-09-21 Minolta Co Ltd トラス型アクチュエータの駆動制御装置
DE10158584A1 (de) 2001-11-29 2003-07-03 Philips Intellectual Property Piezoelektrische Antriebsvorrichtung und ein Regelverfahren für eine piezoelektrische Antriebsvorrichtung
JP3805242B2 (ja) * 2001-12-07 2006-08-02 キヤノン株式会社 振動波駆動装置
JP4385602B2 (ja) * 2003-01-10 2009-12-16 セイコーエプソン株式会社 共振制御装置
JP4358544B2 (ja) * 2003-04-08 2009-11-04 オリンパス株式会社 超音波アクチュエータ駆動装置及び超音波アクチュエータ駆動方法
CA2528588A1 (en) * 2003-06-09 2005-01-06 American Technology Corporation System and method for delivering audio-visual content along a customer waiting line
US7564981B2 (en) * 2003-10-23 2009-07-21 American Technology Corporation Method of adjusting linear parameters of a parametric ultrasonic signal to reduce non-linearities in decoupled audio output waves and system including same
JP4367411B2 (ja) * 2003-12-25 2009-11-18 三菱電機株式会社 モータの制御装置
CN100444511C (zh) * 2004-11-12 2008-12-17 南京航空航天大学 用于驱动超声电机的单相自振荡驱动器
JP4957722B2 (ja) * 2006-04-11 2012-06-20 コニカミノルタアドバンストレイヤー株式会社 駆動装置
US7764041B2 (en) * 2007-01-22 2010-07-27 Johnson Controls Technology Company System and method to extend synchronous operation of an active converter in a variable speed drive
WO2008120456A1 (ja) * 2007-03-16 2008-10-09 Panasonic Corporation 超音波アクチュエータ装置
US8275137B1 (en) 2007-03-22 2012-09-25 Parametric Sound Corporation Audio distortion correction for a parametric reproduction system
JP4525943B2 (ja) * 2007-07-02 2010-08-18 セイコーエプソン株式会社 超音波モータの駆動方法
JP5553564B2 (ja) * 2009-09-18 2014-07-16 キヤノン株式会社 振動型モータ制御装置および撮像装置
JP5436164B2 (ja) * 2009-11-20 2014-03-05 キヤノン株式会社 振動型アクチュエータの駆動回路
EP2409664B1 (de) * 2010-07-22 2013-10-30 W & H Dentalwerk Bürmoos GmbH Medizinische Behandlungsvorrichtung und Verfahren zur Regelung einer medizinischen Behandlungsvorrichtung
DE102010047280A1 (de) 2010-10-01 2012-04-05 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren und Vorrichtung zur elektrischen Erregung eines Aktors für einen Ultraschallmotor
US20140028221A1 (en) * 2012-07-24 2014-01-30 Apple Inc. Method of Adaptively Tuning Motor Speed
EP3074089A4 (de) 2013-11-26 2017-07-26 Alliqua Biomedical, Inc. Systeme und verfahren zur herstellung und verabreichung von ultraschalltherapien für wundbehandlung und -heilung
CN110224630A (zh) * 2019-06-13 2019-09-10 西安创联超声技术有限责任公司 超声波电机幅值稳幅控制电路

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CS206719B1 (en) * 1978-12-21 1981-06-30 Emil Hrzan Connexion of automatic control system of stator current limiter
JPS59204477A (ja) * 1983-05-04 1984-11-19 Nippon Kogaku Kk <Nikon> 超音波モーターの駆動制御回路
US4658172A (en) * 1984-02-10 1987-04-14 Canon Kabushiki Kaisha Drive circuit for a vibration wave motor
JPH072022B2 (ja) * 1984-11-19 1995-01-11 松下電器産業株式会社 超音波モータ駆動方法
JPS61203873A (ja) * 1985-03-01 1986-09-09 Canon Inc 振動波モ−タの駆動回路
US4692649A (en) * 1985-03-01 1987-09-08 Canon Kabushiki Kaisha Driving circuit of a vibration wave motor
US4727276A (en) * 1985-03-26 1988-02-23 Canon Kabushiki Kaisha Driving circuit for vibration wave motor
JPS6219276A (ja) * 1985-07-18 1987-01-28 Tokico Ltd 工業用ロボツト
GB2183371B (en) * 1985-10-09 1989-09-27 Canon Kk Vibration wave motor and drive circuit therefor
US4743788A (en) * 1985-11-20 1988-05-10 Nippon Kogaku K. K. Input frequency control device for surface acoustic wave motor
US4794294A (en) * 1986-06-12 1988-12-27 Canon Kabushiki Kaisha Vibration wave motor
KR900007413B1 (ko) * 1986-08-26 1990-10-08 마쯔시다덴기산교 가부시기가이샤 초음파 모우터구동 방법
US4812699A (en) * 1986-11-11 1989-03-14 Nikon Corporation Drive control device in an ultrasonic vibration motor
US5136215A (en) * 1986-12-15 1992-08-04 Canon Kabushiki Kaisha Driving circuit for vibration wave motor
JPS63178774A (ja) * 1987-01-19 1988-07-22 Canon Inc 振動波モ−タ−の駆動回路
JP2586082B2 (ja) * 1987-02-09 1997-02-26 株式会社ニコン 超音波モータの電源周波数最適化装置
JP2794692B2 (ja) * 1987-02-13 1998-09-10 株式会社ニコン 超音波モータの駆動回路
JP2683237B2 (ja) * 1987-03-20 1997-11-26 オリンパス光学工業株式会社 超音波モータの駆動回路
JP2589698B2 (ja) * 1987-07-03 1997-03-12 キヤノン株式会社 振動型アクチュエータ装置
US4888514A (en) * 1987-10-16 1989-12-19 Matsushita Electric Industrial Co., Ltd. Driving apparatus for ultrasonic motor
US5140231A (en) * 1987-10-20 1992-08-18 Canon Kabushiki Kaisha Drive circuit for vibratory-wave motor
JPH01185174A (ja) * 1988-01-11 1989-07-24 Canon Inc 振動波モータの駆動回路
JPH01234073A (ja) * 1988-03-14 1989-09-19 Olympus Optical Co Ltd 振動波モータの駆動回路
JP2637467B2 (ja) * 1988-05-06 1997-08-06 キヤノン株式会社 振動型アクチュエーター装置
JPH0710189B2 (ja) * 1988-05-30 1995-02-01 キヤノン株式会社 振動波モーターの駆動回路
JP2537267B2 (ja) * 1988-05-30 1996-09-25 キヤノン株式会社 振動型アクチュエ―タ―装置
US5146143A (en) * 1988-07-26 1992-09-08 Canon Kabushiki Kaisha Vibration wave driven motor
JPH02119586A (ja) * 1988-10-27 1990-05-07 Seiko Instr Inc 超音波モータ装置
US5023526A (en) * 1988-10-31 1991-06-11 Aisin Seiki Kabushiki Kaisha Vibratory motor
JP2946533B2 (ja) * 1989-06-08 1999-09-06 株式会社ニコン 超音波モータの駆動装置
JP2890484B2 (ja) * 1989-06-15 1999-05-17 株式会社ニコン 超音波モータの駆動装置
DE69013263T2 (de) * 1989-08-03 1995-06-08 Asmo Co Ltd Methode und Vorrichtung zur Steuerung eines Ultraschallmotors.
EP0654889B1 (de) * 1990-02-14 1999-05-06 Nikon Corporation Antriebsvorrichtung für einen Ultraschallwellenmotor
US5143143A (en) * 1990-02-26 1992-09-01 Navistar International Transportation Corp. Multipiece foam pattern for making hollow casting having an integral hose connection
JP2995789B2 (ja) * 1990-03-15 1999-12-27 株式会社ニコン 超音波モータの駆動装置
JP2863280B2 (ja) * 1990-07-04 1999-03-03 アスモ株式会社 超音波モータの駆動方法
US5130619A (en) * 1990-12-26 1992-07-14 Kubota Corporation Drive control apparatus for an ultrasonic motor

Also Published As

Publication number Publication date
DE69111481T2 (de) 1996-01-18
EP0654889B1 (de) 1999-05-06
EP0442469B1 (de) 1995-07-26
US5376855A (en) 1994-12-27
US5479063A (en) 1995-12-26
EP0442469A1 (de) 1991-08-21
DE69111481D1 (de) 1995-08-31
EP0654889A1 (de) 1995-05-24
US5477099A (en) 1995-12-19
US5767609A (en) 1998-06-16
DE69131208D1 (de) 1999-06-10

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