JP5240905B2 - 磁界印加シリコン結晶育成方法および装置 - Google Patents
磁界印加シリコン結晶育成方法および装置 Download PDFInfo
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- JP5240905B2 JP5240905B2 JP2008099262A JP2008099262A JP5240905B2 JP 5240905 B2 JP5240905 B2 JP 5240905B2 JP 2008099262 A JP2008099262 A JP 2008099262A JP 2008099262 A JP2008099262 A JP 2008099262A JP 5240905 B2 JP5240905 B2 JP 5240905B2
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- 230000005291 magnetic effect Effects 0.000 title claims description 150
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 44
- 229910052710 silicon Inorganic materials 0.000 title claims description 44
- 239000010703 silicon Substances 0.000 title claims description 44
- 238000002109 crystal growth method Methods 0.000 title claims description 8
- 239000013078 crystal Substances 0.000 claims description 64
- 238000009826 distribution Methods 0.000 claims description 14
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 10
- 150000002910 rare earth metals Chemical group 0.000 claims description 9
- 230000005389 magnetism Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 28
- 238000005516 engineering process Methods 0.000 description 11
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052767 actinium Inorganic materials 0.000 description 1
- QQINRWTZWGJFDB-UHFFFAOYSA-N actinium atom Chemical compound [Ac] QQINRWTZWGJFDB-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
Claims (4)
- シリコン融液に磁界を印加してシリコン結晶を育成する磁界印加シリコン結晶育成装置において、
前記シリコン融液を収納する軸対称形状のるつぼに対して軸対称性の磁界を印加するための磁気回路の一部に永久磁石が配置された磁気発生手段を備え、
前記磁気回路は、前記るつぼの周囲を水平に取り巻くリング状の継鉄の内壁に、一対の永久磁石を該内壁の上部と下部とに磁極を反対向きに対向させて配置させた組を、該内壁に沿って等間隔に、かつ各々の組の一対の永久磁石の極配置を同一として、複数配置するとともに、
前記永久磁石を固定した継鉄を、周方向に複数に分離して設けたことを特徴とする磁界印加シリコン結晶育成装置。 - 前記永久磁石が希土類系磁石であることを特徴とする請求項1に記載の磁界印加シリコン結晶育成装置。
- シリコン融液を収納する軸対称形状のるつぼに対して軸対称性の磁界を印加するための磁気回路の一部に永久磁石が配置された磁気発生手段を備え、前記磁気回路は、前記るつぼの周囲を水平に取り巻くリング状の継鉄の内壁に、一対の永久磁石を該内壁の上部と下部とに磁極を反対向きに対向させて配置させた組を、該内壁に沿って等間隔に、かつ各々の組の一対の永久磁石の極配置を同一として、複数配置するとともに、前記永久磁石を固定した継鉄を、周方向に複数に分離して設けた磁界印加シリコン結晶育成装置を用いる磁界印加シリコン結晶育成方法であって、
軸対称形状の前記るつぼにシリコン融液を収納し、該磁気回路で該るつぼに対して軸対称性の磁界を印加して前記シリコン結晶を育成することを特徴とする磁界印加シリコン結晶育成方法。 - 前記シリコン融液と該磁気回路の相対位置を変化させ、シリコン融液に印加する磁界の強さおよび分布を変化させてシリコン結晶を育成することを特徴とする請求項3に記載の磁界印加シリコン結晶育成方法。
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CN112146730A (zh) * | 2019-06-28 | 2020-12-29 | 北京铂阳顶荣光伏科技有限公司 | 一种坩埚内材料质量的在线测量装置和方法 |
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JP2022141151A (ja) * | 2021-03-15 | 2022-09-29 | 信越半導体株式会社 | 単結晶引上げ装置および単結晶引上げ方法 |
CN117822126A (zh) * | 2024-03-02 | 2024-04-05 | 山东华特磁电科技股份有限公司 | 一种磁拉晶永磁装置 |
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CA1253720A (en) * | 1983-11-17 | 1989-05-09 | David J. Larson, Jr. | Ordered arrays of ferromagnetic composites |
JPS61251594A (ja) * | 1985-04-26 | 1986-11-08 | Toshiba Corp | 単結晶の製造装置 |
JPH01297141A (ja) * | 1988-05-25 | 1989-11-30 | Canon Inc | マイクロ波プラズマ処理装置 |
JPH0248492A (ja) * | 1988-08-08 | 1990-02-19 | Osaka Titanium Co Ltd | 単結晶成長装置 |
NL8901168A (nl) * | 1989-05-10 | 1990-12-03 | Philips Nv | Hardmagnetisch materiaal en magneet vervaardigd uit dit hardmagnetische materiaal. |
JPH06227887A (ja) * | 1993-02-02 | 1994-08-16 | Sony Corp | 結晶引き上げ方法及び装置 |
JPH09111460A (ja) * | 1995-10-11 | 1997-04-28 | Anelva Corp | チタン系導電性薄膜の作製方法 |
JP2665658B2 (ja) * | 1995-12-18 | 1997-10-22 | 住友特殊金属株式会社 | 希土類・鉄・コバルト・ボロン系正方晶化合物 |
JPH10120485A (ja) * | 1996-10-18 | 1998-05-12 | Mitsubishi Steel Mfg Co Ltd | 単結晶製造装置 |
JPH10182280A (ja) * | 1996-10-18 | 1998-07-07 | Mitsubishi Materials Corp | カスプ磁界引上装置 |
JP4187998B2 (ja) * | 2002-05-10 | 2008-11-26 | Sumco Techxiv株式会社 | 単結晶の製造方法及び製造装置 |
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CN112146730A (zh) * | 2019-06-28 | 2020-12-29 | 北京铂阳顶荣光伏科技有限公司 | 一种坩埚内材料质量的在线测量装置和方法 |
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