DE69013948D1 - Verfahren zur Herstellung eines dünnen Filmes. - Google Patents
Verfahren zur Herstellung eines dünnen Filmes.Info
- Publication number
- DE69013948D1 DE69013948D1 DE69013948T DE69013948T DE69013948D1 DE 69013948 D1 DE69013948 D1 DE 69013948D1 DE 69013948 T DE69013948 T DE 69013948T DE 69013948 T DE69013948 T DE 69013948T DE 69013948 D1 DE69013948 D1 DE 69013948D1
- Authority
- DE
- Germany
- Prior art keywords
- making
- thin film
- thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
- B29C2035/0872—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using ion-radiation, e.g. alpha-rays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
- B29C2035/0877—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using electron radiation, e.g. beta-rays
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture Of Macromolecular Shaped Articles (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1067062A JPH089782B2 (ja) | 1989-03-17 | 1989-03-17 | 薄膜の製造方法 |
JP1156522A JP2679260B2 (ja) | 1989-06-19 | 1989-06-19 | 薄膜の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69013948D1 true DE69013948D1 (de) | 1994-12-15 |
DE69013948T2 DE69013948T2 (de) | 1995-06-14 |
Family
ID=26408264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69013948T Expired - Fee Related DE69013948T2 (de) | 1989-03-17 | 1990-03-16 | Verfahren zur Herstellung eines dünnen Filmes. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5087476A (de) |
EP (1) | EP0387904B1 (de) |
KR (1) | KR920005439B1 (de) |
DE (1) | DE69013948T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5316802A (en) * | 1992-02-20 | 1994-05-31 | Nissin Electric Co., Ltd. | Method of forming copper film on substrate |
US6294479B1 (en) * | 1992-05-21 | 2001-09-25 | Nissin Electric Co., Ltd | Film forming method and apparatus |
DE4227873A1 (de) * | 1992-08-22 | 1994-02-24 | Leybold Ag | Verfahren und Vorrichtung zum kontinuierlichen Beschichten von nichtleitenden Folien im Vakuum |
US6083628A (en) | 1994-11-04 | 2000-07-04 | Sigma Laboratories Of Arizona, Inc. | Hybrid polymer film |
US6010600A (en) * | 1996-02-22 | 2000-01-04 | The Regents Of The University Of California | Maskless deposition technique for the physical vapor deposition of thin film and multilayer coatings with subnanometer precision and accuracy |
US5743966A (en) * | 1996-05-31 | 1998-04-28 | The Boc Group, Inc. | Unwinding of plastic film in the presence of a plasma |
GB2323855B (en) * | 1997-04-01 | 2002-06-05 | Ion Coat Ltd | Method and apparatus for depositing a coating on a conductive substrate |
US6555182B1 (en) * | 1998-07-03 | 2003-04-29 | Sony Corporation | Surface hardened resins for disk substrates, methods of manufacture thereof and production devices for the manufacture thereof |
DE19906008A1 (de) * | 1999-02-15 | 2000-08-17 | Binder Kletten Haftverschlus S | Verfahren und Vorrichtung zur Herstellung von Haftverschlußteilen aus strahlengehärteten Kunststoffen |
JP4516304B2 (ja) * | 2003-11-20 | 2010-08-04 | 株式会社アルバック | 巻取式真空蒸着方法及び巻取式真空蒸着装置 |
KR100777759B1 (ko) | 2005-02-16 | 2007-11-19 | 가부시키가이샤 아루박 | 권취식 진공 막형성장치 |
DE102006028581A1 (de) * | 2006-06-22 | 2007-12-27 | Gottlieb Binder Gmbh & Co. Kg | Verfahren und Vorrichtung zur Oberflächenfunktionalisierung von Haftverschlußteilen |
US7906182B1 (en) | 2008-01-17 | 2011-03-15 | University Of South Florida | Method of thin film electrospray deposition |
US9689068B2 (en) | 2014-05-16 | 2017-06-27 | Nanoedit, Llc | Deposition and patterning using emitted electrons |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1297782B (de) * | 1965-01-07 | 1969-06-19 | Akad Wissenschaften Ddr | Vorrichtung zum Beseitigen von elektrostatischen Ladungen bei Nichtleitern |
EP0041850B2 (de) * | 1980-06-10 | 1989-03-22 | Matsushita Electric Industrial Co., Ltd. | Verfahren zum Vakuum-Überziehen eines bandförmigen Kunststoffsubstrats |
JPS5754314A (ja) * | 1980-09-19 | 1982-03-31 | Matsushita Electric Ind Co Ltd | Shinkunaihimakukeiseisochi |
US4495242A (en) * | 1981-04-02 | 1985-01-22 | Fuji Photo Film Co., Ltd. | Magnetic recording medium |
US4489124A (en) * | 1981-04-06 | 1984-12-18 | Olympus Optical Co | Process for forming thin film, heat treatment process of thin film sheet, and heat treatment apparatus therefor |
JPS5864381A (ja) * | 1981-10-09 | 1983-04-16 | Matsushita Electric Ind Co Ltd | 真空蒸着装置 |
JPS5942635A (ja) * | 1982-08-31 | 1984-03-09 | Matsushita Electric Ind Co Ltd | 磁気記録媒体の製造方法 |
JPS59113176A (ja) * | 1982-12-20 | 1984-06-29 | Ricoh Co Ltd | 真空蒸着方法 |
JPS60184674A (ja) * | 1984-03-01 | 1985-09-20 | Matsushita Electric Ind Co Ltd | 連続薄膜形成用真空装置 |
US4560577A (en) * | 1984-09-14 | 1985-12-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Oxidation protection coatings for polymers |
EP0203582B1 (de) * | 1985-05-31 | 1991-03-27 | Hitachi Maxell Ltd. | Methode und Apparat zur Herstellung von magnetischen Aufzeichnungsträgern |
DE3641718A1 (de) * | 1986-12-06 | 1988-06-16 | Leybold Ag | Verfahren zum herstellen von wickeln aus im vakuum leitfaehig beschichteten isolierstoff-folien |
US4886681A (en) * | 1987-01-20 | 1989-12-12 | International Business Machines Corporation | Metal-polymer adhesion by low energy bombardment |
US4776925A (en) * | 1987-04-30 | 1988-10-11 | The Trustees Of Columbia University In The City Of New York | Method of forming dielectric thin films on silicon by low energy ion beam bombardment |
JPH01165032A (ja) * | 1987-12-21 | 1989-06-29 | Canon Inc | 磁気記録媒体の製造方法 |
-
1990
- 1990-03-02 US US07/487,273 patent/US5087476A/en not_active Expired - Fee Related
- 1990-03-16 DE DE69013948T patent/DE69013948T2/de not_active Expired - Fee Related
- 1990-03-16 EP EP90105033A patent/EP0387904B1/de not_active Expired - Lifetime
- 1990-03-17 KR KR1019900003576A patent/KR920005439B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69013948T2 (de) | 1995-06-14 |
EP0387904A3 (de) | 1991-10-30 |
EP0387904A2 (de) | 1990-09-19 |
EP0387904B1 (de) | 1994-11-09 |
KR920005439B1 (ko) | 1992-07-04 |
US5087476A (en) | 1992-02-11 |
KR900014626A (ko) | 1990-10-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |