DE69103072D1 - Verfahren zur Herstellung eines funktionellen Dünnfilms. - Google Patents

Verfahren zur Herstellung eines funktionellen Dünnfilms.

Info

Publication number
DE69103072D1
DE69103072D1 DE69103072T DE69103072T DE69103072D1 DE 69103072 D1 DE69103072 D1 DE 69103072D1 DE 69103072 T DE69103072 T DE 69103072T DE 69103072 T DE69103072 T DE 69103072T DE 69103072 D1 DE69103072 D1 DE 69103072D1
Authority
DE
Germany
Prior art keywords
producing
thin film
functional thin
functional
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69103072T
Other languages
English (en)
Other versions
DE69103072T2 (de
Inventor
Yoshiharu Maezawa
Norimoto Nouchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69103072D1 publication Critical patent/DE69103072D1/de
Application granted granted Critical
Publication of DE69103072T2 publication Critical patent/DE69103072T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)
DE69103072T 1990-04-23 1991-04-22 Verfahren zur Herstellung eines funktionellen Dünnfilms. Expired - Fee Related DE69103072T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2107241A JPH046627A (ja) 1990-04-23 1990-04-23 高機能性薄膜とその製造方法

Publications (2)

Publication Number Publication Date
DE69103072D1 true DE69103072D1 (de) 1994-09-01
DE69103072T2 DE69103072T2 (de) 1995-03-16

Family

ID=14454058

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69103072T Expired - Fee Related DE69103072T2 (de) 1990-04-23 1991-04-22 Verfahren zur Herstellung eines funktionellen Dünnfilms.

Country Status (4)

Country Link
US (1) US5186977A (de)
EP (1) EP0454009B1 (de)
JP (1) JPH046627A (de)
DE (1) DE69103072T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9323033D0 (en) * 1993-11-09 1994-01-05 Gen Vacuum Equip Ltd Evaporator for vacuum web coating
JPH08136932A (ja) * 1994-11-08 1996-05-31 Seiko Instr Inc 液晶に微少に傾斜した垂直配列を導入する方法、液晶電気光学素子及び液晶ライトバルブ
JP4139186B2 (ja) * 2002-10-21 2008-08-27 東北パイオニア株式会社 真空蒸着装置
JP2008204835A (ja) * 2007-02-21 2008-09-04 Matsushita Electric Ind Co Ltd 電気化学素子とその電極の前処理方法および製造方法、前処理装置
CN106929806B (zh) * 2016-10-25 2020-06-02 广东振华科技股份有限公司 高阻隔纳米无机非金属薄膜、其制备方法以及真空卷绕镀膜设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237453A (en) * 1975-09-19 1977-03-23 Hitachi Ltd Process for fabricating liquid crystal display device
JPS57179952A (en) * 1981-04-24 1982-11-05 Fuji Photo Film Co Ltd Method and apparatus for magnetic recording medium
DE3232520A1 (de) * 1981-09-03 1983-03-17 Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa Verfahren zur herstellung eines magnetischen aufzeichnungstraegers
JPS58158027A (ja) * 1982-03-16 1983-09-20 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法
JPS6081710A (ja) * 1983-10-08 1985-05-09 コニカ株式会社 透明導電性光学装置
US4713262A (en) * 1984-08-14 1987-12-15 Fuji Photo Film Co., Ltd. Manufacturing method for a magnetic recording medium
JPS61242631A (ja) * 1985-04-20 1986-10-28 Nippon Soken Inc 化合物超微粒子の作製方法および作製装置
JPS6226638A (ja) * 1985-07-25 1987-02-04 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造方法
JPS62121929A (ja) * 1985-11-21 1987-06-03 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法
US4800105A (en) * 1986-07-22 1989-01-24 Nihon Shinku Gijutsu Kabushiki Kaisha Method of forming a thin film by chemical vapor deposition
JPS63104220A (ja) * 1986-10-21 1988-05-09 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法
US4885189A (en) * 1986-10-21 1989-12-05 Fuji Photo Film Co., Ltd. Method of producing magnetic recording media
JPS63152017A (ja) * 1986-12-16 1988-06-24 Fuji Photo Film Co Ltd 磁気記録媒体
JPH0654533B2 (ja) * 1987-02-04 1994-07-20 富士写真フイルム株式会社 磁気記録媒体
JPH01258226A (ja) * 1988-04-07 1989-10-16 Hitachi Maxell Ltd 磁気記録媒体の製造方法

Also Published As

Publication number Publication date
DE69103072T2 (de) 1995-03-16
EP0454009A1 (de) 1991-10-30
US5186977A (en) 1993-02-16
EP0454009B1 (de) 1994-07-27
JPH046627A (ja) 1992-01-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8328 Change in the person/name/address of the agent

Representative=s name: JUNG, SCHIRDEWAHN, GRUENBERG, SCHNEIDER PATENTANWAELTE

8328 Change in the person/name/address of the agent

Representative=s name: ADVOTEC. PATENT- UND RECHTSANWAELTE, 80538 MUENCHE

8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP

8339 Ceased/non-payment of the annual fee