DE69013948D1 - Verfahren zur Herstellung eines dünnen Filmes. - Google Patents

Verfahren zur Herstellung eines dünnen Filmes.

Info

Publication number
DE69013948D1
DE69013948D1 DE69013948T DE69013948T DE69013948D1 DE 69013948 D1 DE69013948 D1 DE 69013948D1 DE 69013948 T DE69013948 T DE 69013948T DE 69013948 T DE69013948 T DE 69013948T DE 69013948 D1 DE69013948 D1 DE 69013948D1
Authority
DE
Germany
Prior art keywords
making
thin film
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69013948T
Other languages
English (en)
Other versions
DE69013948T2 (de
Inventor
Kiyokazu Tohma
Ryuji Sugita
Kazuyoshi Honda
Yasuhiro Kawawake
Tatsuaki Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1067062A external-priority patent/JPH089782B2/ja
Priority claimed from JP1156522A external-priority patent/JP2679260B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE69013948D1 publication Critical patent/DE69013948D1/de
Publication of DE69013948T2 publication Critical patent/DE69013948T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
    • B29C2035/0872—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using ion-radiation, e.g. alpha-rays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
    • B29C2035/0877—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using electron radiation, e.g. beta-rays

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
DE69013948T 1989-03-17 1990-03-16 Verfahren zur Herstellung eines dünnen Filmes. Expired - Fee Related DE69013948T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1067062A JPH089782B2 (ja) 1989-03-17 1989-03-17 薄膜の製造方法
JP1156522A JP2679260B2 (ja) 1989-06-19 1989-06-19 薄膜の製造方法

Publications (2)

Publication Number Publication Date
DE69013948D1 true DE69013948D1 (de) 1994-12-15
DE69013948T2 DE69013948T2 (de) 1995-06-14

Family

ID=26408264

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69013948T Expired - Fee Related DE69013948T2 (de) 1989-03-17 1990-03-16 Verfahren zur Herstellung eines dünnen Filmes.

Country Status (4)

Country Link
US (1) US5087476A (de)
EP (1) EP0387904B1 (de)
KR (1) KR920005439B1 (de)
DE (1) DE69013948T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5316802A (en) * 1992-02-20 1994-05-31 Nissin Electric Co., Ltd. Method of forming copper film on substrate
US6294479B1 (en) * 1992-05-21 2001-09-25 Nissin Electric Co., Ltd Film forming method and apparatus
DE4227873A1 (de) * 1992-08-22 1994-02-24 Leybold Ag Verfahren und Vorrichtung zum kontinuierlichen Beschichten von nichtleitenden Folien im Vakuum
US6083628A (en) * 1994-11-04 2000-07-04 Sigma Laboratories Of Arizona, Inc. Hybrid polymer film
US6010600A (en) * 1996-02-22 2000-01-04 The Regents Of The University Of California Maskless deposition technique for the physical vapor deposition of thin film and multilayer coatings with subnanometer precision and accuracy
US5743966A (en) * 1996-05-31 1998-04-28 The Boc Group, Inc. Unwinding of plastic film in the presence of a plasma
GB2323855B (en) * 1997-04-01 2002-06-05 Ion Coat Ltd Method and apparatus for depositing a coating on a conductive substrate
US6555182B1 (en) * 1998-07-03 2003-04-29 Sony Corporation Surface hardened resins for disk substrates, methods of manufacture thereof and production devices for the manufacture thereof
DE19906008A1 (de) 1999-02-15 2000-08-17 Binder Kletten Haftverschlus S Verfahren und Vorrichtung zur Herstellung von Haftverschlußteilen aus strahlengehärteten Kunststoffen
JP4516304B2 (ja) * 2003-11-20 2010-08-04 株式会社アルバック 巻取式真空蒸着方法及び巻取式真空蒸着装置
US7670433B2 (en) * 2005-02-16 2010-03-02 Ulvac, Inc. Vacuum deposition apparatus of the winding type
DE102006028581A1 (de) 2006-06-22 2007-12-27 Gottlieb Binder Gmbh & Co. Kg Verfahren und Vorrichtung zur Oberflächenfunktionalisierung von Haftverschlußteilen
US7906182B1 (en) 2008-01-17 2011-03-15 University Of South Florida Method of thin film electrospray deposition
WO2015175934A1 (en) * 2014-05-15 2015-11-19 Anthony John Mark Deposition and patterning using emitted electrons

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1297782B (de) * 1965-01-07 1969-06-19 Akad Wissenschaften Ddr Vorrichtung zum Beseitigen von elektrostatischen Ladungen bei Nichtleitern
DE3172124D1 (en) * 1980-06-10 1985-10-10 Matsushita Electric Ind Co Ltd A method of vacuum depositing a layer on a plastics film substrate
JPS5754314A (ja) * 1980-09-19 1982-03-31 Matsushita Electric Ind Co Ltd Shinkunaihimakukeiseisochi
US4495242A (en) * 1981-04-02 1985-01-22 Fuji Photo Film Co., Ltd. Magnetic recording medium
US4489124A (en) * 1981-04-06 1984-12-18 Olympus Optical Co Process for forming thin film, heat treatment process of thin film sheet, and heat treatment apparatus therefor
JPS5864381A (ja) * 1981-10-09 1983-04-16 Matsushita Electric Ind Co Ltd 真空蒸着装置
JPS5942635A (ja) * 1982-08-31 1984-03-09 Matsushita Electric Ind Co Ltd 磁気記録媒体の製造方法
JPS59113176A (ja) * 1982-12-20 1984-06-29 Ricoh Co Ltd 真空蒸着方法
JPS60184674A (ja) * 1984-03-01 1985-09-20 Matsushita Electric Ind Co Ltd 連続薄膜形成用真空装置
US4560577A (en) * 1984-09-14 1985-12-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Oxidation protection coatings for polymers
EP0387619A3 (de) * 1985-05-31 1991-10-09 Hitachi Maxell Ltd. Verfahren und Apparat zur Herstellung eines magnetischen Aufzeichnungsträgers
DE3641718A1 (de) * 1986-12-06 1988-06-16 Leybold Ag Verfahren zum herstellen von wickeln aus im vakuum leitfaehig beschichteten isolierstoff-folien
US4886681A (en) * 1987-01-20 1989-12-12 International Business Machines Corporation Metal-polymer adhesion by low energy bombardment
US4776925A (en) * 1987-04-30 1988-10-11 The Trustees Of Columbia University In The City Of New York Method of forming dielectric thin films on silicon by low energy ion beam bombardment
JPH01165032A (ja) * 1987-12-21 1989-06-29 Canon Inc 磁気記録媒体の製造方法

Also Published As

Publication number Publication date
DE69013948T2 (de) 1995-06-14
EP0387904B1 (de) 1994-11-09
KR920005439B1 (ko) 1992-07-04
EP0387904A3 (de) 1991-10-30
EP0387904A2 (de) 1990-09-19
KR900014626A (ko) 1990-10-24
US5087476A (en) 1992-02-11

Similar Documents

Publication Publication Date Title
DE3782683D1 (de) Verfahren zur herstellung eines duennfilmtransistors.
DE3752301T2 (de) Verfahren zur Herstellung eines Dünnschichttransistors
DE3881077D1 (de) Verfahren zur herstellung eines diamantfilms.
DE3886684T2 (de) Verfahren zur Herstellung eines selbstausrichtenden Dünnschichttransistors.
DE69433375D1 (de) Verfahren zur Herstellung eines Dünnschichtmusters
DE68921704D1 (de) Verfahren zur Herstellung eines Folienkondensators.
DE3776240D1 (de) Verfahren zur herstellung eines ferritfilmes.
DE69018717T2 (de) Verfahren zur Herstellung eines Polyimidfilms.
DE68920417D1 (de) Verfahren zur Herstellung eines kohlenstoffhaltigen Films.
DE69707994T2 (de) Verfahren zur Herstellung eines wasserabweisenden dünnen Filmes
DE69013948T2 (de) Verfahren zur Herstellung eines dünnen Filmes.
DE3574740D1 (de) Verfahren zur herstellung eines keramischen films.
DE68915377T2 (de) Verfahren zur Herstellung eines Wellenleiters.
DE68921795D1 (de) Verfahren zur Herstellung eines Dünnfilmmagnetkopfes.
DE68907209D1 (de) Verfahren zur herstellung eines supraleitfaehigen duennfilmes.
ATA227289A (de) Verfahren zur herstellung duenner molybdaensulfidfilme
DE3882881D1 (de) Verfahren zur herstellung eines polyacetylen- oder polydiacetylenfilms.
DE3864056D1 (de) Verfahren zur herstellung eines supraleitenden duennen films und vorrichtung hierfuer.
DE68900391D1 (de) Verfahren und vorrichtung zur herstellung eines duennen organischen filmes.
DE69114395D1 (de) Verfahren zur Herstellung eines Verbundfilms.
DE3854493T2 (de) Verfahren zur Herstellung eines Dünnschichtsupraleiters.
DE69007321D1 (de) Verfahren zur Herstellung eines Films.
DE3585048D1 (de) Verfahren und vorrichtung zur herstellung eines duennfilmes.
DE69103072D1 (de) Verfahren zur Herstellung eines funktionellen Dünnfilms.
DE68927229D1 (de) Harzzusammensetzung und verfahren zur herstellung eines durchsichtigen dünnen filmes

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee