DE68928661T2 - Positiv arbeitende Photolack-Zusammensetzung - Google Patents

Positiv arbeitende Photolack-Zusammensetzung

Info

Publication number
DE68928661T2
DE68928661T2 DE1989628661 DE68928661T DE68928661T2 DE 68928661 T2 DE68928661 T2 DE 68928661T2 DE 1989628661 DE1989628661 DE 1989628661 DE 68928661 T DE68928661 T DE 68928661T DE 68928661 T2 DE68928661 T2 DE 68928661T2
Authority
DE
Germany
Prior art keywords
photoresist composition
positive working
working photoresist
positive
composition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1989628661
Other languages
English (en)
Other versions
DE68928661D1 (de
Inventor
Kazuya C O Fuji Photo Uenishi
Shinji C O Fuji Phot Sakaguchi
Tadayoshi C O Fuji Phot Kokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of DE68928661D1 publication Critical patent/DE68928661D1/de
Application granted granted Critical
Publication of DE68928661T2 publication Critical patent/DE68928661T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
DE1989628661 1988-09-07 1989-09-06 Positiv arbeitende Photolack-Zusammensetzung Expired - Fee Related DE68928661T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22374088A JP2574692B2 (ja) 1988-09-07 1988-09-07 ポジ型フオトレジスト組成物

Publications (2)

Publication Number Publication Date
DE68928661D1 DE68928661D1 (de) 1998-06-10
DE68928661T2 true DE68928661T2 (de) 1998-11-26

Family

ID=16802949

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1989628661 Expired - Fee Related DE68928661T2 (de) 1988-09-07 1989-09-06 Positiv arbeitende Photolack-Zusammensetzung

Country Status (3)

Country Link
EP (1) EP0358194B1 (de)
JP (1) JP2574692B2 (de)
DE (1) DE68928661T2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2919142B2 (ja) * 1990-12-27 1999-07-12 株式会社東芝 感光性組成物およびそれを用いたパターン形成方法
JP2655384B2 (ja) * 1991-11-08 1997-09-17 富士写真フイルム株式会社 ポジ型レジスト組成物
US5221592A (en) * 1992-03-06 1993-06-22 Hoechst Celanese Corporation Diazo ester of a benzolactone ring compound and positive photoresist composition and element utilizing the diazo ester

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1304424A (fr) * 1961-10-24 1962-09-21 Ciba Geigy Procédé d'obtention de colorants au soufre
JPS5338621B1 (de) * 1971-03-08 1978-10-17
JPS5657035A (en) * 1979-10-15 1981-05-19 Fuji Yakuhin Kogyo Kk Positive type photosensitive composition
JPS61245154A (ja) * 1985-04-23 1986-10-31 Dainippon Ink & Chem Inc 感光性組成物

Also Published As

Publication number Publication date
JPH0272363A (ja) 1990-03-12
EP0358194A3 (de) 1990-10-17
EP0358194A2 (de) 1990-03-14
DE68928661D1 (de) 1998-06-10
JP2574692B2 (ja) 1997-01-22
EP0358194B1 (de) 1998-05-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee