DE68925425D1 - Differenzdrucksensor mit membran mit freier randkonstruktion - Google Patents

Differenzdrucksensor mit membran mit freier randkonstruktion

Info

Publication number
DE68925425D1
DE68925425D1 DE68925425T DE68925425T DE68925425D1 DE 68925425 D1 DE68925425 D1 DE 68925425D1 DE 68925425 T DE68925425 T DE 68925425T DE 68925425 T DE68925425 T DE 68925425T DE 68925425 D1 DE68925425 D1 DE 68925425D1
Authority
DE
Germany
Prior art keywords
diaphragm
pressure sensor
free edge
membrane
differential pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68925425T
Other languages
English (en)
Other versions
DE68925425T2 (de
Inventor
Thomas Knecht
Ahmed Naumaan
Stanley Rud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of DE68925425D1 publication Critical patent/DE68925425D1/de
Application granted granted Critical
Publication of DE68925425T2 publication Critical patent/DE68925425T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01B—MACHINES OR ENGINES, IN GENERAL OR OF POSITIVE-DISPLACEMENT TYPE, e.g. STEAM ENGINES
    • F01B19/00—Positive-displacement machines or engines of flexible-wall type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE68925425T 1988-10-20 1989-10-17 Differenzdrucksensor mit membran mit freier randkonstruktion Expired - Fee Related DE68925425T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/260,237 US4905575A (en) 1988-10-20 1988-10-20 Solid state differential pressure sensor with overpressure stop and free edge construction
PCT/US1989/004645 WO1990004701A1 (en) 1988-10-20 1989-10-17 Solid state differential pressure sensor with overpressure stop and free edge construction

Publications (2)

Publication Number Publication Date
DE68925425D1 true DE68925425D1 (de) 1996-02-22
DE68925425T2 DE68925425T2 (de) 1996-05-15

Family

ID=22988351

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68925425T Expired - Fee Related DE68925425T2 (de) 1988-10-20 1989-10-17 Differenzdrucksensor mit membran mit freier randkonstruktion

Country Status (8)

Country Link
US (1) US4905575A (de)
EP (1) EP0439494B1 (de)
JP (1) JP2743104B2 (de)
AT (1) ATE132968T1 (de)
BR (1) BR8907728A (de)
CA (1) CA2001047A1 (de)
DE (1) DE68925425T2 (de)
WO (1) WO1990004701A1 (de)

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4996627A (en) * 1989-01-30 1991-02-26 Dresser Industries, Inc. High sensitivity miniature pressure transducer
US5064165A (en) * 1989-04-07 1991-11-12 Ic Sensors, Inc. Semiconductor transducer or actuator utilizing corrugated supports
US5209118A (en) * 1989-04-07 1993-05-11 Ic Sensors Semiconductor transducer or actuator utilizing corrugated supports
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
JP2639159B2 (ja) * 1989-04-14 1997-08-06 富士電機株式会社 静電容量式差圧検出器
US4999735A (en) * 1990-03-08 1991-03-12 Allied-Signal Inc. Differential capacitive transducer and method of making
US5094109A (en) * 1990-12-06 1992-03-10 Rosemount Inc. Pressure transmitter with stress isolation depression
US5157972A (en) * 1991-03-29 1992-10-27 Rosemount Inc. Pressure sensor with high modules support
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5333504A (en) * 1992-09-01 1994-08-02 Rosemount Inc. High overpressure low range pressure sensor
US5349491A (en) * 1992-11-06 1994-09-20 Kavlico Corporation Pre-stressed pressure transducer and method of forming same
US5386729A (en) * 1993-09-22 1995-02-07 The Babcock & Wilcox Company Temperature compensated microbend fiber optic differential pressure transducer
US5545594A (en) * 1993-10-26 1996-08-13 Yazaki Meter Co., Ltd. Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented
DE4338575A1 (de) * 1993-11-11 1995-05-18 Siemens Ag Verfahren zum Erzeugen wenigstens einer Ausnehmung in einer Oberfläche eines Substrats, Vorrichtung zur Durchführung des Verfahrens und Verwendung des Verfahrensprodukts
US5424634A (en) * 1994-02-18 1995-06-13 International Business Machines Corporation Non-destructive flex testing method and means
US6030851A (en) * 1995-06-07 2000-02-29 Grandmont; Paul E. Method for overpressure protected pressure sensor
CN1107831C (zh) * 1997-02-03 2003-05-07 斯瓦戈洛克公司 流量控制装置
US6059254A (en) * 1997-03-27 2000-05-09 Rosemount Inc. Process instrument mount
US6145430A (en) * 1998-06-30 2000-11-14 Ingersoll-Rand Company Selectively bonded pump diaphragm
US20020003274A1 (en) * 1998-08-27 2002-01-10 Janusz Bryzek Piezoresistive sensor with epi-pocket isolation
US6006607A (en) * 1998-08-31 1999-12-28 Maxim Integrated Products, Inc. Piezoresistive pressure sensor with sculpted diaphragm
JP2000265945A (ja) * 1998-11-10 2000-09-26 Uct Kk 薬液供給ポンプ、薬液供給装置、薬液供給システム、基板洗浄装置、薬液供給方法、及び基板洗浄方法
US6351996B1 (en) 1998-11-12 2002-03-05 Maxim Integrated Products, Inc. Hermetic packaging for semiconductor pressure sensors
US20010001550A1 (en) * 1998-11-12 2001-05-24 Janusz Bryzek Integral stress isolation apparatus and technique for semiconductor devices
US6346742B1 (en) 1998-11-12 2002-02-12 Maxim Integrated Products, Inc. Chip-scale packaged pressure sensor
US6229190B1 (en) 1998-12-18 2001-05-08 Maxim Integrated Products, Inc. Compensated semiconductor pressure sensor
DE19945470B4 (de) * 1999-09-22 2007-06-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen einer mikrofunktionalen Verbundvorrichtung
US6295918B1 (en) * 1999-10-15 2001-10-02 John M. Simmons Suspended diaphragm
US6568276B1 (en) * 2000-08-04 2003-05-27 Measurement Specialties, Inc. Strain gauge based sensor with improved linearity
JP3768789B2 (ja) * 2000-09-07 2006-04-19 アルプス電気株式会社 超音波振動子及びウエット処理用ノズル並びにウエット処理装置
US6622558B2 (en) * 2000-11-30 2003-09-23 Orbital Research Inc. Method and sensor for detecting strain using shape memory alloys
DE10114666A1 (de) * 2001-03-23 2002-09-26 Bernhard Trier Differenzdrucksensor
JP2004140029A (ja) * 2002-10-15 2004-05-13 Sharp Corp 半導体装置、半導体モジュール、半導体装置の製造方法、及び、半導体モジュールの製造方法
US20050081638A1 (en) * 2003-09-05 2005-04-21 Couch Philip R. Sensing diaphragm for a differential pressure sensor with over-pressure protection and methods
US8026729B2 (en) 2003-09-16 2011-09-27 Cardiomems, Inc. System and apparatus for in-vivo assessment of relative position of an implant
US20060287602A1 (en) * 2005-06-21 2006-12-21 Cardiomems, Inc. Implantable wireless sensor for in vivo pressure measurement
AU2004274005A1 (en) * 2003-09-16 2005-03-31 Cardiomems, Inc. Implantable wireless sensor
AU2006262287A1 (en) * 2005-06-21 2007-01-04 Cardiomems, Inc. Method of manufacturing implantable wireless sensor for in vivo pressure measurement
US7409865B2 (en) * 2005-09-30 2008-08-12 General Electric Company Diaphragm structure
JP5187529B2 (ja) * 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
CH699668A1 (de) * 2008-10-09 2010-04-15 Kistler Holding Ag Sensormembrane.
DE102010028504A1 (de) * 2010-05-03 2011-11-03 Endress + Hauser Gmbh + Co. Kg Drucksensor
US8704538B2 (en) * 2010-07-01 2014-04-22 Mks Instruments, Inc. Capacitance sensors
JP2012037415A (ja) * 2010-08-09 2012-02-23 Seiko Epson Corp 圧力センサー
DE102010045536B4 (de) * 2010-09-15 2012-06-21 Trw Automotive Electronics & Components Gmbh Elektrodynamischer Aktor
US8906730B2 (en) * 2011-04-14 2014-12-09 Robert Bosch Gmbh Method of forming membranes with modified stress characteristics
JP2013044675A (ja) * 2011-08-25 2013-03-04 Yokogawa Electric Corp 振動式差圧センサとその製造方法
DE102012102020A1 (de) * 2012-03-09 2013-09-12 Epcos Ag Mikromechanisches Messelement
JP5897940B2 (ja) * 2012-03-14 2016-04-06 アズビル株式会社 圧力センサチップ
ITMI20120617A1 (it) * 2012-04-16 2013-10-17 St Microelectronics Srl Sensore di pressione a stato solido
DE102012111533A1 (de) 2012-11-28 2014-05-28 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
CA2940196C (en) 2014-03-19 2023-03-07 Wayne Marasco Immunogenetic restriction on elicitation of antibodies
US9410861B2 (en) 2014-03-25 2016-08-09 Honeywell International Inc. Pressure sensor with overpressure protection
US9316553B2 (en) 2014-03-26 2016-04-19 Rosemount Inc. Span line pressure effect compensation for diaphragm pressure sensor
AU2015259249B2 (en) * 2014-05-13 2018-07-12 Firestone Industrial Products Company, Llc Actuator flexible member with reaction feature
US9963340B2 (en) 2015-12-03 2018-05-08 Honeywell International Inc. Pressure sensor die over pressure protection for high over pressure to operating span ratios
US10197462B2 (en) 2016-05-25 2019-02-05 Honeywell International Inc. Differential pressure sensor full overpressure protection device
CN205793288U (zh) * 2016-05-26 2016-12-07 瑞声科技(新加坡)有限公司 微型发声器
US10378987B2 (en) 2017-03-10 2019-08-13 Honeywell International Inc. Pressure sensor with flow porting having integral flame-proof safety mechanism
WO2019222598A1 (en) 2018-05-17 2019-11-21 Rosemount Inc. Measuring element and measuring device comprising the same
JP7401248B2 (ja) * 2019-10-09 2023-12-19 アズビル株式会社 圧力センサ
US11226253B2 (en) * 2019-12-23 2022-01-18 Rosemount Inc. High range differential pressure sensor
US11692895B2 (en) * 2021-03-30 2023-07-04 Rosemount Aerospace Inc. Differential pressure sensor
EP4257825A1 (de) * 2022-04-06 2023-10-11 Goodrich Corporation Membran

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1055969B (de) * 1954-09-08 1959-04-23 Draegerwerk Ag Ausatemventil für Atemschutzmasken
GB1088723A (en) * 1964-03-18 1967-10-25 Ether Eng Ltd Improvements in and relating to transducers
US3360664A (en) * 1964-10-30 1967-12-26 Gen Dynamics Corp Electromechanical apparatus
US3793885A (en) * 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
DE2452601A1 (de) * 1974-11-06 1976-05-13 Erich Brosa Druckdifferenzgeber
SU569886A1 (ru) * 1975-09-11 1977-08-25 Предприятие П/Я А-1891 Датчик разности давлений
US4202217A (en) * 1977-12-12 1980-05-13 Kulite Semiconductor Products, Inc. Semiconductor transducers employing flat bondable surfaces with buried contact areas
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4498078A (en) * 1981-01-23 1985-02-05 Motokazu Yoshimura Sewing machine with a voice warning device
JPS57139634A (en) * 1981-02-24 1982-08-28 Yokogawa Hokushin Electric Corp Range spring of pressure conveyor
JPS5952727A (ja) * 1982-09-20 1984-03-27 Hitachi Ltd 半導体圧力センサ
JPS59125032A (ja) * 1982-12-29 1984-07-19 Fuji Electric Co Ltd 差圧測定装置
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
US4793194A (en) * 1985-03-26 1988-12-27 Endevco Corporation Piezoresistive transducer
US4649363A (en) * 1985-07-22 1987-03-10 Honeywell Inc. Sensor
US4612812A (en) * 1985-08-15 1986-09-23 Rosemount Inc. Stress reducing stop for unstretched pressure sensing diaphragm
IT1187900B (it) * 1986-02-10 1987-12-23 Marelli Autronica Dispositivo sensore di pressione
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
JPH0810170B2 (ja) * 1987-03-06 1996-01-31 株式会社日立製作所 半導体絶対圧力センサの製造方法
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors

Also Published As

Publication number Publication date
WO1990004701A1 (en) 1990-05-03
EP0439494A1 (de) 1991-08-07
JP2743104B2 (ja) 1998-04-22
EP0439494B1 (de) 1996-01-10
CA2001047A1 (en) 1990-04-20
EP0439494A4 (en) 1992-04-01
US4905575A (en) 1990-03-06
ATE132968T1 (de) 1996-01-15
DE68925425T2 (de) 1996-05-15
BR8907728A (pt) 1991-07-30
JPH04502203A (ja) 1992-04-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee