DE69104430D1 - Miniatur-Druckwandler. - Google Patents

Miniatur-Druckwandler.

Info

Publication number
DE69104430D1
DE69104430D1 DE69104430T DE69104430T DE69104430D1 DE 69104430 D1 DE69104430 D1 DE 69104430D1 DE 69104430 T DE69104430 T DE 69104430T DE 69104430 T DE69104430 T DE 69104430T DE 69104430 D1 DE69104430 D1 DE 69104430D1
Authority
DE
Germany
Prior art keywords
pressure transducers
miniature pressure
miniature
transducers
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69104430T
Other languages
English (en)
Other versions
DE69104430T2 (de
Inventor
Isabelle Thomas
Pierre Olivier Lefort
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Publication of DE69104430D1 publication Critical patent/DE69104430D1/de
Application granted granted Critical
Publication of DE69104430T2 publication Critical patent/DE69104430T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69104430T 1990-07-20 1991-07-16 Miniatur-Druckwandler. Expired - Fee Related DE69104430T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9009468A FR2664979B1 (fr) 1990-07-20 1990-07-20 Micro-capteur de pression.

Publications (2)

Publication Number Publication Date
DE69104430D1 true DE69104430D1 (de) 1994-11-10
DE69104430T2 DE69104430T2 (de) 1995-05-24

Family

ID=9399067

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69104430T Expired - Fee Related DE69104430T2 (de) 1990-07-20 1991-07-16 Miniatur-Druckwandler.

Country Status (5)

Country Link
US (1) US5146787A (de)
EP (1) EP0467811B1 (de)
JP (1) JPH04233280A (de)
DE (1) DE69104430T2 (de)
FR (1) FR2664979B1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2687783B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur de pression.
US5808210A (en) * 1996-12-31 1998-09-15 Honeywell Inc. Thin film resonant microbeam absolute pressure sensor
DE19844136B4 (de) * 1998-09-25 2005-08-11 Ivoclar Vivadent Ag Ofen für die Herstellung von Zahnersatzteilen
JP4188087B2 (ja) * 2001-03-23 2008-11-26 シュルンベルジェ ホールディングス リミテッド 流体特性センサー
DE10314578A1 (de) * 2003-03-31 2004-10-14 Bosch Rexroth Ag Hochfrequenzresonator
US7478559B2 (en) * 2003-12-04 2009-01-20 National University Of Singapore Capacitive pressure sensor with a cantilever member
US7508040B2 (en) * 2006-06-05 2009-03-24 Hewlett-Packard Development Company, L.P. Micro electrical mechanical systems pressure sensor
JP5158160B2 (ja) * 2010-09-10 2013-03-06 横河電機株式会社 振動式トランスデューサ
JP5252016B2 (ja) * 2011-03-18 2013-07-31 横河電機株式会社 振動式トランスデューサ
EP2805158B8 (de) 2012-01-16 2020-10-07 Abram Scientific, Inc. Verfahren und vorrichtungen zur messung von physikalischen eigenschaften von fluiden
US8984950B2 (en) * 2012-04-20 2015-03-24 Rosemount Aerospace Inc. Separation mode capacitors for sensors
US9010190B2 (en) * 2012-04-20 2015-04-21 Rosemount Aerospace Inc. Stress isolated MEMS structures and methods of manufacture
JP7328112B2 (ja) * 2019-10-09 2023-08-16 アズビル株式会社 センサ素子
CN113465791B (zh) * 2021-06-17 2022-05-20 西安交通大学 一种谐振式压力传感器及其制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer
US4614119A (en) * 1985-03-08 1986-09-30 The Foxboro Company Resonant hollow beam and method
JPS6263828A (ja) * 1985-09-06 1987-03-20 Yokogawa Electric Corp 振動式トランスジューサ
GB8610253D0 (en) * 1986-04-26 1986-05-29 Stc Plc Resonator device
JP2638813B2 (ja) * 1987-04-09 1997-08-06 株式会社デンソー 半導体圧力センサ
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
US5060526A (en) * 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element

Also Published As

Publication number Publication date
EP0467811B1 (de) 1994-10-05
FR2664979B1 (fr) 1992-11-06
US5146787A (en) 1992-09-15
EP0467811A1 (de) 1992-01-22
FR2664979A1 (fr) 1992-01-24
JPH04233280A (ja) 1992-08-21
DE69104430T2 (de) 1995-05-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee