NL6706895A - - Google Patents

Info

Publication number
NL6706895A
NL6706895A NL6706895A NL6706895A NL6706895A NL 6706895 A NL6706895 A NL 6706895A NL 6706895 A NL6706895 A NL 6706895A NL 6706895 A NL6706895 A NL 6706895A NL 6706895 A NL6706895 A NL 6706895A
Authority
NL
Netherlands
Application number
NL6706895A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6706895A publication Critical patent/NL6706895A/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
NL6706895A 1967-02-23 1967-05-18 NL6706895A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH286867 1967-02-23

Publications (1)

Publication Number Publication Date
NL6706895A true NL6706895A (de) 1968-08-26

Family

ID=4243376

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6706895A NL6706895A (de) 1967-02-23 1967-05-18

Country Status (2)

Country Link
FR (1) FR1555010A (de)
NL (1) NL6706895A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH621714A5 (de) * 1976-06-08 1981-02-27 Balzers Hochvakuum
TW209253B (de) * 1990-09-21 1993-07-11 Nidden Aneruba Kk

Also Published As

Publication number Publication date
FR1555010A (de) 1969-01-24

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