JPS5772340A - Quality evaluating method for single crystal silicon wafer - Google Patents
Quality evaluating method for single crystal silicon waferInfo
- Publication number
- JPS5772340A JPS5772340A JP14869980A JP14869980A JPS5772340A JP S5772340 A JPS5772340 A JP S5772340A JP 14869980 A JP14869980 A JP 14869980A JP 14869980 A JP14869980 A JP 14869980A JP S5772340 A JPS5772340 A JP S5772340A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- crystal silicon
- silicon wafer
- temperature
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 230000000630 rising effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To detect easily swirl shaped defects by heating the single crystal silicon wafer in an atmosphere of 1,100-1,200 deg.C for 20-60min and by lowering temperature to less than 700 deg.C with a lowering speed of 0.5-2 deg.C/min. CONSTITUTION:Heat treatment is performed for a single crystal silicon wafer 1 from temperature of 600-700 deg.C, and the temperature is raised to 1,100-1,200 deg.C with a rising speed of 5-10 deg.C/min. Next, impurities of phosphorus are diffused into the wafer 1 using phosphorus oxychloride under temperature of 1,100-1,200 deg.C for 20- 60min, and a diffusion layer is formed on the surface. Further, the ambient temperature of the wafer 1 is reduced to 600-700 deg.C with a speed of 0.5-2 deg.C/min, and the heat treatment is stopped. And, etching is performed to the surface of the wafer 1 in 20-40mu to remove the diffusion layer 2, and thereby the single crystal silicon wafer 3 is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14869980A JPS5772340A (en) | 1980-10-23 | 1980-10-23 | Quality evaluating method for single crystal silicon wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14869980A JPS5772340A (en) | 1980-10-23 | 1980-10-23 | Quality evaluating method for single crystal silicon wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5772340A true JPS5772340A (en) | 1982-05-06 |
JPS6135504B2 JPS6135504B2 (en) | 1986-08-13 |
Family
ID=15458613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14869980A Granted JPS5772340A (en) | 1980-10-23 | 1980-10-23 | Quality evaluating method for single crystal silicon wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5772340A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0060676A2 (en) * | 1981-03-11 | 1982-09-22 | Fujitsu Limited | A method for the production of a semiconductor device comprising annealing a silicon wafer |
JPS60224239A (en) * | 1984-04-20 | 1985-11-08 | Fujitsu Ltd | Defect detecting method of thin film |
-
1980
- 1980-10-23 JP JP14869980A patent/JPS5772340A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0060676A2 (en) * | 1981-03-11 | 1982-09-22 | Fujitsu Limited | A method for the production of a semiconductor device comprising annealing a silicon wafer |
JPS60224239A (en) * | 1984-04-20 | 1985-11-08 | Fujitsu Ltd | Defect detecting method of thin film |
JPH0342501B2 (en) * | 1984-04-20 | 1991-06-27 |
Also Published As
Publication number | Publication date |
---|---|
JPS6135504B2 (en) | 1986-08-13 |
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