DE68927134D1 - Mikrowellen-Plasma-Bearbeitungsgerät - Google Patents

Mikrowellen-Plasma-Bearbeitungsgerät

Info

Publication number
DE68927134D1
DE68927134D1 DE68927134T DE68927134T DE68927134D1 DE 68927134 D1 DE68927134 D1 DE 68927134D1 DE 68927134 T DE68927134 T DE 68927134T DE 68927134 T DE68927134 T DE 68927134T DE 68927134 D1 DE68927134 D1 DE 68927134D1
Authority
DE
Germany
Prior art keywords
processing device
plasma processing
microwave plasma
microwave
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68927134T
Other languages
English (en)
Other versions
DE68927134T2 (de
Inventor
Soichiro Kawakami
Masahiro Kanai
Takayoshi Arai
Tsutomu Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE68927134D1 publication Critical patent/DE68927134D1/de
Application granted granted Critical
Publication of DE68927134T2 publication Critical patent/DE68927134T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE68927134T 1988-05-25 1989-05-23 Mikrowellen-Plasma-Bearbeitungsgerät Expired - Fee Related DE68927134T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63125794A JPH01297141A (ja) 1988-05-25 1988-05-25 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
DE68927134D1 true DE68927134D1 (de) 1996-10-17
DE68927134T2 DE68927134T2 (de) 1997-02-20

Family

ID=14919042

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68927134T Expired - Fee Related DE68927134T2 (de) 1988-05-25 1989-05-23 Mikrowellen-Plasma-Bearbeitungsgerät

Country Status (5)

Country Link
US (1) US5038713A (de)
EP (1) EP0343602B1 (de)
JP (1) JPH01297141A (de)
CN (1) CN1029992C (de)
DE (1) DE68927134T2 (de)

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DE4305748A1 (de) * 1993-02-25 1994-09-01 Leybold Ag Vorrichtung zum Beschichten und/oder Ätzen von Substraten in einer Vakuumkammer
US5387288A (en) * 1993-05-14 1995-02-07 Modular Process Technology Corp. Apparatus for depositing diamond and refractory materials comprising rotating antenna
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Also Published As

Publication number Publication date
EP0343602A3 (de) 1991-01-09
EP0343602A2 (de) 1989-11-29
JPH01297141A (ja) 1989-11-30
CN1029992C (zh) 1995-10-11
CN1038673A (zh) 1990-01-10
EP0343602B1 (de) 1996-09-11
US5038713A (en) 1991-08-13
DE68927134T2 (de) 1997-02-20

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