DE68902141D1 - Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf. - Google Patents

Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf.

Info

Publication number
DE68902141D1
DE68902141D1 DE8989115099T DE68902141T DE68902141D1 DE 68902141 D1 DE68902141 D1 DE 68902141D1 DE 8989115099 T DE8989115099 T DE 8989115099T DE 68902141 T DE68902141 T DE 68902141T DE 68902141 D1 DE68902141 D1 DE 68902141D1
Authority
DE
Germany
Prior art keywords
micromechanical probe
afm
micromechanical
producing
probe head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8989115099T
Other languages
English (en)
Other versions
DE68902141T2 (de
Inventor
Johann Dr Dipl-Phys Greschner
Thomas Bayer
Georg Kraus
Olaf Dr Dipl Phys Wolter
Helga Weiss
Johann Dr Dipl Phys Bartha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE68902141D1 publication Critical patent/DE68902141D1/de
Application granted granted Critical
Publication of DE68902141T2 publication Critical patent/DE68902141T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • ing And Chemical Polishing (AREA)
DE8989115099T 1989-08-16 1989-08-16 Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf. Expired - Lifetime DE68902141T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89115099A EP0413041B1 (de) 1989-08-16 1989-08-16 Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf

Publications (2)

Publication Number Publication Date
DE68902141D1 true DE68902141D1 (de) 1992-08-20
DE68902141T2 DE68902141T2 (de) 1993-02-25

Family

ID=8201770

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989115099T Expired - Lifetime DE68902141T2 (de) 1989-08-16 1989-08-16 Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf.

Country Status (4)

Country Link
US (1) US5116462A (de)
EP (1) EP0413041B1 (de)
JP (1) JPH0762259B2 (de)
DE (1) DE68902141T2 (de)

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US5221415A (en) * 1989-01-17 1993-06-22 Board Of Trustees Of The Leland Stanford Junior University Method of forming microfabricated cantilever stylus with integrated pyramidal tip
DE68903950T2 (de) * 1989-08-16 1993-07-01 Ibm Verfahren fuer die herstellung ultrafeiner siliziumspitzen fuer afm/stm-profilometrie.
US5476131A (en) * 1989-11-27 1995-12-19 Censtor Corporation Unitary micro-flexure structure and method of making same
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US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5763782A (en) * 1992-03-16 1998-06-09 British Technology Group Limited Micromechanical sensor
JP3218414B2 (ja) * 1992-07-15 2001-10-15 キヤノン株式会社 微小ティップ及びその製造方法、並びに該微小ティップを用いたプローブユニット及び情報処理装置
US5321977A (en) * 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
EP0611945B1 (de) * 1993-02-15 1997-11-19 International Business Machines Corporation Kraftmikroskop und Verfahren zur Messung von atomaren Kräften in mehreren Richtungen
US5534359A (en) * 1994-06-07 1996-07-09 International Business Machines Corporation Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
DE4445177C5 (de) * 1994-11-22 2015-09-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung mikromechanischer Bauelemente mit freistehenden Mikrostrukturen
US5611942A (en) * 1995-03-02 1997-03-18 Kabushiki Kaisha Toshiba Method for producing tips for atomic force microscopes
FR2739494B1 (fr) * 1995-09-29 1997-11-14 Suisse Electronique Microtech Procede de fabrication de pieces de micromecanique ayant une partie en diamant constituee au moins d'une pointe, et pieces de micromecanique comportant au moins une pointe en diamant
US5818748A (en) * 1995-11-21 1998-10-06 International Business Machines Corporation Chip function separation onto separate stacked chips
US5781031A (en) * 1995-11-21 1998-07-14 International Business Machines Corporation Programmable logic array
US5903059A (en) * 1995-11-21 1999-05-11 International Business Machines Corporation Microconnectors
EP0868648B1 (de) * 1995-12-11 2003-04-02 Xros, Inc. Integrierter silikonprofilmesser und rastersonde
US5861549A (en) 1996-12-10 1999-01-19 Xros, Inc. Integrated Silicon profilometer and AFM head
JP3370527B2 (ja) * 1996-03-08 2003-01-27 セイコーインスツルメンツ株式会社 原子間力顕微鏡用プローブとその製造方法および原子間力顕微鏡
DE19646120C2 (de) * 1996-06-13 2001-07-26 Ibm Mikromechanischer Sensor für die AFM/STM Profilometrie
US6066265A (en) * 1996-06-19 2000-05-23 Kionix, Inc. Micromachined silicon probe for scanning probe microscopy
US6088320A (en) * 1997-02-19 2000-07-11 International Business Machines Corporation Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft
US5965218A (en) * 1997-03-18 1999-10-12 Vlsi Technology, Inc. Process for manufacturing ultra-sharp atomic force microscope (AFM) and scanning tunneling microscope (STM) tips
US6093330A (en) * 1997-06-02 2000-07-25 Cornell Research Foundation, Inc. Microfabrication process for enclosed microstructures
US5936243A (en) * 1997-06-09 1999-08-10 Ian Hardcastle Conductive micro-probe and memory device
US6139759A (en) * 1997-07-08 2000-10-31 International Business Machines Corporation Method of manufacturing silicided silicon microtips for scanning probe microscopy
EP0899538B1 (de) * 1997-08-27 2003-05-14 IMEC vzw Taststift-Konfiguration sowie Herstellungsverfahren und Verwendung von Taststiften
JPH1194863A (ja) 1997-09-12 1999-04-09 Nikon Corp カンチレバー及びその製造方法
US6014032A (en) 1997-09-30 2000-01-11 International Business Machines Corporation Micro probe ring assembly and method of fabrication
US6059982A (en) * 1997-09-30 2000-05-09 International Business Machines Corporation Micro probe assembly and method of fabrication
JP2002510139A (ja) * 1998-01-15 2002-04-02 コーネル・リサーチ・ファンデーション・インコーポレイテッド ミクロ加工デバイスのトレンチアイソレーション
US6807734B2 (en) 1998-02-13 2004-10-26 Formfactor, Inc. Microelectronic contact structures, and methods of making same
US6180536B1 (en) 1998-06-04 2001-01-30 Cornell Research Foundation, Inc. Suspended moving channels and channel actuators for microfluidic applications and method for making
JP3949831B2 (ja) * 1998-11-11 2007-07-25 セイコーインスツル株式会社 光カンチレバーとその製造方法
US6179625B1 (en) 1999-03-25 2001-01-30 International Business Machines Corporation Removable interlockable first and second connectors having engaging flexible members and process of making same
US6452161B1 (en) 2000-03-28 2002-09-17 Advanced Micro Devices, Inc. Scanning probe microscope having optical fiber spaced from point of hp
US6479817B1 (en) 2000-03-28 2002-11-12 Advanced Micro Devices, Inc. Cantilever assembly and scanning tip therefor with associated optical sensor
US6365527B1 (en) * 2000-10-06 2002-04-02 United Microelectronics Corp. Method for depositing silicon carbide in semiconductor devices
US6797628B2 (en) * 2002-01-16 2004-09-28 Micron Technology, Inc. Methods of forming integrated circuitry, semiconductor processing methods, and processing method of forming MRAM circuitry
US6656369B2 (en) 2002-01-17 2003-12-02 International Business Machines Corporation Method for fabricating a scanning probe microscope probe
JP2003215161A (ja) * 2002-01-22 2003-07-30 Tokyo Electron Ltd プローブ、プローブの製造方法、プローブの取付方法、プローブの取付装置及びプローブカード
AU2002353582A1 (en) * 2002-02-05 2003-09-02 Oug-Ki Lee Method for manufacturing electric contact element for testing electro device and electric contact element thereby
US7002225B2 (en) * 2002-05-24 2006-02-21 Northrup Grumman Corporation Compliant component for supporting electrical interface component
SG101537A1 (en) * 2002-06-03 2004-01-30 Sensfab Pte Ltd Method of forming atomic force microscope tips
DE10236150A1 (de) * 2002-08-05 2004-02-26 Universität Kassel Verfahren zur Herstellung wenigstens einer kleinen Öffnung in einer Schicht auf einem Substrat und damit hergestellte Bauelemente
US6835589B2 (en) * 2002-11-14 2004-12-28 International Business Machines Corporation Three-dimensional integrated CMOS-MEMS device and process for making the same
US7370515B2 (en) * 2004-06-21 2008-05-13 Veeco Instruments Inc. Probes for use in scanning probe microscopes and methods of fabricating such probes
US8261662B1 (en) 2004-11-08 2012-09-11 Nanolnk, Inc. Active pen nanolithography
KR100749735B1 (ko) * 2006-06-07 2007-08-16 주식회사 파이컴 캔틸레버형 프로브 제조 방법 및 이를 이용한 프로브 카드제조 방법
US8168120B1 (en) 2007-03-06 2012-05-01 The Research Foundation Of State University Of New York Reliable switch that is triggered by the detection of a specific gas or substance
DE102010035931A1 (de) 2010-08-31 2012-03-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer Messspitze für ein Rastersondenmikroskop sowie Messsonde mit nach diesem Verfahren hergestellter Messspitze
EP2913681A1 (de) 2014-02-28 2015-09-02 Infinitesima Limited Sondenvorrichtung mit mehreren Aktuationsstellen
WO2021059009A1 (en) * 2019-09-29 2021-04-01 Gharooni Milad Fabrication of an atomic force microscope probe
CN112162115B (zh) * 2020-09-04 2024-02-13 杭州探真纳米科技有限公司 一种大高宽比金刚石针尖afm探针的制造方法
CN113218873A (zh) * 2021-04-09 2021-08-06 南方电网科学研究院有限责任公司 一种基于单悬臂梁的差分式光声光谱气体检测装置

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US4312117A (en) * 1977-09-01 1982-01-26 Raytheon Company Integrated test and assembly device
JPS5616912A (en) * 1979-07-16 1981-02-18 Matsushita Electric Ind Co Ltd Construction of oscillator in pickup cartridge
JPS63289443A (ja) * 1987-05-21 1988-11-25 Sharp Corp 感湿素子
US4916002A (en) * 1989-01-13 1990-04-10 The Board Of Trustees Of The Leland Jr. University Microcasting of microminiature tips
US4943719A (en) * 1989-01-17 1990-07-24 The Board Of Trustees Of The Leland Stanford University Microminiature cantilever stylus
US4968585A (en) * 1989-06-20 1990-11-06 The Board Of Trustees Of The Leland Stanford Jr. University Microfabricated cantilever stylus with integrated conical tip

Also Published As

Publication number Publication date
EP0413041A1 (de) 1991-02-20
US5116462A (en) 1992-05-26
EP0413041B1 (de) 1992-07-15
JPH0762259B2 (ja) 1995-07-05
JPH03135702A (ja) 1991-06-10
DE68902141T2 (de) 1993-02-25

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