DE3581605D1 - Bearbeitungsverfahren und -vorrichtung mittels mikrowellenplasma. - Google Patents
Bearbeitungsverfahren und -vorrichtung mittels mikrowellenplasma.Info
- Publication number
- DE3581605D1 DE3581605D1 DE8585308698T DE3581605T DE3581605D1 DE 3581605 D1 DE3581605 D1 DE 3581605D1 DE 8585308698 T DE8585308698 T DE 8585308698T DE 3581605 T DE3581605 T DE 3581605T DE 3581605 D1 DE3581605 D1 DE 3581605D1
- Authority
- DE
- Germany
- Prior art keywords
- processing method
- microwave plasma
- microwave
- plasma
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/32229—Waveguides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/32238—Windows
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59252909A JPS61131454A (ja) | 1984-11-30 | 1984-11-30 | マイクロ波プラズマ処理方法と装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3581605D1 true DE3581605D1 (de) | 1991-03-07 |
Family
ID=17243852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585308698T Expired - Lifetime DE3581605D1 (de) | 1984-11-30 | 1985-11-29 | Bearbeitungsverfahren und -vorrichtung mittels mikrowellenplasma. |
Country Status (5)
Country | Link |
---|---|
US (1) | USRE36224E (de) |
EP (1) | EP0183561B1 (de) |
JP (1) | JPS61131454A (de) |
KR (1) | KR900000441B1 (de) |
DE (1) | DE3581605D1 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62213126A (ja) * | 1986-03-13 | 1987-09-19 | Fujitsu Ltd | マイクロ波プラズマ処理装置 |
JPH079359Y2 (ja) * | 1986-04-23 | 1995-03-06 | 新日本無線株式会社 | プラズマ装置 |
DE3750115T2 (de) * | 1986-10-20 | 1995-01-19 | Hitachi Ltd | Plasmabearbeitungsgerät. |
US4804431A (en) * | 1987-11-03 | 1989-02-14 | Aaron Ribner | Microwave plasma etching machine and method of etching |
FR2631199B1 (fr) * | 1988-05-09 | 1991-03-15 | Centre Nat Rech Scient | Reacteur a plasma |
JP2760845B2 (ja) * | 1988-07-08 | 1998-06-04 | 株式会社日立製作所 | プラズマ処理装置及びその方法 |
EP0402867B1 (de) * | 1989-06-15 | 1995-03-01 | Sel Semiconductor Energy Laboratory Co., Ltd. | Gerät zur Bearbeitung mittels Mikrowellen in einem magnetischen Feld |
JPH03193880A (ja) * | 1989-08-03 | 1991-08-23 | Mikakutou Seimitsu Kogaku Kenkyusho:Kk | 高圧力下でのマイクロ波プラズマcvdによる高速成膜方法及びその装置 |
DE9013937U1 (de) * | 1990-10-06 | 1992-02-06 | Röhm GmbH, 64293 Darmstadt | Mikrowellenstrahler |
US5359177A (en) * | 1990-11-14 | 1994-10-25 | Mitsubishi Denki Kabushiki Kaisha | Microwave plasma apparatus for generating a uniform plasma |
DE4037091C2 (de) * | 1990-11-22 | 1996-06-20 | Leybold Ag | Vorrichtung für die Erzeugung eines homogenen Mikrowellenfeldes |
JP3158715B2 (ja) * | 1992-03-30 | 2001-04-23 | 株式会社ダイヘン | プラズマ処理装置 |
WO1995027998A1 (de) * | 1994-04-11 | 1995-10-19 | Wu Jeng Ming | Plasmagerät |
DE69524671T2 (de) * | 1994-06-14 | 2002-08-14 | Nec Corp., Tokio/Tokyo | Mikrowellenplasma-Bearbeitungssystem |
EP0702393A3 (de) * | 1994-09-16 | 1997-03-26 | Daihen Corp | Plasmabearbeitungsgerät zur Mikrowellen-Einstrahlung aus einem rechteckigen Wellenleiter durch einem langgestrekten Schlitz in der Plasmakammer |
US6798711B2 (en) | 2002-03-19 | 2004-09-28 | Micron Technology, Inc. | Memory with address management |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1523267A (en) * | 1976-04-15 | 1978-08-31 | Hitachi Ltd | Plasma etching apparatus |
JPS5448172A (en) * | 1977-09-24 | 1979-04-16 | Tokyo Ouka Kougiyou Kk | Plasma reaction processor |
US4330384A (en) * | 1978-10-27 | 1982-05-18 | Hitachi, Ltd. | Process for plasma etching |
JPS55131175A (en) * | 1979-03-30 | 1980-10-11 | Toshiba Corp | Surface treatment apparatus with microwave plasma |
JPS5613480A (en) * | 1979-07-13 | 1981-02-09 | Hitachi Ltd | Dry etching apparatus |
FR2463975A1 (fr) * | 1979-08-22 | 1981-02-27 | Onera (Off Nat Aerospatiale) | Procede et appareil pour la gravure chimique par voie seche des circuits integres |
JPS5673539A (en) * | 1979-11-22 | 1981-06-18 | Toshiba Corp | Surface treating apparatus of microwave plasma |
JPS5751265A (en) * | 1980-09-10 | 1982-03-26 | Hitachi Ltd | Microwave plasma etching device |
JPS5816078A (ja) * | 1981-07-17 | 1983-01-29 | Toshiba Corp | プラズマエツチング装置 |
JPS58202532A (ja) * | 1982-05-21 | 1983-11-25 | Hitachi Ltd | マイクロ波プラズマ放電管 |
JPS6016424A (ja) * | 1983-07-08 | 1985-01-28 | Fujitsu Ltd | マイクロ波プラズマ処理方法及びその装置 |
JPS6037129A (ja) * | 1983-08-10 | 1985-02-26 | Hitachi Ltd | 半導体製造装置 |
JPS614177A (ja) * | 1984-06-18 | 1986-01-10 | 松下電器産業株式会社 | アダプタ装置 |
-
1984
- 1984-11-30 JP JP59252909A patent/JPS61131454A/ja active Granted
-
1985
- 1985-11-29 DE DE8585308698T patent/DE3581605D1/de not_active Expired - Lifetime
- 1985-11-29 EP EP85308698A patent/EP0183561B1/de not_active Expired
- 1985-11-30 KR KR8508983A patent/KR900000441B1/ko not_active IP Right Cessation
-
1996
- 1996-11-15 US US08/749,654 patent/USRE36224E/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0183561A3 (en) | 1988-05-25 |
JPH053732B2 (de) | 1993-01-18 |
EP0183561B1 (de) | 1991-01-30 |
EP0183561A2 (de) | 1986-06-04 |
USRE36224E (en) | 1999-06-08 |
KR900000441B1 (en) | 1990-01-30 |
JPS61131454A (ja) | 1986-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |