BR9103775A - Sensor de pressao - Google Patents
Sensor de pressaoInfo
- Publication number
- BR9103775A BR9103775A BR919103775A BR9103775A BR9103775A BR 9103775 A BR9103775 A BR 9103775A BR 919103775 A BR919103775 A BR 919103775A BR 9103775 A BR9103775 A BR 9103775A BR 9103775 A BR9103775 A BR 9103775A
- Authority
- BR
- Brazil
- Prior art keywords
- pressure sensor
- sensor
- pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2227410A JP2724419B2 (ja) | 1990-08-28 | 1990-08-28 | 圧力センサ |
Publications (1)
Publication Number | Publication Date |
---|---|
BR9103775A true BR9103775A (pt) | 1992-05-19 |
Family
ID=16860403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR919103775A BR9103775A (pt) | 1990-08-28 | 1991-08-28 | Sensor de pressao |
Country Status (6)
Country | Link |
---|---|
US (1) | US5201228A (pt) |
EP (1) | EP0473109B1 (pt) |
JP (1) | JP2724419B2 (pt) |
KR (1) | KR920004824A (pt) |
BR (1) | BR9103775A (pt) |
DE (1) | DE69111337T2 (pt) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2896725B2 (ja) * | 1991-12-26 | 1999-05-31 | 株式会社山武 | 静電容量式圧力センサ |
EP0596711B1 (en) * | 1992-11-06 | 1998-01-21 | Texas Instruments Incorporated | Method of fabricating a capacitive pressure transducer |
US5296408A (en) * | 1992-12-24 | 1994-03-22 | International Business Machines Corporation | Fabrication method for vacuum microelectronic devices |
US5483834A (en) * | 1993-09-20 | 1996-01-16 | Rosemount Inc. | Suspended diaphragm pressure sensor |
EP0720733B1 (en) * | 1993-09-24 | 1999-03-17 | Rosemount Inc. | Pressure transmitter with isolation diaphragm |
US5528452A (en) * | 1994-11-22 | 1996-06-18 | Case Western Reserve University | Capacitive absolute pressure sensor |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US5731522A (en) * | 1997-03-14 | 1998-03-24 | Rosemount Inc. | Transmitter with isolation assembly for pressure sensor |
US5637802A (en) | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
GB2307744B (en) * | 1995-12-01 | 1999-12-01 | Solartron Group Ltd | Pressure sensor |
GB9524624D0 (en) * | 1995-12-01 | 1996-01-31 | Weston Aerospace Ltd | Pressure sensor |
US5665899A (en) * | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
US5917264A (en) * | 1996-09-05 | 1999-06-29 | Nagano Keiki Co Ltd | Electrostatic capacitance type transducer and method for producing the same |
US5880371A (en) * | 1997-01-27 | 1999-03-09 | Texas Instruments Incorporated | Pressure transducer apparatus and method for making |
US6058780A (en) * | 1997-03-20 | 2000-05-09 | Alliedsignal Inc. | Capacitive pressure sensor housing having a ceramic base |
US6324914B1 (en) | 1997-03-20 | 2001-12-04 | Alliedsignal, Inc. | Pressure sensor support base with cavity |
US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
US5965821A (en) * | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
DE19729785C2 (de) * | 1997-07-11 | 1999-08-19 | Micronas Semiconductor Holding | Kondensatoranordnung und ihr Herstellungsverfahren |
US6387318B1 (en) | 1997-12-05 | 2002-05-14 | Alliedsignal, Inc. | Glass-ceramic pressure sensor support base and its fabrication |
US6329740B1 (en) * | 1998-12-28 | 2001-12-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and production method thereof |
JP4437336B2 (ja) * | 1999-05-14 | 2010-03-24 | キヤノンアネルバ株式会社 | 静電容量型真空センサ |
US6508129B1 (en) * | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
US6520020B1 (en) * | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
CN1151367C (zh) | 2000-01-06 | 2004-05-26 | 罗斯蒙德公司 | 微机电系统(mems)用的电互联的晶粒生长 |
JP3850263B2 (ja) * | 2001-10-25 | 2006-11-29 | 京セラ株式会社 | 圧力検出装置用パッケージおよび圧力検出装置 |
JP3545385B2 (ja) * | 2002-01-15 | 2004-07-21 | 日本テキサス・インスツルメンツ株式会社 | 圧力センサパッケージ及びその製造方法 |
US6848316B2 (en) * | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
US7100432B2 (en) * | 2002-06-06 | 2006-09-05 | Mineral Lassen Llc | Capacitive pressure sensor |
JP3681721B2 (ja) * | 2002-12-04 | 2005-08-10 | 株式会社テムテック研究所 | 静電容量型のダイヤフラム圧力センサの製造方法 |
CN101479586B (zh) * | 2006-04-25 | 2012-06-20 | 罗斯蒙德公司 | 使用近最终形状的烧结陶瓷的压力传感器 |
US7911315B2 (en) * | 2006-07-28 | 2011-03-22 | Honeywell International Inc. | Miniature pressure sensor assembly for catheter |
JP5305644B2 (ja) * | 2006-12-25 | 2013-10-02 | 京セラ株式会社 | 圧力センサ用パッケージおよびその製造方法、ならびに圧力センサ |
JP5159685B2 (ja) * | 2009-03-30 | 2013-03-06 | アズビル株式会社 | 静電容量型圧力センサ |
US8763479B1 (en) * | 2010-06-11 | 2014-07-01 | The United States Of America As Represented By The Secretary Of The Air Force | Mold and sensor cells for a nanocomposite material process control system |
JP2012047725A (ja) * | 2010-07-30 | 2012-03-08 | Canon Anelva Corp | 静電容量圧力センサ |
JP5365665B2 (ja) * | 2011-06-23 | 2013-12-11 | 横河電機株式会社 | センサユニット |
WO2013003789A1 (en) * | 2011-06-29 | 2013-01-03 | Invensense, Inc. | Hermetically sealed mems device with a portion exposed to the environment with vertically integrated electronics |
DE102012200983A1 (de) * | 2011-12-23 | 2013-06-27 | Continental Automotive Gmbh | Sensorelement mit Luftdruckmessung |
FI125447B (en) * | 2013-06-04 | 2015-10-15 | Murata Manufacturing Co | Improved pressure sensor |
JP6452140B2 (ja) * | 2014-02-19 | 2019-01-16 | 本田技研工業株式会社 | 距離センサ及び計測方法 |
BR112018006476A2 (pt) * | 2015-10-30 | 2018-10-09 | Continental Automotive Gmbh | dispositivo para pós-tratamento de gás de exaustão |
JP2019512084A (ja) * | 2016-02-03 | 2019-05-09 | ハッチンソン テクノロジー インコーポレイテッドHutchinson Technology Incorporated | 一体型リードを備えた小型圧力・力センサ |
US9896327B2 (en) * | 2016-05-19 | 2018-02-20 | Invensense, Inc. | CMOS-MEMS structures with out-of-plane MEMS sensing gap |
US10598559B2 (en) | 2017-06-29 | 2020-03-24 | Rosemount Inc. | Pressure sensor assembly |
US10996120B1 (en) * | 2019-11-06 | 2021-05-04 | Vibration Measurement Solutions, Inc. | Pressure sensor |
KR102290322B1 (ko) * | 2019-11-25 | 2021-08-19 | 주식회사 아모센스 | 정전용량형 압력 센서 및 그 제조 방법 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3750476A (en) * | 1967-09-25 | 1973-08-07 | Bissett Berman Corp | Pressure transducer |
US3993939A (en) * | 1975-01-07 | 1976-11-23 | The Bendix Corporation | Pressure variable capacitor |
US4184189A (en) * | 1978-08-14 | 1980-01-15 | Motorola, Inc. | Capacitive pressure sensor and method of making it |
DE3108300C2 (de) * | 1980-03-06 | 1986-05-28 | Robert Bosch Gmbh, 7000 Stuttgart | Druckmeßdose und Verfahren zu deren Herstellung |
JPS63292032A (ja) * | 1987-05-26 | 1988-11-29 | Ngk Insulators Ltd | 圧力検出器 |
-
1990
- 1990-08-28 JP JP2227410A patent/JP2724419B2/ja not_active Expired - Fee Related
-
1991
- 1991-08-23 US US07/748,883 patent/US5201228A/en not_active Expired - Fee Related
- 1991-08-27 DE DE69111337T patent/DE69111337T2/de not_active Expired - Fee Related
- 1991-08-27 EP EP91114349A patent/EP0473109B1/en not_active Expired - Lifetime
- 1991-08-28 KR KR1019910014931A patent/KR920004824A/ko not_active Application Discontinuation
- 1991-08-28 BR BR919103775A patent/BR9103775A/pt active Search and Examination
Also Published As
Publication number | Publication date |
---|---|
JPH04106442A (ja) | 1992-04-08 |
EP0473109A2 (en) | 1992-03-04 |
DE69111337T2 (de) | 1996-01-18 |
EP0473109B1 (en) | 1995-07-19 |
EP0473109A3 (en) | 1993-07-28 |
DE69111337D1 (de) | 1995-08-24 |
JP2724419B2 (ja) | 1998-03-09 |
KR920004824A (ko) | 1992-03-28 |
US5201228A (en) | 1993-04-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Decision: intention to grant | ||
KD | Notifcation of receipt (letter patent) | ||
FA4 | Application deemed withdrawn (art. 21(1)) |