DE69318480D1 - Plasmabearbeitungsgerät - Google Patents
PlasmabearbeitungsgerätInfo
- Publication number
- DE69318480D1 DE69318480D1 DE69318480T DE69318480T DE69318480D1 DE 69318480 D1 DE69318480 D1 DE 69318480D1 DE 69318480 T DE69318480 T DE 69318480T DE 69318480 T DE69318480 T DE 69318480T DE 69318480 D1 DE69318480 D1 DE 69318480D1
- Authority
- DE
- Germany
- Prior art keywords
- processing device
- plasma processing
- plasma
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/32238—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32678—Electron cyclotron resonance
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4187369A JP2814416B2 (ja) | 1992-06-23 | 1992-06-23 | プラズマ処理装置 |
JP5085183A JP2779997B2 (ja) | 1993-03-22 | 1993-03-22 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69318480D1 true DE69318480D1 (de) | 1998-06-18 |
DE69318480T2 DE69318480T2 (de) | 1998-09-17 |
Family
ID=26426206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69318480T Expired - Lifetime DE69318480T2 (de) | 1992-06-23 | 1993-06-22 | Plasmabearbeitungsgerät |
Country Status (3)
Country | Link |
---|---|
US (1) | US5389154A (de) |
EP (1) | EP0578047B1 (de) |
DE (1) | DE69318480T2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4132558C1 (de) * | 1991-09-30 | 1992-12-03 | Secon Halbleiterproduktionsgeraete Ges.M.B.H., Wien, At | |
US5487875A (en) * | 1991-11-05 | 1996-01-30 | Canon Kabushiki Kaisha | Microwave introducing device provided with an endless circular waveguide and plasma treating apparatus provided with said device |
JPH08102279A (ja) * | 1994-09-30 | 1996-04-16 | Hitachi Ltd | マイクロ波プラズマ生成装置 |
TW285746B (de) * | 1994-10-26 | 1996-09-11 | Matsushita Electric Ind Co Ltd | |
US5793013A (en) * | 1995-06-07 | 1998-08-11 | Physical Sciences, Inc. | Microwave-driven plasma spraying apparatus and method for spraying |
TW283250B (en) * | 1995-07-10 | 1996-08-11 | Watkins Johnson Co | Plasma enhanced chemical processing reactor and method |
US6132550A (en) * | 1995-08-11 | 2000-10-17 | Sumitomo Electric Industries, Ltd. | Apparatuses for desposition or etching |
DE19532435C2 (de) * | 1995-09-02 | 2001-07-19 | Ver Foerderung Inst Kunststoff | Vorrichtung und Verfahren zum Erzeugen eines Plasmas |
US6161498A (en) * | 1995-09-14 | 2000-12-19 | Tokyo Electron Limited | Plasma processing device and a method of plasma process |
WO1997020620A1 (en) * | 1995-12-07 | 1997-06-12 | The Regents Of The University Of California | Improvements in method and apparatus for isotope enhancement in a plasma apparatus |
US5824607A (en) * | 1997-02-06 | 1998-10-20 | Applied Materials, Inc. | Plasma confinement for an inductively coupled plasma reactor |
US6286451B1 (en) * | 1997-05-29 | 2001-09-11 | Applied Materials, Inc. | Dome: shape and temperature controlled surfaces |
JPH10335314A (ja) * | 1997-06-05 | 1998-12-18 | Mitsubishi Electric Corp | プラズマ処理装置及び基板処理方法 |
US6080270A (en) * | 1997-07-14 | 2000-06-27 | Lam Research Corporation | Compact microwave downstream plasma system |
US6294466B1 (en) | 1998-05-01 | 2001-09-25 | Applied Materials, Inc. | HDP-CVD apparatus and process for depositing titanium films for semiconductor devices |
DE10138693A1 (de) * | 2001-08-07 | 2003-07-10 | Schott Glas | Vorrichtung zum Beschichten von Gegenständen |
JP4173679B2 (ja) * | 2002-04-09 | 2008-10-29 | エム・イー・エス・アフティ株式会社 | Ecrプラズマ源およびecrプラズマ装置 |
US20060137613A1 (en) * | 2004-01-27 | 2006-06-29 | Shigeru Kasai | Plasma generating apparatus, plasma generating method and remote plasma processing apparatus |
US20050000446A1 (en) * | 2003-07-04 | 2005-01-06 | Yukihiko Nakata | Plasma processing apparatus and plasma processing method |
US6965287B2 (en) * | 2004-03-31 | 2005-11-15 | Tokyo Electron Limited | Low reflection microwave window |
US7806077B2 (en) * | 2004-07-30 | 2010-10-05 | Amarante Technologies, Inc. | Plasma nozzle array for providing uniform scalable microwave plasma generation |
WO2008013112A1 (fr) * | 2006-07-28 | 2008-01-31 | Tokyo Electron Limited | Source de plasma à micro-ondes et appareil de traitement plasma |
US20100074808A1 (en) * | 2008-09-23 | 2010-03-25 | Sang Hun Lee | Plasma generating system |
KR101796656B1 (ko) * | 2010-04-30 | 2017-11-13 | 어플라이드 머티어리얼스, 인코포레이티드 | 수직 인라인 화학기상증착 시스템 |
US20130130513A1 (en) * | 2010-07-21 | 2013-05-23 | Tokyo Electron Limited | Interlayer insulating layer forming method and semiconductor device |
TW201234452A (en) * | 2010-11-17 | 2012-08-16 | Tokyo Electron Ltd | Apparatus for plasma treatment and method for plasma treatment |
JP5563522B2 (ja) * | 2011-05-23 | 2014-07-30 | 東京エレクトロン株式会社 | プラズマ処理装置 |
RU2539872C1 (ru) * | 2013-07-05 | 2015-01-27 | Федеральное государственное бюджетное учреждение науки Институт сверхвысокочастотной полупроводниковой электроники Российской академии наук (ИСВЧПЭ РАН) | Устройство свч плазменной обработки |
JP6178140B2 (ja) * | 2013-07-10 | 2017-08-09 | 東京エレクトロン株式会社 | マイクロ波プラズマ処理装置及びマイクロ波供給方法 |
DE102013215252A1 (de) * | 2013-08-02 | 2015-02-05 | Eeplasma Gmbh | Vorrichtung und Verfahren zur Behandlung von Prozessgasen in einem Plasma angeregt durch elektromagnetische Wellen hoher Frequenz |
DE102013110883B3 (de) * | 2013-10-01 | 2015-01-15 | TRUMPF Hüttinger GmbH + Co. KG | Vorrichtung und Verfahren zur Überwachung einer Entladung in einem Plasmaprozess |
EP2905801B1 (de) | 2014-02-07 | 2019-05-22 | TRUMPF Huettinger Sp. Z o. o. | Verfahren zur Überwachung der Entladung in einem Plasmaprozess und Überwachungsvorrichtung zur Überwachung der Entladung in einem Plasma |
US10340124B2 (en) | 2015-10-29 | 2019-07-02 | Applied Materials, Inc. | Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide |
JP6471211B2 (ja) | 2017-06-02 | 2019-02-13 | 株式会社エスイー | 水素化マグネシウム等の製造方法、水素化マグネシウムを用いた発電方法及び水素化マグネシウム等の製造装置 |
CN109681399A (zh) * | 2018-12-12 | 2019-04-26 | 上海航天控制技术研究所 | 一种小直径高效微波ecr中和器 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5933990B2 (ja) * | 1977-12-28 | 1984-08-20 | 富士通株式会社 | 発光ダイオ−ドの製造方法 |
JPS6243335A (ja) * | 1985-08-21 | 1987-02-25 | Arita Seisakusho:Kk | 自動車のドアが開く事を表示する装置 |
JPS6398330A (ja) * | 1986-10-16 | 1988-04-28 | 工業技術院長 | アマノリ類糸状体培養基 |
US5146138A (en) * | 1988-04-05 | 1992-09-08 | Mitsubishi Denki Kabushiki Kaisha | Plasma processor |
US5125358A (en) * | 1988-07-26 | 1992-06-30 | Matsushita Electric Industrial Co., Ltd. | Microwave plasma film deposition system |
JPH02141494A (ja) * | 1988-07-30 | 1990-05-30 | Kobe Steel Ltd | ダイヤモンド気相合成装置 |
US4943345A (en) * | 1989-03-23 | 1990-07-24 | Board Of Trustees Operating Michigan State University | Plasma reactor apparatus and method for treating a substrate |
JPH03193880A (ja) * | 1989-08-03 | 1991-08-23 | Mikakutou Seimitsu Kogaku Kenkyusho:Kk | 高圧力下でのマイクロ波プラズマcvdによる高速成膜方法及びその装置 |
JPH03122273A (ja) * | 1989-10-06 | 1991-05-24 | Hitachi Ltd | マイクロ波を用いた成膜装置 |
US5234565A (en) * | 1990-09-20 | 1993-08-10 | Matsushita Electric Industrial Co., Ltd. | Microwave plasma source |
-
1993
- 1993-06-22 EP EP93109961A patent/EP0578047B1/de not_active Expired - Lifetime
- 1993-06-22 DE DE69318480T patent/DE69318480T2/de not_active Expired - Lifetime
- 1993-06-24 US US08/081,934 patent/US5389154A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0578047B1 (de) | 1998-05-13 |
US5389154A (en) | 1995-02-14 |
EP0578047A1 (de) | 1994-01-12 |
DE69318480T2 (de) | 1998-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |