DE69033663T2 - Verfahren zur Behandlung eines Aluminium enthaltenden Musters - Google Patents
Verfahren zur Behandlung eines Aluminium enthaltenden MustersInfo
- Publication number
- DE69033663T2 DE69033663T2 DE1990633663 DE69033663T DE69033663T2 DE 69033663 T2 DE69033663 T2 DE 69033663T2 DE 1990633663 DE1990633663 DE 1990633663 DE 69033663 T DE69033663 T DE 69033663T DE 69033663 T2 DE69033663 T2 DE 69033663T2
- Authority
- DE
- Germany
- Prior art keywords
- treating
- containing aluminum
- pattern containing
- pattern
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title 1
- 229910052782 aluminium Inorganic materials 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
- H01L21/02071—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers the processing being a delineation, e.g. RIE, of conductive layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/906—Cleaning of wafer as interim step
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12528—Semiconductor component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1218523A JPH0793293B2 (ja) | 1989-08-28 | 1989-08-28 | 後処理方法 |
JP1284711A JP2585442B2 (ja) | 1989-11-02 | 1989-11-02 | 被処理物の連続処理方法 |
JP11759690A JPH0415919A (ja) | 1990-05-09 | 1990-05-09 | 後処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69033663D1 DE69033663D1 (de) | 2000-12-21 |
DE69033663T2 true DE69033663T2 (de) | 2001-06-21 |
Family
ID=27313413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1990633663 Expired - Fee Related DE69033663T2 (de) | 1989-08-28 | 1990-08-20 | Verfahren zur Behandlung eines Aluminium enthaltenden Musters |
Country Status (4)
Country | Link |
---|---|
US (4) | US5380397A (de) |
EP (2) | EP0416774B1 (de) |
KR (1) | KR0155380B1 (de) |
DE (1) | DE69033663T2 (de) |
Families Citing this family (61)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69033663T2 (de) * | 1989-08-28 | 2001-06-21 | Hitachi Ltd | Verfahren zur Behandlung eines Aluminium enthaltenden Musters |
WO1992000601A1 (en) * | 1990-06-27 | 1992-01-09 | Fujitsu Limited | Method of manufacturing semiconductor integrated circuit and equipment for the manufacture |
JP2644912B2 (ja) | 1990-08-29 | 1997-08-25 | 株式会社日立製作所 | 真空処理装置及びその運転方法 |
USRE39823E1 (en) | 1990-08-29 | 2007-09-11 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
USRE39756E1 (en) * | 1990-08-29 | 2007-08-07 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
US7089680B1 (en) | 1990-08-29 | 2006-08-15 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
JP3412173B2 (ja) * | 1991-10-21 | 2003-06-03 | セイコーエプソン株式会社 | 半導体装置の製造方法 |
JP2674488B2 (ja) * | 1993-12-01 | 1997-11-12 | 日本電気株式会社 | ドライエッチング室のクリーニング方法 |
KR100336916B1 (ko) * | 1994-02-03 | 2002-12-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 반도체기판의스트립핑,패시베이션및부식반응억제방법 |
US5545289A (en) * | 1994-02-03 | 1996-08-13 | Applied Materials, Inc. | Passivating, stripping and corrosion inhibition of semiconductor substrates |
US5599743A (en) * | 1994-04-07 | 1997-02-04 | Matsushita Electronics Corporation | Method of manufacturing a semiconductor device |
US5744049A (en) * | 1994-07-18 | 1998-04-28 | Applied Materials, Inc. | Plasma reactor with enhanced plasma uniformity by gas addition, and method of using same |
JP3129144B2 (ja) * | 1995-04-21 | 2001-01-29 | 日本電気株式会社 | アッシング方法 |
US6060397A (en) * | 1995-07-14 | 2000-05-09 | Applied Materials, Inc. | Gas chemistry for improved in-situ cleaning of residue for a CVD apparatus |
US5785875A (en) * | 1996-02-13 | 1998-07-28 | Micron Technology, Inc. | Photoresist removal process using heated solvent vapor |
US5700740A (en) * | 1996-03-25 | 1997-12-23 | Taiwan Semiconductor Manufacturing Company Ltd | Prevention of corrosion of aluminum interconnects by removing corrosion-inducing species |
US6170428B1 (en) * | 1996-07-15 | 2001-01-09 | Applied Materials, Inc. | Symmetric tunable inductively coupled HDP-CVD reactor |
US5776832A (en) * | 1996-07-17 | 1998-07-07 | Taiwan Semiconductor Manufacturing Company Ltd. | Anti-corrosion etch process for etching metal interconnections extending over and within contact openings |
US6310300B1 (en) * | 1996-11-08 | 2001-10-30 | International Business Machines Corporation | Fluorine-free barrier layer between conductor and insulator for degradation prevention |
US6303045B1 (en) * | 1997-03-20 | 2001-10-16 | Lam Research Corporation | Methods and apparatus for etching a nitride layer in a variable-gap plasma processing chamber |
US6168672B1 (en) | 1998-03-06 | 2001-01-02 | Applied Materials Inc. | Method and apparatus for automatically performing cleaning processes in a semiconductor wafer processing system |
US6660647B1 (en) * | 1998-03-12 | 2003-12-09 | Hitachi, Ltd. | Method for processing surface of sample |
US6455232B1 (en) * | 1998-04-14 | 2002-09-24 | Applied Materials, Inc. | Method of reducing stop layer loss in a photoresist stripping process using a fluorine scavenger |
US6254717B1 (en) * | 1998-04-23 | 2001-07-03 | Sandia Corporation | Method and apparatus for monitoring plasma processing operations |
US6221752B1 (en) * | 1998-08-20 | 2001-04-24 | United Microelectronics Corp. | Method of mending erosion of bonding pad |
US6410417B1 (en) * | 1998-11-05 | 2002-06-25 | Promos Technologies, Inc. | Method of forming tungsten interconnect and vias without tungsten loss during wet stripping of photoresist polymer |
US6368517B1 (en) * | 1999-02-17 | 2002-04-09 | Applied Materials, Inc. | Method for preventing corrosion of a dielectric material |
US6627588B1 (en) | 1999-03-11 | 2003-09-30 | Georgia Tech Research Corporation | Method of stripping photoresist using alcohols |
US6238582B1 (en) * | 1999-03-30 | 2001-05-29 | Veeco Instruments, Inc. | Reactive ion beam etching method and a thin film head fabricated using the method |
US20030015496A1 (en) * | 1999-07-22 | 2003-01-23 | Sujit Sharan | Plasma etching process |
US6559076B1 (en) | 1999-08-19 | 2003-05-06 | Micron Technology, Inc. | Method of removing free halogen from a halogenated polymer insulating layer of a semiconductor device |
US6228563B1 (en) * | 1999-09-17 | 2001-05-08 | Gasonics International Corporation | Method and apparatus for removing post-etch residues and other adherent matrices |
JP2001110663A (ja) * | 1999-10-08 | 2001-04-20 | Hitachi Ltd | 試料の処理方法および処理装置並びに磁気ヘッドの製作方法 |
US6682659B1 (en) | 1999-11-08 | 2004-01-27 | Taiwan Semiconductor Manufacturing Company | Method for forming corrosion inhibited conductor layer |
US20020076917A1 (en) * | 1999-12-20 | 2002-06-20 | Edward P Barth | Dual damascene interconnect structure using low stress flourosilicate insulator with copper conductors |
US6852636B1 (en) * | 1999-12-27 | 2005-02-08 | Lam Research Corporation | Insitu post etch process to remove remaining photoresist and residual sidewall passivation |
US6440864B1 (en) | 2000-06-30 | 2002-08-27 | Applied Materials Inc. | Substrate cleaning process |
KR100373853B1 (ko) * | 2000-08-11 | 2003-02-26 | 삼성전자주식회사 | 반도체소자의 선택적 에피택시얼 성장 방법 |
US6692903B2 (en) | 2000-12-13 | 2004-02-17 | Applied Materials, Inc | Substrate cleaning apparatus and method |
US6564811B2 (en) * | 2001-03-26 | 2003-05-20 | Intel Corporation | Method of reducing residue deposition onto ash chamber base surfaces |
US7204669B2 (en) * | 2002-07-17 | 2007-04-17 | Applied Materials, Inc. | Semiconductor substrate damage protection system |
CN1682353A (zh) * | 2002-09-18 | 2005-10-12 | 马特森技术公司 | 去除材料的系统和方法 |
US6920891B2 (en) * | 2002-10-05 | 2005-07-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Exhaust adaptor and method for chamber de-gassing |
TWI232991B (en) * | 2002-11-15 | 2005-05-21 | Nec Lcd Technologies Ltd | Method for manufacturing an LCD device |
US7078344B2 (en) * | 2003-03-14 | 2006-07-18 | Lam Research Corporation | Stress free etch processing in combination with a dynamic liquid meniscus |
US7217649B2 (en) * | 2003-03-14 | 2007-05-15 | Lam Research Corporation | System and method for stress free conductor removal |
US7009281B2 (en) * | 2003-03-14 | 2006-03-07 | Lam Corporation | Small volume process chamber with hot inner surfaces |
US7232766B2 (en) * | 2003-03-14 | 2007-06-19 | Lam Research Corporation | System and method for surface reduction, passivation, corrosion prevention and activation of copper surface |
JP4111274B2 (ja) | 2003-07-24 | 2008-07-02 | キヤノンアネルバ株式会社 | 磁性材料のドライエッチング方法 |
TWI281473B (en) * | 2003-12-19 | 2007-05-21 | Ind Tech Res Inst | Biomarkers for liver diseases and method for using same |
US20060063388A1 (en) * | 2004-09-23 | 2006-03-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for using a water vapor treatment to reduce surface charge after metal etching |
KR100688777B1 (ko) * | 2004-12-27 | 2007-03-02 | 동부일렉트로닉스 주식회사 | 반도체 소자의 제조 방법 |
KR100688778B1 (ko) * | 2004-12-27 | 2007-03-02 | 동부일렉트로닉스 주식회사 | 반도체 소자의 제조 방법 |
KR100608435B1 (ko) * | 2004-12-30 | 2006-08-02 | 동부일렉트로닉스 주식회사 | 반도체 소자의 애싱 방법 |
US7655571B2 (en) * | 2006-10-26 | 2010-02-02 | Applied Materials, Inc. | Integrated method and apparatus for efficient removal of halogen residues from etched substrates |
US7846845B2 (en) * | 2006-10-26 | 2010-12-07 | Applied Materials, Inc. | Integrated method for removal of halogen residues from etched substrates in a processing system |
US7678715B2 (en) * | 2007-12-21 | 2010-03-16 | Applied Materials, Inc. | Low wet etch rate silicon nitride film |
US20110079242A1 (en) * | 2009-10-07 | 2011-04-07 | Werner Reiss | Plasma cleaning of wire strands |
KR20130043063A (ko) | 2011-10-19 | 2013-04-29 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 및 반도체 장치의 제작 방법 |
US9018108B2 (en) | 2013-01-25 | 2015-04-28 | Applied Materials, Inc. | Low shrinkage dielectric films |
JP6349796B2 (ja) * | 2014-03-11 | 2018-07-04 | 東京エレクトロン株式会社 | プラズマ処理装置、薄膜トランジスターの製造方法及び記憶媒体 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4138306A (en) * | 1976-08-31 | 1979-02-06 | Tokyo Shibaura Electric Co., Ltd. | Apparatus for the treatment of semiconductors |
JPS5841766B2 (ja) * | 1978-12-28 | 1983-09-14 | 富士通株式会社 | 半導体装置の製造方法 |
US4325984B2 (en) * | 1980-07-28 | 1998-03-03 | Fairchild Camera & Inst | Plasma passivation technique for the prevention of post-etch corrosion of plasma-etched aluminum films |
US4351696A (en) * | 1981-10-28 | 1982-09-28 | Fairchild Camera & Instrument Corp. | Corrosion inhibition of aluminum or aluminum alloy film utilizing bromine-containing plasma |
JPS6077429A (ja) * | 1983-10-04 | 1985-05-02 | Asahi Glass Co Ltd | ドライエツチング方法 |
KR910003169B1 (ko) * | 1985-11-12 | 1991-05-20 | 가부시끼가이샤 한도다이 에네르기 겐뀨소 | 반도체 장치 제조 방법 및 장치 |
JPS62281331A (ja) * | 1986-05-29 | 1987-12-07 | Fujitsu Ltd | エツチング方法 |
JPS6362233A (ja) * | 1986-09-03 | 1988-03-18 | Mitsubishi Electric Corp | 反応性イオンエツチング装置 |
DE3855636T2 (de) * | 1987-08-28 | 1997-03-27 | Toshiba Kawasaki Kk | Plasma-Entschichtungsverfahren für organische und anorganische Schichten |
US4961820A (en) * | 1988-06-09 | 1990-10-09 | Fujitsu Limited | Ashing method for removing an organic film on a substance of a semiconductor device under fabrication |
JP2890432B2 (ja) * | 1989-01-10 | 1999-05-17 | 富士通株式会社 | 有機物の灰化方法 |
JP2528962B2 (ja) * | 1989-02-27 | 1996-08-28 | 株式会社日立製作所 | 試料処理方法及び装置 |
US4985113A (en) * | 1989-03-10 | 1991-01-15 | Hitachi, Ltd. | Sample treating method and apparatus |
DE69033663T2 (de) * | 1989-08-28 | 2001-06-21 | Hitachi Ltd | Verfahren zur Behandlung eines Aluminium enthaltenden Musters |
US5221424A (en) * | 1991-11-21 | 1993-06-22 | Applied Materials, Inc. | Method for removal of photoresist over metal which also removes or inactivates corosion-forming materials remaining from previous metal etch |
US5545289A (en) * | 1994-02-03 | 1996-08-13 | Applied Materials, Inc. | Passivating, stripping and corrosion inhibition of semiconductor substrates |
-
1990
- 1990-08-20 DE DE1990633663 patent/DE69033663T2/de not_active Expired - Fee Related
- 1990-08-20 EP EP19900309106 patent/EP0416774B1/de not_active Expired - Lifetime
- 1990-08-20 EP EP19970107985 patent/EP0809283A3/de not_active Withdrawn
- 1990-08-27 KR KR1019900013207A patent/KR0155380B1/ko not_active IP Right Cessation
-
1992
- 1992-10-27 US US07/966,849 patent/US5380397A/en not_active Expired - Lifetime
-
1994
- 1994-09-29 US US08/315,260 patent/US5556714A/en not_active Expired - Lifetime
-
1996
- 1996-06-12 US US08/662,142 patent/US5770100A/en not_active Expired - Lifetime
-
1997
- 1997-12-08 US US08/986,643 patent/US6329298B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5380397A (en) | 1995-01-10 |
EP0416774B1 (de) | 2000-11-15 |
DE69033663D1 (de) | 2000-12-21 |
EP0416774A1 (de) | 1991-03-13 |
EP0809283A2 (de) | 1997-11-26 |
KR0155380B1 (ko) | 1998-12-01 |
KR910005381A (ko) | 1991-03-30 |
US6329298B1 (en) | 2001-12-11 |
US5770100A (en) | 1998-06-23 |
EP0809283A3 (de) | 1998-02-25 |
US5556714A (en) | 1996-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |