DE69106411T2 - Piezoelektrischer Druckaufnehmer. - Google Patents

Piezoelektrischer Druckaufnehmer.

Info

Publication number
DE69106411T2
DE69106411T2 DE69106411T DE69106411T DE69106411T2 DE 69106411 T2 DE69106411 T2 DE 69106411T2 DE 69106411 T DE69106411 T DE 69106411T DE 69106411 T DE69106411 T DE 69106411T DE 69106411 T2 DE69106411 T2 DE 69106411T2
Authority
DE
Germany
Prior art keywords
pressure transducer
piezoelectric pressure
piezoelectric
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69106411T
Other languages
English (en)
Other versions
DE69106411D1 (de
Inventor
Tohru Okauchi
Hiroki Kusakabe
Masuo Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6771890A external-priority patent/JPH03267730A/ja
Priority claimed from JP18644190A external-priority patent/JPH0470531A/ja
Priority claimed from JP22275490A external-priority patent/JPH04105034A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69106411D1 publication Critical patent/DE69106411D1/de
Publication of DE69106411T2 publication Critical patent/DE69106411T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE69106411T 1990-03-16 1991-03-15 Piezoelektrischer Druckaufnehmer. Expired - Fee Related DE69106411T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6771890A JPH03267730A (ja) 1990-03-16 1990-03-16 圧電型圧力センサ
JP18644190A JPH0470531A (ja) 1990-07-12 1990-07-12 圧電型圧力センサ
JP22275490A JPH04105034A (ja) 1990-08-24 1990-08-24 圧電型圧力センサ

Publications (2)

Publication Number Publication Date
DE69106411D1 DE69106411D1 (de) 1995-02-16
DE69106411T2 true DE69106411T2 (de) 1995-08-17

Family

ID=27299529

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69106411T Expired - Fee Related DE69106411T2 (de) 1990-03-16 1991-03-15 Piezoelektrischer Druckaufnehmer.

Country Status (7)

Country Link
US (1) US5138885A (de)
EP (2) EP0447255B1 (de)
KR (1) KR910017178A (de)
CA (1) CA2038226C (de)
DE (1) DE69106411T2 (de)
ES (1) ES2066347T3 (de)
TW (1) TW221491B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005005029B4 (de) * 2004-02-03 2017-05-11 Denso Corporation Drucksensor mit Membran

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0694561A (ja) * 1992-09-11 1994-04-05 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
DE4234289C1 (de) * 1992-10-12 1993-11-25 Fibronix Sensoren Gmbh Drucksensor
EP0637736A3 (de) * 1993-08-05 1995-05-10 Matsushita Electric Ind Co Ltd Piezoelektrischer Drucksensor und Verfahren zu seiner Herstellung.
US5900541A (en) * 1997-07-14 1999-05-04 Cummins Engine Company, Inc. Sensor assembly for easy removal
DE10108051C2 (de) * 2001-02-20 2003-04-03 Siemens Ag Vorrichtung zum Messen des Verbrennungsdruckes
US6923068B2 (en) * 2003-06-19 2005-08-02 Dynisco, Inc. Pressure transducer
AT503664B1 (de) * 2006-04-13 2007-12-15 Piezocryst Advanced Sensorics Piezoelektrischer drucksensor
KR101556072B1 (ko) * 2006-12-11 2015-09-30 키스틀러 홀딩 아게 압력센서용 어뎁터
US20160153443A1 (en) * 2013-10-30 2016-06-02 Lime Instruments, Llc Sensor assembly for measuring dynamic pressure in reciprocating pumps
JP6052325B2 (ja) * 2014-06-27 2016-12-27 トヨタ自動車株式会社 内燃機関システム
US9702740B2 (en) * 2015-04-17 2017-07-11 Wika Alexander Wiegand Se & Co. Kg Measuring instrument with connecting coupling

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT258610B (de) * 1965-12-09 1967-12-11 H C Hans Dipl Ing Dr Dr List Piezoelektrischer Druckgeber
GB1125500A (en) * 1967-07-31 1968-08-28 Rolls Royce Pressure gauge
JPS5323994B2 (de) * 1972-07-17 1978-07-18
JPS54130026A (en) * 1978-02-24 1979-10-09 Oki Electric Ind Co Ltd Impulse system ink jet head
JPS55109941A (en) * 1978-11-14 1980-08-23 Creative Tool Cylinder monitoring apparatus
DE2906407C2 (de) * 1979-02-20 1981-02-26 Kistler Instrumente Ag, Winterthur (Schweiz) Piezoelektrisches Wandlerelement zum Einbau in Druck-, Kraft- oder Beschleunigungsaufnehmer
DE3122375C2 (de) * 1981-06-05 1983-03-03 Robert Bosch Gmbh, 7000 Stuttgart Sensoranordnung
ATE17523T1 (de) * 1982-04-06 1986-02-15 Kistler Instrumente Ag Hochdruckaufnehmer.
JPS5979385A (ja) * 1982-10-28 1984-05-08 Matsushita Electric Ind Co Ltd 入力装置用ペン
AT383895B (de) * 1983-06-15 1987-09-10 Avl Verbrennungskraft Messtech Druckaufnehmer
DE3333315A1 (de) * 1983-09-15 1985-03-28 Standard Elektrik Lorenz Ag, 7000 Stuttgart Piezoelektrischer drucksensor
US4620438A (en) * 1983-12-15 1986-11-04 Texas Instruments Incorporated Cylinder pressure transmitter for an internal combustion engine
JPS60183534A (ja) * 1984-02-29 1985-09-19 Mitsubishi Petrochem Co Ltd ロ−ラ圧力測定方法
JPS60259347A (ja) * 1984-06-02 1985-12-21 Canon Inc 圧電型微動変位素子及びこれを使用した微少位置決め方法
JPS61145428A (ja) * 1984-12-19 1986-07-03 Citizen Watch Co Ltd 圧力測定装置
JPS61166759A (ja) * 1985-01-17 1986-07-28 Nippon Denso Co Ltd 車両の走行制御装置
JPS61207942A (ja) * 1985-03-11 1986-09-16 Shimadzu Corp 表面弾性波圧力センサ
JPS6248252A (ja) * 1985-08-23 1987-03-02 Copal Electron Co Ltd リニアガイド機構
US4629926A (en) * 1985-10-21 1986-12-16 Kiwi Coders Corporation Mounting for piezoelectric bender of fluid control device
DE3545682A1 (de) * 1985-12-21 1987-06-25 Fev Forsch Energietech Verbr Druckaufnehmer fuer den brennrauminnendruck in brennkraftmaschinen
DE3663197D1 (en) * 1986-01-22 1989-06-08 Kristal Instr Ag Sensor, especially for high-pressure measurements
JPS62224780A (ja) * 1986-03-26 1987-10-02 Hitachi Metals Ltd 圧電駆動式弁
JPS62233578A (ja) * 1986-03-31 1987-10-13 Toyota Autom Loom Works Ltd 圧電素子式弁
JPS63102834A (ja) * 1986-10-17 1988-05-07 Mitsubishi Electric Corp ワイヤカツト放電加工機
JPS63125855A (ja) * 1986-11-13 1988-05-30 Sumitomo Heavy Ind Ltd 圧力制御型摩擦駆動装置
JPS63234600A (ja) * 1987-03-24 1988-09-29 株式会社東芝 位置決め装置
JPH087106B2 (ja) * 1987-03-25 1996-01-29 日本特殊陶業株式会社 ガスケツト型圧力センサ−
DE3811311C1 (de) * 1988-04-02 1989-03-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JPH01259835A (ja) * 1988-04-08 1989-10-17 Olympus Optical Co Ltd 血管弾性率測定用ガイドワイヤ
JPH01283414A (ja) * 1988-05-06 1989-11-15 Fuji Electric Co Ltd クランプ機構
JP2606286B2 (ja) * 1988-06-10 1997-04-30 アイシン精機株式会社 超音波モータ
JPH027877A (ja) * 1988-06-24 1990-01-11 Nec Corp 振動波モータ
JPH027876A (ja) * 1988-06-24 1990-01-11 Nec Corp 振動波モータ
JP2508203B2 (ja) * 1988-07-22 1996-06-19 日本電気株式会社 振動波モ―タ
JPH0241674A (ja) * 1988-07-29 1990-02-09 Nec Corp 振動波モータ
JPH0241675A (ja) * 1988-07-29 1990-02-09 Nec Corp 振動波モータ
JPH0277718A (ja) * 1988-09-13 1990-03-16 Nec Corp 光位相変調器
JPH0280908A (ja) * 1988-09-16 1990-03-22 Mitsutoyo Corp 摩擦送り機構
JPH0285735A (ja) * 1988-09-21 1990-03-27 Nippon Denso Co Ltd 車両用減衰力検出器
JPH0295232A (ja) * 1988-09-30 1990-04-06 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
JP2724730B2 (ja) * 1988-10-28 1998-03-09 株式会社トーキン 超音波モータ
JPH02129406A (ja) * 1988-11-07 1990-05-17 T Echi K Kk 直線摺動用ベアリング
JP2529370B2 (ja) * 1988-12-08 1996-08-28 松下電器産業株式会社 高周波加熱装置
AU3992289A (en) * 1989-01-09 1990-07-12 Boc Group, Inc., The Intrauterine catheter
JPH02190348A (ja) * 1989-01-11 1990-07-26 Primages Inc 圧電的制御機能を持つ電磁駆動プリンタ装置及びその方法
JP2692228B2 (ja) * 1989-01-27 1997-12-17 富士ゼロックス株式会社 インクジェット記録装置
JPH02230274A (ja) * 1989-03-03 1990-09-12 Nec Data Terminal Ltd 電子写真方式のプリンタ
JPH02233255A (ja) * 1989-03-07 1990-09-14 Nec Corp インクジェット記録装置
JPH02236431A (ja) * 1989-03-10 1990-09-19 Matsushita Electric Ind Co Ltd 圧電型圧力センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005005029B4 (de) * 2004-02-03 2017-05-11 Denso Corporation Drucksensor mit Membran

Also Published As

Publication number Publication date
CA2038226A1 (en) 1991-09-17
EP0447255B1 (de) 1995-01-04
KR910017178A (ko) 1991-11-05
EP0447255A2 (de) 1991-09-18
ES2066347T3 (es) 1995-03-01
US5138885A (en) 1992-08-18
EP0447255A3 (en) 1991-11-06
EP0574046A2 (de) 1993-12-15
CA2038226C (en) 1994-10-11
EP0574046A3 (de) 1994-01-12
DE69106411D1 (de) 1995-02-16
TW221491B (de) 1994-03-01

Similar Documents

Publication Publication Date Title
DE69015984D1 (de) Piezoelektrischer Druckwandler.
DE69109923T2 (de) Ultraschallwandleranordnung.
DE69115141T2 (de) Oberflächenkontaktdruckwandler.
DE68914268D1 (de) Elektroakustischer Wandler.
DE69111337D1 (de) Druckmassfühler.
FR2668836B1 (fr) Transducteur acoustique de puits.
DE69105809T2 (de) Druckaufnehmer mit schwingendem Element.
DE69405498T2 (de) Druckwandler
DE69104255D1 (de) Magnetoresistiver Druckaufnehmer.
NO882864L (no) Piezoelektrisk transduser.
ATE126389T1 (de) Differenzdruckmesswandler.
DE69015704D1 (de) Hermetischer Druckwandler.
DE68912093D1 (de) Magnetostriktiver Druckwandler.
DE69104430D1 (de) Miniatur-Druckwandler.
DE69106411T2 (de) Piezoelektrischer Druckaufnehmer.
DE69214211D1 (de) Druckwandler
DE69102485T2 (de) Hydrostatischer Druckwandler.
DE69407325D1 (de) Magnetostriktiver Druckwandler
DE59004358D1 (de) Breitstrahlender ultraschallwandler.
DE58908955D1 (de) Elektroakustischer Wandler.
DE59009149D1 (de) Wandleranordnung.
DE9315086U1 (de) Druckaufnehmer
RU1828999C (ru) Датчик давлени
FR2656760B1 (fr) Transducteur piezoelectrique.
NO900708D0 (no) Piezoelektrisk transduser.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee