DE69405498T2 - Druckwandler - Google Patents

Druckwandler

Info

Publication number
DE69405498T2
DE69405498T2 DE69405498T DE69405498T DE69405498T2 DE 69405498 T2 DE69405498 T2 DE 69405498T2 DE 69405498 T DE69405498 T DE 69405498T DE 69405498 T DE69405498 T DE 69405498T DE 69405498 T2 DE69405498 T2 DE 69405498T2
Authority
DE
Germany
Prior art keywords
pressure transducer
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69405498T
Other languages
English (en)
Other versions
DE69405498D1 (de
Inventor
Takeshi Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Application granted granted Critical
Publication of DE69405498D1 publication Critical patent/DE69405498D1/de
Publication of DE69405498T2 publication Critical patent/DE69405498T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE69405498T 1993-08-23 1994-08-23 Druckwandler Expired - Lifetime DE69405498T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP05230921A JP3141645B2 (ja) 1993-08-23 1993-08-23 圧力センサ

Publications (2)

Publication Number Publication Date
DE69405498D1 DE69405498D1 (de) 1997-10-16
DE69405498T2 true DE69405498T2 (de) 1998-03-19

Family

ID=16915374

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69405498T Expired - Lifetime DE69405498T2 (de) 1993-08-23 1994-08-23 Druckwandler

Country Status (4)

Country Link
US (1) US5663505A (de)
EP (1) EP0640818B1 (de)
JP (1) JP3141645B2 (de)
DE (1) DE69405498T2 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7038358B2 (en) * 2002-03-15 2006-05-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electro-active transducer using radial electric field to produce/sense out-of-plane transducer motion
US6919669B2 (en) * 2002-03-15 2005-07-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electro-active device using radial electric field piezo-diaphragm for sonic applications
WO2003079409A2 (en) 2002-03-15 2003-09-25 United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electro-active device using radial electric field piezo-diaphragm for control of fluid movement
JP2004056601A (ja) * 2002-07-22 2004-02-19 Toyo Commun Equip Co Ltd 圧電振動子およびその製造方法
US6909221B2 (en) * 2002-08-01 2005-06-21 Georgia Tech Research Corporation Piezoelectric on semiconductor-on-insulator microelectromechanical resonators
US7023065B2 (en) * 2002-08-07 2006-04-04 Georgia Tech Research Corporation Capacitive resonators and methods of fabrication
US6924584B2 (en) * 2002-12-13 2005-08-02 Palo Alto Research Center Inc. Piezoelectric transducers utilizing sub-diaphragms
US7176600B2 (en) * 2003-12-18 2007-02-13 Palo Alto Research Center Incorporated Poling system for piezoelectric diaphragm structures
US7084555B2 (en) * 2003-12-18 2006-08-01 Palo Alto Research Center Incorporated Piezoelectric diaphragm structure with outer edge electrode
US7053532B2 (en) * 2003-12-18 2006-05-30 Palo Alto Research Center Incorporated Radially poled piezoelectric diaphragm structures
WO2007067690A2 (en) * 2005-12-07 2007-06-14 Drexel University Detection of blood pressure and blood pressure waveform
US7578189B1 (en) 2006-05-10 2009-08-25 Qualtre, Inc. Three-axis accelerometers
US7538477B2 (en) * 2006-11-27 2009-05-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Multi-layer transducers with annular contacts
US7579753B2 (en) * 2006-11-27 2009-08-25 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Transducers with annular contacts
CN101368988B (zh) * 2007-08-15 2011-02-02 中国科学院电子学研究所 免封装压电驱动式微小型电场传感器
DE102008007774A1 (de) * 2008-02-06 2009-08-13 Robert Bosch Gmbh Biegewandler zum Erzeugen von elektrischer Energie aus mechanischen Verformungen
DE102008011682A1 (de) * 2008-02-28 2009-09-03 Robert Bosch Gmbh Vorrichtung zur Messung der Druckverteilung auf einem Bauteil
JP5309898B2 (ja) * 2008-10-31 2013-10-09 セイコーエプソン株式会社 圧力センサ装置
US10129656B2 (en) * 2009-01-30 2018-11-13 Avago Technologies International Sales Pte. Limited Active temperature control of piezoelectric membrane-based micro-electromechanical devices
US9327316B2 (en) * 2009-06-30 2016-05-03 Avago Technologies General Ip (Singapore) Pte. Ltd. Multi-frequency acoustic array
US9970764B2 (en) 2009-08-31 2018-05-15 Georgia Tech Research Corporation Bulk acoustic wave gyroscope with spoked structure
TWI372570B (en) * 2009-12-25 2012-09-11 Ind Tech Res Inst Capacitive sensor and manufacturing method thereof
US8258678B2 (en) * 2010-02-23 2012-09-04 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Short range ultrasonic device with broadbeam ultrasonic transducers
JP5216041B2 (ja) * 2010-04-07 2013-06-19 ダイキン工業株式会社 透明圧電シートをそれぞれ有するフレーム付透明圧電シート、タッチパネル、および電子装置
US20170363488A1 (en) * 2014-08-04 2017-12-21 Ceramtec Gmbh Protective electrode for a piezoceramic sensor
US20160146680A1 (en) * 2014-11-21 2016-05-26 California Institute Of Technology Pressure sensor using piezoelectric bending resonators
CN108700613B (zh) * 2016-02-22 2021-02-09 株式会社村田制作所 压电器件
CN105807988A (zh) * 2016-02-25 2016-07-27 京东方科技集团股份有限公司 触控显示基板、触控显示屏及触控显示基板的制作方法
EP4256282A1 (de) 2020-12-04 2023-10-11 Perceptive Sensor Technologies, Inc. Detektion von akustischem signalmaterial mit mehreren aussprechungen
US11946905B2 (en) 2020-12-30 2024-04-02 Perceptive Sensor Technologies, Inc. Evaluation of fluid quality with signals
WO2024091308A1 (en) 2022-07-19 2024-05-02 Perceptive Sensor Technologies, Inc. Acoustic signal material identification with nanotube couplant

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2943278A (en) * 1958-11-17 1960-06-28 Oskar E Mattiat Piezoelectric filter transformer
US2969512A (en) * 1960-02-17 1961-01-24 Clevite Corp Piezoelectric ceramic resonators
US4392074A (en) * 1980-09-19 1983-07-05 Siemens Aktiengesellschaft Trigger device and piezo-ignition coupler with galvanic decoupling
FR2504265A1 (fr) * 1981-04-15 1982-10-22 Detaint Jacques Dispositif de mesure de la pression d'un gaz
US4445384A (en) * 1982-03-30 1984-05-01 Honeywell Inc. Piezoelectric pressure sensor
GB2137056B (en) * 1983-03-16 1986-09-03 Standard Telephones Cables Ltd Communications apparatus
US4644804A (en) * 1984-07-17 1987-02-24 Franz Rittmeyer Ag Quartz resonating force and pressure transducer
DE3673121D1 (de) * 1985-10-25 1990-09-13 Fuji Electric Co Ltd Wandler vom schwingungstyp.
GB2200211B (en) * 1986-12-08 1991-01-16 Fuji Electric Co Ltd Vibration-type transducer

Also Published As

Publication number Publication date
US5663505A (en) 1997-09-02
EP0640818A1 (de) 1995-03-01
DE69405498D1 (de) 1997-10-16
EP0640818B1 (de) 1997-09-10
JPH0763629A (ja) 1995-03-10
JP3141645B2 (ja) 2001-03-05

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Legal Events

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8364 No opposition during term of opposition