DE69111337T2 - Druckmassfühler. - Google Patents

Druckmassfühler.

Info

Publication number
DE69111337T2
DE69111337T2 DE69111337T DE69111337T DE69111337T2 DE 69111337 T2 DE69111337 T2 DE 69111337T2 DE 69111337 T DE69111337 T DE 69111337T DE 69111337 T DE69111337 T DE 69111337T DE 69111337 T2 DE69111337 T2 DE 69111337T2
Authority
DE
Germany
Prior art keywords
pressure gauge
gauge
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69111337T
Other languages
English (en)
Other versions
DE69111337D1 (de
Inventor
Takao Kojima
Kanehisa Kitsukawa
Toshikatsu Yasuda
Katsuyoshi C O Ngk Sp Mizumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16860403&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69111337(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Publication of DE69111337D1 publication Critical patent/DE69111337D1/de
Application granted granted Critical
Publication of DE69111337T2 publication Critical patent/DE69111337T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DE69111337T 1990-08-28 1991-08-27 Druckmassfühler. Expired - Fee Related DE69111337T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2227410A JP2724419B2 (ja) 1990-08-28 1990-08-28 圧力センサ

Publications (2)

Publication Number Publication Date
DE69111337D1 DE69111337D1 (de) 1995-08-24
DE69111337T2 true DE69111337T2 (de) 1996-01-18

Family

ID=16860403

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69111337T Expired - Fee Related DE69111337T2 (de) 1990-08-28 1991-08-27 Druckmassfühler.

Country Status (6)

Country Link
US (1) US5201228A (de)
EP (1) EP0473109B1 (de)
JP (1) JP2724419B2 (de)
KR (1) KR920004824A (de)
BR (1) BR9103775A (de)
DE (1) DE69111337T2 (de)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
DE69316536T2 (de) * 1992-11-06 1998-06-04 Texas Instruments Inc Verfahren zur Herstellung eines kapazitiven Druckwandlers
US5296408A (en) * 1992-12-24 1994-03-22 International Business Machines Corporation Fabrication method for vacuum microelectronic devices
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
WO1995008759A1 (en) * 1993-09-24 1995-03-30 Rosemount Inc. Pressure transmitter isolation diaphragm
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5731522A (en) * 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
GB2307744B (en) * 1995-12-01 1999-12-01 Solartron Group Ltd Pressure sensor
GB9524624D0 (en) * 1995-12-01 1996-01-31 Weston Aerospace Ltd Pressure sensor
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5917264A (en) * 1996-09-05 1999-06-29 Nagano Keiki Co Ltd Electrostatic capacitance type transducer and method for producing the same
US5880371A (en) * 1997-01-27 1999-03-09 Texas Instruments Incorporated Pressure transducer apparatus and method for making
US6058780A (en) * 1997-03-20 2000-05-09 Alliedsignal Inc. Capacitive pressure sensor housing having a ceramic base
US6324914B1 (en) 1997-03-20 2001-12-04 Alliedsignal, Inc. Pressure sensor support base with cavity
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
DE19729785C2 (de) * 1997-07-11 1999-08-19 Micronas Semiconductor Holding Kondensatoranordnung und ihr Herstellungsverfahren
US6387318B1 (en) 1997-12-05 2002-05-14 Alliedsignal, Inc. Glass-ceramic pressure sensor support base and its fabrication
US6329740B1 (en) * 1998-12-28 2001-12-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
JP4437336B2 (ja) * 1999-05-14 2010-03-24 キヤノンアネルバ株式会社 静電容量型真空センサ
AU2629901A (en) 2000-01-06 2001-07-16 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (mems)
US6508129B1 (en) * 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6520020B1 (en) * 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
JP3850263B2 (ja) * 2001-10-25 2006-11-29 京セラ株式会社 圧力検出装置用パッケージおよび圧力検出装置
JP3545385B2 (ja) * 2002-01-15 2004-07-21 日本テキサス・インスツルメンツ株式会社 圧力センサパッケージ及びその製造方法
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US7100432B2 (en) * 2002-06-06 2006-09-05 Mineral Lassen Llc Capacitive pressure sensor
JP3681721B2 (ja) * 2002-12-04 2005-08-10 株式会社テムテック研究所 静電容量型のダイヤフラム圧力センサの製造方法
CN101479586B (zh) * 2006-04-25 2012-06-20 罗斯蒙德公司 使用近最终形状的烧结陶瓷的压力传感器
US7911315B2 (en) * 2006-07-28 2011-03-22 Honeywell International Inc. Miniature pressure sensor assembly for catheter
JP5305644B2 (ja) * 2006-12-25 2013-10-02 京セラ株式会社 圧力センサ用パッケージおよびその製造方法、ならびに圧力センサ
JP5159685B2 (ja) * 2009-03-30 2013-03-06 アズビル株式会社 静電容量型圧力センサ
US8763479B1 (en) * 2010-06-11 2014-07-01 The United States Of America As Represented By The Secretary Of The Air Force Mold and sensor cells for a nanocomposite material process control system
JP2012047725A (ja) * 2010-07-30 2012-03-08 Canon Anelva Corp 静電容量圧力センサ
JP5365665B2 (ja) * 2011-06-23 2013-12-11 横河電機株式会社 センサユニット
CN103733304B (zh) * 2011-06-29 2016-08-17 因文森斯公司 其中一部分暴露在环境下并且带有竖直集成电子器件的气密封mems设备
DE102012200983A1 (de) * 2011-12-23 2013-06-27 Continental Automotive Gmbh Sensorelement mit Luftdruckmessung
FI125447B (en) * 2013-06-04 2015-10-15 Murata Manufacturing Co Improved pressure sensor
JP6452140B2 (ja) * 2014-02-19 2019-01-16 本田技研工業株式会社 距離センサ及び計測方法
WO2017072311A1 (de) * 2015-10-30 2017-05-04 Continental Automotive Gmbh Vorrichtung zur abgasnachbehandlung
WO2017136719A1 (en) 2016-02-03 2017-08-10 Hutchinson Technology Incorporated Miniature pressure/force sensor with integrated leads
US9896327B2 (en) * 2016-05-19 2018-02-20 Invensense, Inc. CMOS-MEMS structures with out-of-plane MEMS sensing gap
US10598559B2 (en) 2017-06-29 2020-03-24 Rosemount Inc. Pressure sensor assembly
US10996120B1 (en) * 2019-11-06 2021-05-04 Vibration Measurement Solutions, Inc. Pressure sensor
KR102290322B1 (ko) * 2019-11-25 2021-08-19 주식회사 아모센스 정전용량형 압력 센서 및 그 제조 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3750476A (en) * 1967-09-25 1973-08-07 Bissett Berman Corp Pressure transducer
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4184189A (en) * 1978-08-14 1980-01-15 Motorola, Inc. Capacitive pressure sensor and method of making it
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
JPS63292032A (ja) * 1987-05-26 1988-11-29 Ngk Insulators Ltd 圧力検出器

Also Published As

Publication number Publication date
DE69111337D1 (de) 1995-08-24
JP2724419B2 (ja) 1998-03-09
EP0473109A2 (de) 1992-03-04
JPH04106442A (ja) 1992-04-08
BR9103775A (pt) 1992-05-19
EP0473109B1 (de) 1995-07-19
KR920004824A (ko) 1992-03-28
EP0473109A3 (en) 1993-07-28
US5201228A (en) 1993-04-13

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee