DE69116435D1 - Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen - Google Patents
Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchenInfo
- Publication number
- DE69116435D1 DE69116435D1 DE69116435T DE69116435T DE69116435D1 DE 69116435 D1 DE69116435 D1 DE 69116435D1 DE 69116435 T DE69116435 T DE 69116435T DE 69116435 T DE69116435 T DE 69116435T DE 69116435 D1 DE69116435 D1 DE 69116435D1
- Authority
- DE
- Germany
- Prior art keywords
- control system
- automotive control
- semiconductor accelerometer
- accelerometer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/003—Details of instruments used for damping
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2138494A JP2816235B2 (ja) | 1990-05-30 | 1990-05-30 | 半導体加速度センサとそれを用いたエアバックシステムおよびサスペンション制御システム |
JP2155217A JPH0447271A (ja) | 1990-06-15 | 1990-06-15 | 加速度センサ及びその出力電圧調整方法 |
JP2155218A JPH0833411B2 (ja) | 1990-06-15 | 1990-06-15 | 半導体加速度センサ |
JP15752890 | 1990-06-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69116435D1 true DE69116435D1 (de) | 1996-02-29 |
DE69116435T2 DE69116435T2 (de) | 1996-08-14 |
Family
ID=27472146
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69116435T Expired - Fee Related DE69116435T2 (de) | 1990-05-30 | 1991-05-24 | Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen |
Country Status (4)
Country | Link |
---|---|
US (1) | US5417312A (de) |
EP (1) | EP0459723B1 (de) |
KR (1) | KR100202237B1 (de) |
DE (1) | DE69116435T2 (de) |
Families Citing this family (96)
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US5461916A (en) * | 1992-08-21 | 1995-10-31 | Nippondenso Co., Ltd. | Mechanical force sensing semiconductor device |
DE4334671C2 (de) * | 1993-10-12 | 2003-12-24 | Bosch Gmbh Robert | Rückhaltesystem |
JPH07191055A (ja) * | 1993-12-27 | 1995-07-28 | Hitachi Ltd | 静電容量式加速度センサ |
DE69432396T2 (de) * | 1993-12-27 | 2004-03-04 | Hitachi, Ltd. | Beschleunigungsmessaufnehmer |
US5446616A (en) * | 1994-03-28 | 1995-08-29 | Litton Systems, Inc. | Electrode structure and method for anodically-bonded capacitive sensors |
US5469632A (en) * | 1994-04-08 | 1995-11-28 | Westinghouse Electric Corp. | Capacitive angle sensor employing a vertical cantilever beam |
JP3139305B2 (ja) * | 1994-08-24 | 2001-02-26 | 株式会社村田製作所 | 容量型加速度センサ |
DE4439203C2 (de) * | 1994-11-03 | 2001-06-28 | Bosch Gmbh Robert | Schaltungsanordnung zur Auswertung eines Beschleunigungssensorsignals |
US5604313A (en) * | 1994-11-23 | 1997-02-18 | Tokyo Gas Co., Ltd. | Varying apparent mass accelerometer |
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US5587518A (en) * | 1994-12-23 | 1996-12-24 | Ford Motor Company | Accelerometer with a combined self-test and ground electrode |
JP3946255B2 (ja) * | 1995-08-15 | 2007-07-18 | アライドシグナル インコーポレイテッド | 加速度計の星形リード |
EP0793103A3 (de) * | 1996-02-27 | 1998-10-07 | Seiko Instruments R&D Center Inc. | Halbleiter-Beschleunigungssensor |
JP2800112B2 (ja) * | 1996-02-28 | 1998-09-21 | 株式会社エスアイアイ・アールディセンター | 半導体装置 |
DE19617212C1 (de) * | 1996-04-30 | 1997-05-28 | Leica Ag | Lasernivellier mit horizontierbarer Instrumentenbasis und selbsttätiger Feinhorizontierung des Laserstrahls |
JP3323745B2 (ja) | 1996-07-25 | 2002-09-09 | 株式会社日立製作所 | 物理量検出装置の特性調整手段および発熱抵抗式空気流量装置 |
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JP3278363B2 (ja) * | 1996-11-18 | 2002-04-30 | 三菱電機株式会社 | 半導体加速度センサ |
US6220096B1 (en) | 1997-03-20 | 2001-04-24 | Interscience, Inc. | Differential wideband vibration |
US5874675A (en) * | 1997-03-20 | 1999-02-23 | Interscience, Inc. | Wideband vibration sensor |
AU7099398A (en) * | 1997-04-01 | 1998-10-22 | Kelsey-Hayes Company | Mounting structure for an acceleration sensor |
US5917226A (en) | 1997-10-24 | 1999-06-29 | Stmicroelectronics, Inc. | Integrated released beam, thermo-mechanical sensor for sensing temperature variations and associated methods |
US6058778A (en) | 1997-10-24 | 2000-05-09 | Stmicroelectronics, Inc. | Integrated sensor having plurality of released beams for sensing acceleration |
US6028343A (en) * | 1997-10-24 | 2000-02-22 | Stmicroelectronics, Inc. | Integrated released beam sensor for sensing acceleration and associated methods |
US6124765A (en) * | 1997-10-24 | 2000-09-26 | Stmicroelectronics, Inc. | Integrated released beam oscillator and associated methods |
US6276953B1 (en) | 1997-12-04 | 2001-08-21 | Thoma & Betts International, Inc. | Orientationless squib connector assembly for automotive air bag assemblies |
JPH11237402A (ja) * | 1998-02-19 | 1999-08-31 | Akebono Brake Ind Co Ltd | 半導体加速度センサ及びその自己診断法 |
US6250429B1 (en) * | 1998-10-09 | 2001-06-26 | Meritor Heavy Vehicle Systems Llc | Brake shoe assembly having a resistive brake lining wear sensor |
JP2000186931A (ja) * | 1998-12-21 | 2000-07-04 | Murata Mfg Co Ltd | 小型電子部品及びその製造方法並びに該小型電子部品に用いるビアホールの成形方法 |
DE10066435B4 (de) * | 1999-07-26 | 2012-03-08 | Denso Corporation | Halbleitersensor für eine physikalische Größe |
US6308569B1 (en) * | 1999-07-30 | 2001-10-30 | Litton Systems, Inc. | Micro-mechanical inertial sensors |
US6803755B2 (en) | 1999-09-21 | 2004-10-12 | Rockwell Automation Technologies, Inc. | Microelectromechanical system (MEMS) with improved beam suspension |
US6798312B1 (en) | 1999-09-21 | 2004-09-28 | Rockwell Automation Technologies, Inc. | Microelectromechanical system (MEMS) analog electrical isolator |
JP3771100B2 (ja) | 2000-01-19 | 2006-04-26 | アルプス電気株式会社 | 静電容量検出型センサおよびジャイロスコープならびに入力装置 |
KR100350609B1 (ko) * | 2000-03-09 | 2002-08-28 | 김택열 | 목재파쇄기 |
AUPR245301A0 (en) * | 2001-01-10 | 2001-02-01 | Silverbrook Research Pty Ltd | An apparatus (WSM06) |
JP4892781B2 (ja) * | 2001-01-18 | 2012-03-07 | 富士電機株式会社 | 半導体物理量センサ |
WO2002073673A1 (en) * | 2001-03-13 | 2002-09-19 | Rochester Institute Of Technology | A micro-electro-mechanical switch and a method of using and making thereof |
US6768628B2 (en) | 2001-04-26 | 2004-07-27 | Rockwell Automation Technologies, Inc. | Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap |
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US6794271B2 (en) * | 2001-09-28 | 2004-09-21 | Rockwell Automation Technologies, Inc. | Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge |
US6761829B2 (en) * | 2001-04-26 | 2004-07-13 | Rockwell Automation Technologies, Inc. | Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void |
US6756310B2 (en) * | 2001-09-26 | 2004-06-29 | Rockwell Automation Technologies, Inc. | Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques |
AU2002303933A1 (en) * | 2001-05-31 | 2002-12-09 | Rochester Institute Of Technology | Fluidic valves, agitators, and pumps and methods thereof |
JP2002357619A (ja) * | 2001-06-01 | 2002-12-13 | Mitsubishi Electric Corp | 加速度センサ及びその製造方法 |
US6664786B2 (en) | 2001-07-30 | 2003-12-16 | Rockwell Automation Technologies, Inc. | Magnetic field sensor using microelectromechanical system |
EP1436634A1 (de) * | 2001-10-05 | 2004-07-14 | Continental Teves AG & Co. oHG | Beschleunigungsaufnehmer für kraftfahrzeuge |
US7211923B2 (en) | 2001-10-26 | 2007-05-01 | Nth Tech Corporation | Rotational motion based, electrostatic power source and methods thereof |
US6690178B2 (en) | 2001-10-26 | 2004-02-10 | Rockwell Automation Technologies, Inc. | On-board microelectromechanical system (MEMS) sensing device for power semiconductors |
WO2003038448A1 (en) * | 2001-10-26 | 2003-05-08 | Potter Michael D | An accelerometer and methods thereof |
US7378775B2 (en) * | 2001-10-26 | 2008-05-27 | Nth Tech Corporation | Motion based, electrostatic power source and methods thereof |
US7177783B2 (en) * | 2002-06-07 | 2007-02-13 | Cadence Design Systems, Inc. | Shape based noise characterization and analysis of LSI |
FI119528B (fi) * | 2003-02-11 | 2008-12-15 | Vti Technologies Oy | Kapasitiivinen kiihtyvyysanturirakenne |
US6975193B2 (en) * | 2003-03-25 | 2005-12-13 | Rockwell Automation Technologies, Inc. | Microelectromechanical isolating circuit |
JP2004361115A (ja) * | 2003-06-02 | 2004-12-24 | Denso Corp | 半導体力学量センサ |
JP4213540B2 (ja) * | 2003-08-20 | 2009-01-21 | 株式会社日立製作所 | 振動発電用振動子 |
JP2005069852A (ja) * | 2003-08-25 | 2005-03-17 | Seiko Instruments Inc | 容量型力学量センサ |
US7287328B2 (en) * | 2003-08-29 | 2007-10-30 | Rochester Institute Of Technology | Methods for distributed electrode injection |
US7217582B2 (en) | 2003-08-29 | 2007-05-15 | Rochester Institute Of Technology | Method for non-damaging charge injection and a system thereof |
US8581308B2 (en) * | 2004-02-19 | 2013-11-12 | Rochester Institute Of Technology | High temperature embedded charge devices and methods thereof |
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US7360425B2 (en) * | 2004-11-22 | 2008-04-22 | The Boeing Company | Compensated composite structure |
JP2006220453A (ja) * | 2005-02-08 | 2006-08-24 | Denso Corp | 加速度センサ装置 |
KR100668336B1 (ko) * | 2005-04-07 | 2007-01-12 | 삼성전자주식회사 | 액츄에이터 장치 및 그의 액츄에이팅 방법 |
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US7091819B1 (en) | 2005-06-22 | 2006-08-15 | Ti Group Automotive Systems, L.L.C. | Variable resistor card for a fuel level sensor |
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DE102006059073A1 (de) * | 2006-12-14 | 2008-06-19 | Robert Bosch Gmbh | Mikrospiegelanordnung |
TW200913175A (en) * | 2007-09-05 | 2009-03-16 | Long-Sun Huang | Package structure for micro-sensor |
DE102008023535B4 (de) * | 2008-05-14 | 2011-05-12 | Texas Instruments Deutschland Gmbh | Elektronische Vorrichtung und Verfahren zur Auswertung einer variablen Kapazität |
US9128114B2 (en) * | 2008-09-15 | 2015-09-08 | Nxp, B.V. | Capacitive sensor device and a method of sensing accelerations |
IT1394794B1 (it) * | 2009-05-22 | 2012-07-13 | Rolls Royce Plc | Dispositivo, metodo e programma per computer di controllo automatico per smorzatori elettromagnetici. |
JP5400560B2 (ja) * | 2009-10-16 | 2014-01-29 | アズビル株式会社 | 静電容量型センサ |
KR101283683B1 (ko) * | 2009-12-14 | 2013-07-08 | 한국전자통신연구원 | 수직축 방향 가속도계 |
TWI393884B (zh) * | 2010-02-02 | 2013-04-21 | Hon Hai Prec Ind Co Ltd | 加速度感應裝置以及使用該裝置的電子裝置 |
JP2013007653A (ja) * | 2011-06-24 | 2013-01-10 | Nippon Dempa Kogyo Co Ltd | 外力検出装置及び外力検出センサー |
FR3002324B1 (fr) * | 2013-02-19 | 2016-01-22 | Sagem Defense Securite | Capteur a accelerometre pendulaire electrostatique et procede de commande d'un tel capteur |
FR3005045A1 (fr) * | 2013-04-25 | 2014-10-31 | Commissariat Energie Atomique | Structure microelectromecanique et/ou nanoelectromecanique a facteur de qualite ajustable |
US20160152441A1 (en) * | 2013-04-30 | 2016-06-02 | Inventio Ag | Hydraulic brake system |
GB2515005A (en) | 2013-05-31 | 2014-12-17 | Jaguar Land Rover Ltd | Vehicle communication system |
GB2515007A (en) | 2013-05-31 | 2014-12-17 | Jaguar Land Rover Ltd | Vehicle communication system |
GB2517129B (en) | 2013-05-31 | 2015-12-09 | Jaguar Land Rover Ltd | Vehicle communication system |
GB2515006B (en) | 2013-05-31 | 2015-11-25 | Jaguar Land Rover Ltd | Vehicle communication system |
GB2517128B (en) | 2013-05-31 | 2015-12-09 | Jaguar Land Rover Ltd | Vehicle communication system |
US20160091526A1 (en) * | 2013-07-19 | 2016-03-31 | Panasonic Intellectual Property Management Co., Ltd. | Sensor |
JP6123613B2 (ja) * | 2013-09-26 | 2017-05-10 | 株式会社デンソー | 物理量センサおよびその製造方法 |
GB201317859D0 (en) | 2013-10-09 | 2013-11-20 | Atlantic Inertial Systems Ltd | Accelerometer control |
US9837935B2 (en) * | 2013-10-29 | 2017-12-05 | Honeywell International Inc. | All-silicon electrode capacitive transducer on a glass substrate |
JP6279464B2 (ja) * | 2014-12-26 | 2018-02-14 | 株式会社東芝 | センサおよびその製造方法 |
JP6729423B2 (ja) * | 2017-01-27 | 2020-07-22 | 三菱電機株式会社 | 半導体装置、半導体装置の製造方法 |
CN106841683B (zh) * | 2017-04-06 | 2023-09-01 | 中国工程物理研究院电子工程研究所 | 石英摆式加速度计及其制备方法 |
US10712360B2 (en) | 2017-09-27 | 2020-07-14 | Azoteq (Pty) Ltd | Differential charge transfer based accelerometer |
CN108490217B (zh) * | 2018-03-26 | 2020-08-25 | 温州大学 | 接触模式微加速度计 |
EP3663775A1 (de) * | 2018-12-04 | 2020-06-10 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Rastersondenmikroskop, rasterkopf und verfahren |
Family Cites Families (13)
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FR2454103A1 (fr) * | 1979-04-11 | 1980-11-07 | Sagem | Perfectionnements aux accelerometres pendulaires asservis |
US4574327A (en) * | 1984-05-18 | 1986-03-04 | Becton, Dickinson And Company | Capacitive transducer |
US4638669A (en) * | 1985-05-07 | 1987-01-27 | Massachusetts Institute Of Technology | Quantum tunneling cantilever accelerometer |
US4679434A (en) * | 1985-07-25 | 1987-07-14 | Litton Systems, Inc. | Integrated force balanced accelerometer |
JPH0620879B2 (ja) * | 1987-03-10 | 1994-03-23 | トヨタ自動車株式会社 | 車両の加速スリツプ制御装置 |
JPS6425062A (en) * | 1987-07-21 | 1989-01-27 | Sumitomo Electric Industries | Acceleration detecting apparatus |
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JPH0672899B2 (ja) * | 1988-04-01 | 1994-09-14 | 株式会社日立製作所 | 加速度センサ |
US4869476A (en) * | 1988-08-09 | 1989-09-26 | Trw Inc. | Electrically controlled viscous elastic spring |
FR2637984B1 (fr) * | 1988-10-19 | 1991-01-11 | Sagem | Accelerometre pendulaire asservi a detection electrostatique |
JPH0623782B2 (ja) * | 1988-11-15 | 1994-03-30 | 株式会社日立製作所 | 静電容量式加速度センサ及び半導体圧力センサ |
US4942947A (en) * | 1989-04-14 | 1990-07-24 | Trw Inc. | Rotary shock absorber with a controlled damping rate |
JPH034047A (ja) * | 1989-05-31 | 1991-01-10 | Tonen Corp | 車輌の懸架装置 |
-
1991
- 1991-05-24 DE DE69116435T patent/DE69116435T2/de not_active Expired - Fee Related
- 1991-05-24 EP EP91304732A patent/EP0459723B1/de not_active Expired - Lifetime
- 1991-05-30 KR KR1019910008856A patent/KR100202237B1/ko not_active IP Right Cessation
-
1993
- 1993-11-03 US US08/147,083 patent/US5417312A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR100202237B1 (ko) | 1999-06-15 |
EP0459723B1 (de) | 1996-01-17 |
EP0459723A3 (en) | 1992-03-11 |
US5417312A (en) | 1995-05-23 |
EP0459723A2 (de) | 1991-12-04 |
KR920001189A (ko) | 1992-01-30 |
DE69116435T2 (de) | 1996-08-14 |
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