DE69024340T2 - Halbleiterkeramikkondensator von laminiertem und zwischenkornisolationstyp und verfahren zu seiner herstellung - Google Patents

Halbleiterkeramikkondensator von laminiertem und zwischenkornisolationstyp und verfahren zu seiner herstellung

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Publication number
DE69024340T2
DE69024340T2 DE69024340T DE69024340T DE69024340T2 DE 69024340 T2 DE69024340 T2 DE 69024340T2 DE 69024340 T DE69024340 T DE 69024340T DE 69024340 T DE69024340 T DE 69024340T DE 69024340 T2 DE69024340 T2 DE 69024340T2
Authority
DE
Germany
Prior art keywords
laminated
production
ceramic capacitor
semiconductor ceramic
insulation type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024340T
Other languages
English (en)
Other versions
DE69024340D1 (de
Inventor
Iwao Ueno
Yasuo Wakahata
Kimio Kobayashi
Kaori Okamoto
Akihiro Takami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6240289A external-priority patent/JP2697095B2/ja
Priority claimed from JP1062403A external-priority patent/JP2646734B2/ja
Priority claimed from JP1062404A external-priority patent/JP2743448B2/ja
Priority claimed from JP1086243A external-priority patent/JP2707706B2/ja
Priority claimed from JP1147901A external-priority patent/JP2705221B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69024340D1 publication Critical patent/DE69024340D1/de
Application granted granted Critical
Publication of DE69024340T2 publication Critical patent/DE69024340T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
    • C04B35/47—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates based on strontium titanates
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    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G23/00—Compounds of titanium
    • C01G23/003—Titanates
    • C01G23/006—Alkaline earth titanates
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    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G45/00—Compounds of manganese
    • C01G45/006—Compounds containing, besides manganese, two or more other elements, with the exception of oxygen or hydrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/018—Dielectrics
    • H01G4/06—Solid dielectrics
    • H01G4/08—Inorganic dielectrics
    • H01G4/12—Ceramic dielectrics
    • H01G4/1272—Semiconductive ceramic capacitors
    • H01G4/1281—Semiconductive ceramic capacitors with grain boundary layer
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    • C01P2002/34—Three-dimensional structures perovskite-type (ABO3)
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
    • Y10S257/92—Conductor layers on different levels connected in parallel, e.g. to reduce resistance
DE69024340T 1989-03-15 1990-03-14 Halbleiterkeramikkondensator von laminiertem und zwischenkornisolationstyp und verfahren zu seiner herstellung Expired - Fee Related DE69024340T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP6240289A JP2697095B2 (ja) 1989-03-15 1989-03-15 セラミックコンデンサ及びその製造方法
JP1062403A JP2646734B2 (ja) 1989-03-15 1989-03-15 セラミックコンデンサ及びその製造方法
JP1062404A JP2743448B2 (ja) 1989-03-15 1989-03-15 セラミックコンデンサ及びその製造方法
JP1086243A JP2707706B2 (ja) 1989-04-05 1989-04-05 粒界絶縁型半導体セラミックコンデンサ及びその製造方法
JP1147901A JP2705221B2 (ja) 1989-06-09 1989-06-09 セラミックコンデンサ及びその製造方法
PCT/JP1990/000334 WO1990010941A1 (en) 1989-03-15 1990-03-14 Laminated and grain boundary insulated type semiconductor ceramic capacitor and method of producing the same

Publications (2)

Publication Number Publication Date
DE69024340D1 DE69024340D1 (de) 1996-02-01
DE69024340T2 true DE69024340T2 (de) 1996-05-09

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EP (1) EP0437613B1 (de)
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Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2757587B2 (ja) * 1990-06-26 1998-05-25 松下電器産業株式会社 粒界絶縁型半導体セラミックコンデンサ及びその製造方法
US5624707A (en) * 1991-12-13 1997-04-29 Symetrix Corporation Method of forming ABO3 films with excess B-site modifiers
US5565838A (en) * 1992-05-28 1996-10-15 Avx Corporation Varistors with sputtered terminations
EP0572151A3 (de) * 1992-05-28 1995-01-18 Avx Corp Varistoren mit gesputterten Anschlüssen und Methode zur Aufbringung von gesputterten Anschlüssen auf Varistoren.
JP2870317B2 (ja) * 1992-09-03 1999-03-17 松下電器産業株式会社 セラミック磁器素子の製造方法
US5378667A (en) * 1993-12-10 1995-01-03 Korea Institute Of Science And Technology Intercrystalline semiconductive ceramic capacitor
KR100252744B1 (ko) * 1994-07-05 2000-05-01 모리 가즈히로 과잉의 A사이트와 B사이트 개질제(modifier)를 가진 ABO₃의 박막 및 그 박막을 가진 집적회로의 제조방법
KR100255906B1 (ko) * 1994-10-19 2000-05-01 모리시타 요이찌 전자부품과 그 제조방법
JPH08217536A (ja) * 1995-02-14 1996-08-27 Tdk Corp 正の抵抗温度係数を有する半導体磁器組成物及びその製造方法
EP0734031B1 (de) * 1995-03-24 2004-06-09 TDK Corporation Vielschichtvaristor
US5790368A (en) * 1995-06-27 1998-08-04 Murata Manufacturing Co., Ltd. Capacitor and manufacturing method thereof
TW321776B (de) * 1995-07-21 1997-12-01 Tdk Electronics Co Ltd
KR100215861B1 (ko) * 1996-03-13 1999-08-16 구본준 유전체 박막 제조방법 및 이를 이용한 반도체 장치제조방법
JP3506056B2 (ja) * 1999-08-09 2004-03-15 株式会社村田製作所 正の抵抗温度特性を有する積層型半導体セラミック素子、および正の抵抗温度特性を有する積層型半導体セラミック素子の製造方法
US6444336B1 (en) 2000-12-21 2002-09-03 The Regents Of The University Of California Thin film dielectric composite materials
WO2008004389A1 (fr) * 2006-07-03 2008-01-10 Murata Manufacturing Co., Ltd. Condensateur céramique semi-conducteur superposé doté d'une fonction de varistance et procédé permettant de le fabriquer
JP5397341B2 (ja) 2010-07-23 2014-01-22 株式会社村田製作所 バリスタ機能付き積層型半導体セラミックコンデンサ
WO2012105436A1 (ja) 2011-02-03 2012-08-09 株式会社 村田製作所 半導体セラミックとその製造方法、及びバリスタ機能付き積層型半導体セラミックコンデンサとその製造方法
JP2016076591A (ja) * 2014-10-06 2016-05-12 セイコーエプソン株式会社 焦電体、焦電体の製造方法、焦電素子、焦電素子の製造方法、熱電変換素子、熱電変換素子の製造方法、熱型光検出器、熱型光検出器の製造方法および電子機器
KR102579634B1 (ko) 2017-11-10 2023-09-18 삼성전기주식회사 적층형 커패시터

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3149399A (en) * 1962-09-25 1964-09-22 Sprague Electric Co Silicon capacitor
DE1303160C2 (de) * 1963-12-13 1974-06-12 Philips Nv Verfahren zur herstellung eines durch fremdionen halbleitend gemachten elektrischen sperrschichtkondensators
DE1614605B2 (de) * 1967-09-20 1974-06-27 Siemens Ag, 1000 Berlin Und 8000 Muenchen Kondensatordielektrikum mit inneren Sperrschichten und geringerer Temperaturabhängigkeit
US3673119A (en) * 1968-10-11 1972-06-27 Tdk Electronics Co Ltd Semiconducting ceramic compositions
JPS53101659A (en) * 1977-02-17 1978-09-05 Murata Manufacturing Co Strontium titanate base capacitor employing semiconductor ceramic with insulative grain boundary
JPS5453248A (en) * 1977-10-03 1979-04-26 Tdk Electronics Co Ltd Laminated type semiconductor ceramic condenser and method of making same
JPS5453250A (en) * 1977-10-05 1979-04-26 Tdk Electronics Co Ltd Laminated type semiconductor ceramic condenser and method of making same
US4403236A (en) * 1979-10-09 1983-09-06 Murata Manufacturing Co., Ltd. Boundary layer type semiconducting ceramic capacitors with high capacitance
JPS5727001A (en) * 1980-07-25 1982-02-13 Tdk Electronics Co Ltd Voltage nonlinear resistance element
JPS5735303A (en) * 1980-07-30 1982-02-25 Taiyo Yuden Kk Voltage vs current characteristic nonlinear semiconductor porcelain composition and method of producing same
US4419310A (en) * 1981-05-06 1983-12-06 Sprague Electric Company SrTiO3 barrier layer capacitor
IT8183444A0 (it) * 1981-07-30 1981-07-30 Savio Spa Dispositivo paraffinatore per ritorcitoi a doppia torsione.
DE3235886A1 (de) * 1982-09-28 1984-03-29 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung einer sperrschicht-keramik
JPS59215701A (ja) * 1983-05-24 1984-12-05 太陽誘電株式会社 複合機能素子の製造方法
DE3563610D1 (de) * 1984-03-30 1988-08-11 Matsushita Electric Ind Co Ltd Voltage-dependent non-linear resistance ceramic composition
DE3435806A1 (de) * 1984-09-28 1986-04-10 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung von korngrenzsperrschicht-vielschicht-kondensatoren aus strontiumtitanat
JPS61147406A (ja) * 1984-12-18 1986-07-05 太陽誘電株式会社 誘電体磁器組成物
JPS62111412A (ja) * 1985-11-09 1987-05-22 株式会社村田製作所 粒界絶縁型半導体磁器コンデンサ用組成物
US4889837A (en) * 1986-09-02 1989-12-26 Tdk Corporation Semiconductive ceramic composition
JPH07114174B2 (ja) * 1987-03-06 1995-12-06 株式会社村田製作所 積層型半導体磁器電子部品の製造方法
JPS63225405A (ja) * 1987-03-13 1988-09-20 株式会社村田製作所 粒界絶縁形半導体磁器組成物

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DE69024340D1 (de) 1996-02-01
KR930012272B1 (ko) 1993-12-28
US5166759A (en) 1992-11-24
EP0437613A1 (de) 1991-07-24
EP0437613B1 (de) 1995-12-20
WO1990010941A1 (en) 1990-09-20
KR920700461A (ko) 1992-02-19
EP0437613A4 (en) 1991-11-27

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