DE69106091T2 - Verfahren zur Abscheidung eines dünnen Films. - Google Patents
Verfahren zur Abscheidung eines dünnen Films.Info
- Publication number
- DE69106091T2 DE69106091T2 DE69106091T DE69106091T DE69106091T2 DE 69106091 T2 DE69106091 T2 DE 69106091T2 DE 69106091 T DE69106091 T DE 69106091T DE 69106091 T DE69106091 T DE 69106091T DE 69106091 T2 DE69106091 T2 DE 69106091T2
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- deposition process
- film deposition
- thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/01—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate comprising only passive thin-film or thick-film elements formed on a common insulating substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
- C23C16/4551—Jet streams
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/16—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/08—Germanium
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25300290 | 1990-09-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69106091D1 DE69106091D1 (de) | 1995-02-02 |
DE69106091T2 true DE69106091T2 (de) | 1995-08-10 |
Family
ID=17245124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69106091T Expired - Lifetime DE69106091T2 (de) | 1990-09-21 | 1991-09-20 | Verfahren zur Abscheidung eines dünnen Films. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5234862A (de) |
EP (1) | EP0476676B1 (de) |
JP (1) | JP2995509B2 (de) |
KR (1) | KR970003897B1 (de) |
CA (1) | CA2051554C (de) |
DE (1) | DE69106091T2 (de) |
TW (1) | TW209253B (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5534072A (en) * | 1992-06-24 | 1996-07-09 | Anelva Corporation | Integrated module multi-chamber CVD processing system and its method for processing subtrates |
KR100224710B1 (ko) | 1995-10-10 | 1999-10-15 | 윤종용 | 반도체 장치의 커패시터 제조 방법 |
JP2970499B2 (ja) * | 1995-10-30 | 1999-11-02 | 日本電気株式会社 | 半導体装置の製造方法 |
KR100224707B1 (ko) * | 1995-12-23 | 1999-10-15 | 윤종용 | 반도체 장치 커패시터의 제조방법 |
SG74012A1 (en) * | 1996-05-10 | 2000-07-18 | Sumitomo Chemical Co | Device for production of compound semiconductor |
KR100219482B1 (ko) * | 1996-05-23 | 1999-09-01 | 윤종용 | 반도체 메모리 장치의 커패시터 제조 방법 |
KR100200705B1 (ko) * | 1996-06-08 | 1999-06-15 | 윤종용 | 반도체 디바이스 제조장치, 제조장치의 공정 조건 조절방법 및 이를 이용한 커패시터 제조방법 |
KR100230363B1 (ko) * | 1996-06-28 | 1999-11-15 | 윤종용 | 반도체장치의 커패시터 제조방법 |
KR100269287B1 (ko) * | 1996-11-22 | 2000-11-01 | 윤종용 | 반도체장치의hsg형성방법 |
US6117692A (en) * | 1997-01-14 | 2000-09-12 | Kim; Young-Sun | Calibrated methods of forming hemispherical grained silicon layers |
KR100259038B1 (ko) * | 1997-03-31 | 2000-06-15 | 윤종용 | 반도체커패시터제조방법및그에따라형성된반도체커패시터 |
KR100247931B1 (ko) * | 1997-05-21 | 2000-03-15 | 윤종용 | 반구형 그레인의 다결정실리콘막을 갖는 반도체장치의 제조방법 |
US6245632B1 (en) | 1997-05-22 | 2001-06-12 | Samsung Electronics Co., Ltd. | Variable temperature methods of forming hemispherical grained silicon (HSG-Si) layers |
KR100234380B1 (ko) * | 1997-06-11 | 1999-12-15 | 윤종용 | 반구형 그레인의 실리콘막을 갖는 반도체장치의 제조방법 |
JP3079367B2 (ja) * | 1997-10-03 | 2000-08-21 | セイコー精機株式会社 | ターボ分子ポンプ |
JP3796030B2 (ja) | 1997-11-16 | 2006-07-12 | キヤノンアネルバ株式会社 | 薄膜作成装置 |
US5885867A (en) * | 1997-12-03 | 1999-03-23 | Samsung Electronics Co., Ltd. | Methods of forming hemispherical grained silicon layers including anti-nucleation gases |
US6004858A (en) * | 1997-12-11 | 1999-12-21 | Samsung Electronics Co., Ltd. | Methods of forming hemispherical grained silicon (HSG-Si) capacitor structures including protective layers |
JPH11238688A (ja) * | 1998-02-23 | 1999-08-31 | Shin Etsu Handotai Co Ltd | 薄膜の製造方法 |
US6087226A (en) * | 1998-03-26 | 2000-07-11 | Samsung Electronics Co., Ltd. | Methods of forming capacitors including electrodes with hemispherical grained silicon layers on sidewalls thereof and related structures |
KR100327123B1 (ko) | 1998-03-30 | 2002-08-24 | 삼성전자 주식회사 | 디램셀캐패시터의제조방법 |
JP3607664B2 (ja) * | 2000-12-12 | 2005-01-05 | 日本碍子株式会社 | Iii−v族窒化物膜の製造装置 |
FR2830873B1 (fr) * | 2001-10-16 | 2004-01-16 | Snecma Moteurs | Procede de protection par aluminisation de pieces metalliques constituees au moins en partie par une structure en nid d'abeilles |
FR2830874B1 (fr) * | 2001-10-16 | 2004-01-16 | Snecma Moteurs | Procede de protection par aluminisation de pieces metalliques de turbomachines munies de trous et cavites |
US6784103B1 (en) * | 2003-05-21 | 2004-08-31 | Freescale Semiconductor, Inc. | Method of formation of nanocrystals on a semiconductor structure |
JP5049605B2 (ja) | 2007-01-29 | 2012-10-17 | パナソニック株式会社 | 円筒成形品、レンズ鏡筒、カメラおよび射出成形用金型 |
JP5066981B2 (ja) * | 2007-03-30 | 2012-11-07 | 東京エレクトロン株式会社 | 成膜方法、成膜装置及び記憶媒体 |
US20110054633A1 (en) * | 2008-01-18 | 2011-03-03 | Nanosurface Technologies, Llc | Nanofilm Protective and Release Matrices |
EP2257971A4 (de) * | 2008-01-18 | 2012-11-28 | Nanosurface Technologies Llc | Nanofilmschutz- und ablösematrizen |
KR102052074B1 (ko) * | 2013-04-04 | 2019-12-05 | 삼성디스플레이 주식회사 | 증착 장치, 이를 이용한 박막 형성 방법 및 유기 발광 표시 장치 제조 방법 |
CN109518166B (zh) * | 2019-01-28 | 2023-09-22 | 南京爱通智能科技有限公司 | 一种适用于超大规模原子层沉积的气体匀流系统 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL6706895A (de) * | 1967-02-23 | 1968-08-26 | ||
US4137865A (en) * | 1976-12-30 | 1979-02-06 | Bell Telephone Laboratories, Incorporated | Molecular beam apparatus for processing a plurality of substrates |
JPH0766909B2 (ja) * | 1984-07-26 | 1995-07-19 | 新技術事業団 | 元素半導体単結晶薄膜の成長法 |
US4829021A (en) * | 1986-12-12 | 1989-05-09 | Daido Sanso K.K. | Process for vacuum chemical epitaxy |
EP0305195A3 (de) * | 1987-08-27 | 1990-11-28 | Texas Instruments Incorporated | Wachstum eines unter inneren Spannungen mittels ununterbrochener CVD gebildeten Übergitters unter Verwendung gebräuchlicher CVD-Reaktoren |
US5160545A (en) * | 1989-02-03 | 1992-11-03 | Applied Materials, Inc. | Method and apparatus for epitaxial deposition |
EP0382988A1 (de) * | 1989-02-13 | 1990-08-22 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Anlage zur chemischen Dampfphasenausscheidung |
JP2504611B2 (ja) * | 1990-08-10 | 1996-06-05 | 株式会社東芝 | 気相成長装置 |
-
1991
- 1991-09-06 TW TW080107082A patent/TW209253B/zh active
- 1991-09-09 US US07/756,573 patent/US5234862A/en not_active Expired - Lifetime
- 1991-09-17 CA CA002051554A patent/CA2051554C/en not_active Expired - Fee Related
- 1991-09-19 KR KR1019910016357A patent/KR970003897B1/ko not_active IP Right Cessation
- 1991-09-20 DE DE69106091T patent/DE69106091T2/de not_active Expired - Lifetime
- 1991-09-20 JP JP26892391A patent/JP2995509B2/ja not_active Expired - Fee Related
- 1991-09-20 EP EP91115990A patent/EP0476676B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0476676A2 (de) | 1992-03-25 |
EP0476676A3 (en) | 1992-04-15 |
CA2051554C (en) | 1999-08-24 |
KR920007169A (ko) | 1992-04-28 |
TW209253B (de) | 1993-07-11 |
CA2051554A1 (en) | 1992-03-22 |
US5234862A (en) | 1993-08-10 |
DE69106091D1 (de) | 1995-02-02 |
KR970003897B1 (ko) | 1997-03-22 |
EP0476676B1 (de) | 1994-12-21 |
JP2995509B2 (ja) | 1999-12-27 |
JPH05251355A (ja) | 1993-09-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |