DE69125268D1 - Verfahren und vorrichtung zum herstellen von übergängen durch diffusion in substrate von solarzellen - Google Patents

Verfahren und vorrichtung zum herstellen von übergängen durch diffusion in substrate von solarzellen

Info

Publication number
DE69125268D1
DE69125268D1 DE69125268T DE69125268T DE69125268D1 DE 69125268 D1 DE69125268 D1 DE 69125268D1 DE 69125268 T DE69125268 T DE 69125268T DE 69125268 T DE69125268 T DE 69125268T DE 69125268 D1 DE69125268 D1 DE 69125268D1
Authority
DE
Germany
Prior art keywords
substrates
solar cells
diffusion
producing transitions
dopant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69125268T
Other languages
English (en)
Other versions
DE69125268T2 (de
Inventor
Mark Rosenblum
Jack Hanoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott Solar CSP Inc
Original Assignee
ASE Americas Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASE Americas Inc filed Critical ASE Americas Inc
Publication of DE69125268D1 publication Critical patent/DE69125268D1/de
Application granted granted Critical
Publication of DE69125268T2 publication Critical patent/DE69125268T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H01L21/2251—Diffusion into or out of group IV semiconductors
    • H01L21/2254—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides
    • H01L21/2255—Diffusion into or out of group IV semiconductors from or through or into an applied layer, e.g. photoresist, nitrides the applied layer comprising oxides only, e.g. P2O5, PSG, H3BO3, doped oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Sustainable Development (AREA)
  • Chemical & Material Sciences (AREA)
  • Photovoltaic Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE69125268T 1990-10-24 1991-09-20 Verfahren und vorrichtung zum herstellen von übergängen durch diffusion in substrate von solarzellen Expired - Lifetime DE69125268T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60400090A 1990-10-24 1990-10-24
PCT/US1991/006843 WO1992008245A1 (en) 1990-10-24 1991-09-20 Method and apparatus for forming diffusion junctions in solar cell substrates

Publications (2)

Publication Number Publication Date
DE69125268D1 true DE69125268D1 (de) 1997-04-24
DE69125268T2 DE69125268T2 (de) 1997-10-30

Family

ID=24417781

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69125268T Expired - Lifetime DE69125268T2 (de) 1990-10-24 1991-09-20 Verfahren und vorrichtung zum herstellen von übergängen durch diffusion in substrate von solarzellen

Country Status (10)

Country Link
EP (1) EP0506926B1 (de)
JP (1) JP3021650B2 (de)
CN (1) CN1028819C (de)
AT (1) ATE150584T1 (de)
AU (2) AU644025B2 (de)
CA (1) CA2070380A1 (de)
DE (1) DE69125268T2 (de)
IL (1) IL99582A (de)
WO (1) WO1992008245A1 (de)
ZA (1) ZA917719B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005025933B3 (de) * 2005-06-06 2006-07-13 Centrotherm Photovoltaics Gmbh + Co. Kg Dotiergermisch für die Dotierung von Halbleitern
ITUD20050196A1 (it) * 2005-11-17 2007-05-18 Gisulfo Baccini Apparecchiatura per la produzione di celle fotovoltaiche sottili in silicio e di circuiti elettronici in materiale rigido e flessibile
CN101220518B (zh) * 2007-01-12 2010-04-07 中国电子科技集团公司第四十八研究所 一种用于高温扩散系统的尾气收集装置
US20090239363A1 (en) * 2008-03-24 2009-09-24 Honeywell International, Inc. Methods for forming doped regions in semiconductor substrates using non-contact printing processes and dopant-comprising inks for forming such doped regions using non-contact printing processes
US9559228B2 (en) * 2011-09-30 2017-01-31 Sunpower Corporation Solar cell with doped groove regions separated by ridges
CN103361733B (zh) * 2013-06-21 2016-03-23 中山大学 一种光外同轴超声波喷雾激光掺杂系统
US10365420B2 (en) 2013-08-01 2019-07-30 Lg Chem, Ltd. Method for manufacturing polarizing film using ultrasonic vibrator for atomizing coating solution
CN104505439A (zh) * 2015-01-10 2015-04-08 复旦大学 一步完成扩散、表面钝化和减反射的太阳电池制备方法
CN108110090B (zh) * 2018-01-11 2020-03-06 江苏顺风光电科技有限公司 一种n型双面电池制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU499679B2 (en) * 1976-04-08 1979-04-26 Photon Power Inc Photovoltaic cell
US4273950A (en) * 1979-05-29 1981-06-16 Photowatt International, Inc. Solar cell and fabrication thereof using microwaves
US4360393A (en) * 1980-12-18 1982-11-23 Solarex Corporation Vapor deposition of H3 PO4 and formation of thin phosphorus layer on silicon substrates
DE3631270A1 (de) * 1986-09-13 1988-03-24 Kopperschmidt Mueller & Co Vorrichtung zur spruehbeschichtung von werkstuecken

Also Published As

Publication number Publication date
CA2070380A1 (en) 1992-04-25
WO1992008245A1 (en) 1992-05-14
CN1028819C (zh) 1995-06-07
DE69125268T2 (de) 1997-10-30
EP0506926A4 (en) 1994-11-02
ZA917719B (en) 1992-02-26
JPH05503395A (ja) 1993-06-03
EP0506926B1 (de) 1997-03-19
ATE150584T1 (de) 1997-04-15
AU8768491A (en) 1992-05-26
AU654785B2 (en) 1994-11-17
AU5044093A (en) 1994-01-20
IL99582A0 (en) 1992-08-18
CN1061492A (zh) 1992-05-27
JP3021650B2 (ja) 2000-03-15
AU644025B2 (en) 1993-12-02
IL99582A (en) 1994-06-24
EP0506926A1 (de) 1992-10-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RWE SCHOTT SOLAR INC. (N.D.GES.D. STAATES DELAWARE

8327 Change in the person/name/address of the patent owner

Owner name: SCHOTT SOLAR, INC.(N.D.GES.D. STAATES DELAWARE), B