DE69127308D1 - Vibrationswellenbetriebener Motor - Google Patents

Vibrationswellenbetriebener Motor

Info

Publication number
DE69127308D1
DE69127308D1 DE69127308T DE69127308T DE69127308D1 DE 69127308 D1 DE69127308 D1 DE 69127308D1 DE 69127308 T DE69127308 T DE 69127308T DE 69127308 T DE69127308 T DE 69127308T DE 69127308 D1 DE69127308 D1 DE 69127308D1
Authority
DE
Germany
Prior art keywords
vibration wave
powered motor
wave powered
motor
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69127308T
Other languages
English (en)
Other versions
DE69127308T2 (de
Inventor
Akio Atsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69127308D1 publication Critical patent/DE69127308D1/de
Application granted granted Critical
Publication of DE69127308T2 publication Critical patent/DE69127308T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H02N2/145—Large signal circuits, e.g. final stages
    • H02N2/147—Multi-phase circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
DE69127308T 1990-04-05 1991-04-04 Vibrationswellenbetriebener Motor Expired - Fee Related DE69127308T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2090657A JP2996483B2 (ja) 1990-04-05 1990-04-05 振動型モータ

Publications (2)

Publication Number Publication Date
DE69127308D1 true DE69127308D1 (de) 1997-09-25
DE69127308T2 DE69127308T2 (de) 1997-12-18

Family

ID=14004601

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69127308T Expired - Fee Related DE69127308T2 (de) 1990-04-05 1991-04-04 Vibrationswellenbetriebener Motor

Country Status (4)

Country Link
US (1) US5656881A (de)
EP (1) EP0450962B1 (de)
JP (1) JP2996483B2 (de)
DE (1) DE69127308T2 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3171887B2 (ja) * 1991-10-21 2001-06-04 キヤノン株式会社 振動波駆動装置
DE69233721T2 (de) * 1991-11-20 2009-01-08 Canon K.K. Vibrationsangetriebener Motor
JP3205026B2 (ja) * 1992-01-30 2001-09-04 キヤノン株式会社 振動波駆動装置および振動波駆動装置を有する装置
JP3162486B2 (ja) * 1992-06-25 2001-04-25 キヤノン株式会社 プリンタ装置
DE69315767T2 (de) * 1992-08-25 1998-05-07 Canon Kk Verfahren zur Herstellung einer laminierten piezoelektrischen Anordnung und Polarisationsverfahren und vibrationswellengetriebener Motor
US5440190A (en) * 1992-09-25 1995-08-08 Olympus Optical Co., Ltd. Ultrasonic motor
EP0661764B1 (de) * 1993-12-27 1999-03-10 Canon Kabushiki Kaisha Vibrationswellenantrieb
EP0674350B1 (de) * 1994-03-23 2000-05-31 Nikon Corporation Ultraschallmotor
JP3432001B2 (ja) * 1994-06-27 2003-07-28 キヤノン株式会社 振動波装置
JPH08116685A (ja) * 1994-10-17 1996-05-07 Canon Inc 振動波モータ
MY120661A (en) * 1994-11-18 2005-11-30 Sony Corp Method and apparatus for control of a supersonic motor
JP3402816B2 (ja) * 1994-12-22 2003-05-06 キヤノン株式会社 超音波モータの駆動回路
JPH0984365A (ja) * 1995-09-18 1997-03-28 Canon Inc 振動型アクチュエーター装置
JPH09233862A (ja) * 1995-12-18 1997-09-05 Seiko Epson Corp 圧電体を用いた発電方法、発電装置および電子機器
US6288848B1 (en) * 1996-01-08 2001-09-11 Canon Kabushiki Kaisha Lens barrel and optical equipment
JPH10146072A (ja) * 1996-11-13 1998-05-29 Canon Inc 振動型モータ装置
JP3839898B2 (ja) * 1997-04-21 2006-11-01 キヤノン株式会社 振動型アクチュエータの駆動装置および振動型アクチュエータを駆動源とする装置
JPH11136967A (ja) * 1997-10-29 1999-05-21 Canon Inc 振動型駆動装置および振動型モータ装置
US6100622A (en) * 1997-12-12 2000-08-08 Canon Kabushiki Kaisha Driving apparatus of vibration type actuator
JP2000184759A (ja) 1998-12-10 2000-06-30 Canon Inc 振動型アクチュエ―タ駆動装置
JP4428747B2 (ja) 1999-02-22 2010-03-10 キヤノン株式会社 振動型アクチュエータ駆動制御装置、駆動制御方法、及び記憶媒体
JP2002204585A (ja) 2000-12-28 2002-07-19 Canon Inc 振動型アクチュエータの制御装置
JP3991863B2 (ja) 2002-12-27 2007-10-17 セイコーエプソン株式会社 ノコギリ波発生装置
JP4385602B2 (ja) 2003-01-10 2009-12-16 セイコーエプソン株式会社 共振制御装置
JP4838567B2 (ja) 2005-10-26 2011-12-14 キヤノン株式会社 周波数制御回路、モータ駆動装置、周波数制御方法、モータ駆動装置の制御方法、及び、制御方法をコンピュータに実行させるプログラム
JP4498265B2 (ja) 2005-11-15 2010-07-07 キヤノン株式会社 モータ駆動装置、制御方法、及びプログラム
JP4795158B2 (ja) * 2006-08-03 2011-10-19 オリンパス株式会社 超音波モータ
JP4891053B2 (ja) * 2006-12-21 2012-03-07 オリンパス株式会社 超音波モータ
JP2009044932A (ja) * 2007-08-10 2009-02-26 Olympus Corp 超音波モータの駆動方法及び超音波モータ
JP5791343B2 (ja) 2010-05-31 2015-10-07 キヤノン株式会社 振動型モータの制御方法および振動型モータの駆動装置
JP5854630B2 (ja) * 2011-04-27 2016-02-09 キヤノン株式会社 駆動制御方法、および駆動制御装置
KR102585696B1 (ko) * 2020-06-05 2023-10-10 가부시끼가이샤가이죠 상태 감시 기능 탑재 초음파 진동자 및 이를 이용한 초음파 세정 장치

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3843897A (en) * 1973-03-28 1974-10-22 Taga Electric Co Ltd Supersonic transducer
US3889166A (en) * 1974-01-15 1975-06-10 Quintron Inc Automatic frequency control for a sandwich transducer using voltage feedback
US4325255A (en) * 1980-04-07 1982-04-20 Energy And Minerals Research Co. Ultrasonic apparatus and method for measuring the characteristics of materials
JPS59110389A (ja) * 1982-12-16 1984-06-26 Canon Inc 振動波モ−タ
JPS59117473A (ja) * 1982-12-21 1984-07-06 Canon Inc 振動波モ−タ
US4786836A (en) * 1984-03-01 1988-11-22 Matsushita Electric Industrail Co., Ltd. Piezoelectric motor
JPS60210172A (ja) * 1984-04-02 1985-10-22 Canon Inc 振動波モ−タ
GB2183371B (en) * 1985-10-09 1989-09-27 Canon Kk Vibration wave motor and drive circuit therefor
US4697117A (en) * 1985-11-27 1987-09-29 Taga Electric Co., Ltd. Rotary ultrasonic motor
US4764702A (en) * 1985-12-30 1988-08-16 Taga Electric Co., Ltd. Ultrasonic motor device
US4713571A (en) * 1986-01-23 1987-12-15 Canon Kabushiki Kaisha Driving circuit of a vibration wave motor
US4734610A (en) * 1986-03-25 1988-03-29 Canon Kabushiki Kaisha Vibration wave motor
JPH078153B2 (ja) * 1986-07-14 1995-01-30 キヤノン株式会社 振動波モーター装置
US4868446A (en) * 1987-01-22 1989-09-19 Hitachi Maxell, Ltd. Piezoelectric revolving resonator and ultrasonic motor
JP2559729B2 (ja) * 1987-03-26 1996-12-04 キヤノン株式会社 振動発生器
CA1289999C (en) * 1987-07-14 1991-10-01 Keisuke Honda Ultrasonic driving device
US5025766A (en) * 1987-08-24 1991-06-25 Hitachi, Ltd. Fuel injection valve and fuel supply system equipped therewith for internal combustion engines
JPH01148079A (ja) * 1987-12-03 1989-06-09 Matsushita Electric Ind Co Ltd 超音波モータの駆動装置
JPH01234067A (ja) * 1988-03-11 1989-09-19 Nec Corp 超音波モータ
JP2705820B2 (ja) * 1989-02-28 1998-01-28 キヤノン株式会社 振動波モータ装置
US5134348A (en) * 1989-04-07 1992-07-28 Canon Kabushiki Kaisha Vibration wave motor
JP2874762B2 (ja) * 1989-06-05 1999-03-24 キヤノン株式会社 モータ駆動装置
JP2935504B2 (ja) * 1989-07-05 1999-08-16 キヤノン株式会社 モータ
JPH03117384A (ja) * 1989-09-28 1991-05-20 Canon Inc 超音波モータの摩擦材

Also Published As

Publication number Publication date
EP0450962B1 (de) 1997-08-20
JP2996483B2 (ja) 1999-12-27
EP0450962A3 (en) 1992-01-08
DE69127308T2 (de) 1997-12-18
EP0450962A2 (de) 1991-10-09
JPH03289375A (ja) 1991-12-19
US5656881A (en) 1997-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee