DE68903951D1 - Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf. - Google Patents

Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf.

Info

Publication number
DE68903951D1
DE68903951D1 DE8989115100T DE68903951T DE68903951D1 DE 68903951 D1 DE68903951 D1 DE 68903951D1 DE 8989115100 T DE8989115100 T DE 8989115100T DE 68903951 T DE68903951 T DE 68903951T DE 68903951 D1 DE68903951 D1 DE 68903951D1
Authority
DE
Germany
Prior art keywords
micromechanical probe
afm
micromechanical
producing
probe head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8989115100T
Other languages
English (en)
Other versions
DE68903951T2 (de
Inventor
Johann Dr Dipl Phys Greschner
Thomas Bayer
Georg Kraus
Olaf Dr Dipl Phys Wolter
Helga Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE68903951D1 publication Critical patent/DE68903951D1/de
Publication of DE68903951T2 publication Critical patent/DE68903951T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • ing And Chemical Polishing (AREA)
DE8989115100T 1989-08-16 1989-08-16 Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf. Expired - Lifetime DE68903951T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89115100A EP0413042B1 (de) 1989-08-16 1989-08-16 Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf

Publications (2)

Publication Number Publication Date
DE68903951D1 true DE68903951D1 (de) 1993-01-28
DE68903951T2 DE68903951T2 (de) 1993-07-08

Family

ID=8201771

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989115100T Expired - Lifetime DE68903951T2 (de) 1989-08-16 1989-08-16 Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf.

Country Status (4)

Country Link
US (1) US5051379A (de)
EP (1) EP0413042B1 (de)
JP (1) JPH0762258B2 (de)
DE (1) DE68903951T2 (de)

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US7073938B2 (en) * 2001-10-31 2006-07-11 The Regents Of The University Of Michigan Micromachined arrayed thermal probe apparatus, system for thermal scanning a sample in a contact mode and cantilevered reference probe for use therein
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Also Published As

Publication number Publication date
DE68903951T2 (de) 1993-07-08
US5051379A (en) 1991-09-24
EP0413042B1 (de) 1992-12-16
EP0413042A1 (de) 1991-02-20
JPH03162602A (ja) 1991-07-12
JPH0762258B2 (ja) 1995-07-05

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