KR890019684U - 압력센서 - Google Patents

압력센서

Info

Publication number
KR890019684U
KR890019684U KR2019890000834U KR890000834U KR890019684U KR 890019684 U KR890019684 U KR 890019684U KR 2019890000834 U KR2019890000834 U KR 2019890000834U KR 890000834 U KR890000834 U KR 890000834U KR 890019684 U KR890019684 U KR 890019684U
Authority
KR
South Korea
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
KR2019890000834U
Other languages
English (en)
Other versions
KR920005348Y1 (ko
Inventor
야스오 다다
Original Assignee
미쓰비시전기주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2766888U external-priority patent/JPH01131136U/ja
Priority claimed from JP2766988U external-priority patent/JPH01131137U/ja
Application filed by 미쓰비시전기주식회사 filed Critical 미쓰비시전기주식회사
Publication of KR890019684U publication Critical patent/KR890019684U/ko
Application granted granted Critical
Publication of KR920005348Y1 publication Critical patent/KR920005348Y1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/02—Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
KR2019890000834U 1988-03-01 1989-01-28 압력센서 KR920005348Y1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP88-27669 1988-03-01
JP2766888U JPH01131136U (ko) 1988-03-01 1988-03-01
JP88-27668 1988-03-01
JP2766988U JPH01131137U (ko) 1988-03-01 1988-03-01

Publications (2)

Publication Number Publication Date
KR890019684U true KR890019684U (ko) 1989-10-05
KR920005348Y1 KR920005348Y1 (ko) 1992-08-03

Family

ID=26365628

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019890000834U KR920005348Y1 (ko) 1988-03-01 1989-01-28 압력센서

Country Status (2)

Country Link
US (1) US4895026A (ko)
KR (1) KR920005348Y1 (ko)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0744993Y2 (ja) * 1989-06-02 1995-10-11 三菱電機株式会社 圧力センサ
ES2048322T3 (es) * 1989-08-04 1994-03-16 Endress Hauser Gmbh Co Dispositivo manometrico.
JP3092307B2 (ja) * 1992-04-16 2000-09-25 富士電機株式会社 半導体圧力センサ
US5351550A (en) * 1992-10-16 1994-10-04 Honeywell Inc. Pressure sensor adapted for use with a component carrier
US5471884A (en) * 1994-07-05 1995-12-05 Motorola, Inc. Gain-adjusting circuitry for combining two sensors to form a media isolated differential pressure sensor
US5540092A (en) * 1994-10-31 1996-07-30 Handfield; Michael System and method for monitoring a pneumatic tire
EP0753728A3 (en) * 1995-07-14 1998-04-15 Yokogawa Electric Corporation Semiconductor differential pressure measuring device
EP1176410A1 (en) * 1996-07-10 2002-01-30 Honeywell Data Instruments, Inc. Pressure transducer with error compensation
WO1998001731A1 (en) * 1996-07-10 1998-01-15 Honeywell Data Instruments, Inc. Pressure transducer with error compensation
DE19709846C1 (de) * 1997-02-28 1998-04-02 Siemens Ag Druckdifferenz-Meßumformer
US6010303A (en) * 1998-08-05 2000-01-04 United Technologies Corporation Apparatus and method of predicting aerodynamic and aeromechanical instabilities in turbofan engines
JP3532776B2 (ja) * 1998-10-20 2004-05-31 株式会社日立製作所 自動車用センサの取付け構造
US6564642B1 (en) * 2000-11-02 2003-05-20 Kavlico Corporation Stable differential pressure measuring system
US6508114B2 (en) 2000-11-29 2003-01-21 Casco Products Corporation Webbing tension sensor
US6581468B2 (en) 2001-03-22 2003-06-24 Kavlico Corporation Independent-excitation cross-coupled differential-pressure transducer
US6857845B2 (en) * 2002-08-23 2005-02-22 York International Corporation System and method for detecting rotating stall in a centrifugal compressor
JP2004281697A (ja) * 2003-03-14 2004-10-07 Canon Inc 露光装置及び収差補正方法
DE102005036735A1 (de) 2005-08-04 2007-02-08 Robert Bosch Gmbh Differenzdrucksensor mit Drift- und Hysteresereduktion und entsprechendes Messverfahren
DE102005047091A1 (de) * 2005-09-30 2007-04-05 Robert Bosch Gmbh Verfahren zur Erfassung eines Drucks eines Mediums und Druckmessvorrichtung
US7162927B1 (en) * 2005-12-16 2007-01-16 Honeywell International Inc. Design of a wet/wet amplified differential pressure sensor based on silicon piezoresistive technology
JP4940786B2 (ja) * 2006-06-29 2012-05-30 株式会社デンソー 圧力センサ
JP5853171B2 (ja) * 2010-12-13 2016-02-09 パナソニックＩｐマネジメント株式会社 半導体圧力センサおよびその製造方法
US8770034B2 (en) * 2011-09-06 2014-07-08 Honeywell International Inc. Packaged sensor with multiple sensors elements
DE102013226138A1 (de) * 2013-12-17 2015-06-18 Robert Bosch Gmbh Drucksensorvorrichtung, Luftmassenmessvorrichtung, Luftmassenmesssystem und Druckmessverfahren
US10190931B2 (en) * 2014-09-03 2019-01-29 Cometnetwork Co., Ltd. Differential pressure sensor
US10260981B2 (en) * 2017-02-06 2019-04-16 Nxp Usa, Inc. Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4222277A (en) * 1979-08-13 1980-09-16 Kulite Semiconductor Products, Inc. Media compatible pressure transducer
JPS60100026A (ja) * 1983-11-04 1985-06-03 Shindengen Electric Mfg Co Ltd 半導体圧力センサ
JPS6187338A (ja) * 1984-10-05 1986-05-02 Nec Corp 多重ビ−ム照射Ｓｉ表面ドライ洗浄法
JPH0781941B2 (ja) * 1985-10-30 1995-09-06 三菱原子燃料株式会社 スラリーの平均粒子径測定装置
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors

Also Published As

Publication number Publication date
KR920005348Y1 (ko) 1992-08-03
US4895026A (en) 1990-01-23

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Legal Events

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