DE60222044D1 - Nitrid-Feldeffekttransistor - Google Patents
Nitrid-FeldeffekttransistorInfo
- Publication number
- DE60222044D1 DE60222044D1 DE60222044T DE60222044T DE60222044D1 DE 60222044 D1 DE60222044 D1 DE 60222044D1 DE 60222044 T DE60222044 T DE 60222044T DE 60222044 T DE60222044 T DE 60222044T DE 60222044 D1 DE60222044 D1 DE 60222044D1
- Authority
- DE
- Germany
- Prior art keywords
- nitride
- field effect
- effect transistor
- type field
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005669 field effect Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
- H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001090490 | 2001-03-27 | ||
JP2001090490A JP4220683B2 (ja) | 2001-03-27 | 2001-03-27 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60222044D1 true DE60222044D1 (de) | 2007-10-11 |
DE60222044T2 DE60222044T2 (de) | 2007-12-13 |
Family
ID=18945265
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60222044T Expired - Lifetime DE60222044T2 (de) | 2001-03-27 | 2002-03-12 | Nitrid-Feldeffekttransistor |
Country Status (5)
Country | Link |
---|---|
US (2) | US6787820B2 (de) |
EP (1) | EP1246256B1 (de) |
JP (1) | JP4220683B2 (de) |
CN (1) | CN1240137C (de) |
DE (1) | DE60222044T2 (de) |
Families Citing this family (67)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100408689C (zh) * | 2001-10-04 | 2008-08-06 | 株式会社武藏野化学研究所 | D-丙氨酸的制造方法 |
JP3977659B2 (ja) * | 2002-02-21 | 2007-09-19 | 沖電気工業株式会社 | ヘテロ接合電界効果トランジスタ |
US7105868B2 (en) * | 2002-06-24 | 2006-09-12 | Cermet, Inc. | High-electron mobility transistor with zinc oxide |
US6897137B2 (en) * | 2002-08-05 | 2005-05-24 | Hrl Laboratories, Llc | Process for fabricating ultra-low contact resistances in GaN-based devices |
KR100484486B1 (ko) * | 2002-10-18 | 2005-04-20 | 한국전자통신연구원 | 질화물 반도체 전계 효과 트랜지스터 및 그 제조방법 |
US6957899B2 (en) * | 2002-10-24 | 2005-10-25 | Hongxing Jiang | Light emitting diodes for high AC voltage operation and general lighting |
US8089097B2 (en) * | 2002-12-27 | 2012-01-03 | Momentive Performance Materials Inc. | Homoepitaxial gallium-nitride-based electronic devices and method for producing same |
JP2008098674A (ja) * | 2003-06-10 | 2008-04-24 | Matsushita Electric Ind Co Ltd | 半導体装置 |
JP4224423B2 (ja) * | 2003-06-10 | 2009-02-12 | パナソニック株式会社 | 半導体装置およびその製造方法 |
US7501669B2 (en) * | 2003-09-09 | 2009-03-10 | Cree, Inc. | Wide bandgap transistor devices with field plates |
EP1665358B1 (de) | 2003-09-09 | 2020-07-01 | The Regents of The University of California | Herstellung von einer einzelnen oder mehreren gate-feldplatten |
US7649215B2 (en) * | 2003-12-05 | 2010-01-19 | International Rectifier Corporation | III-nitride device passivation and method |
US7279697B2 (en) * | 2003-12-05 | 2007-10-09 | International Rectifier Corporation | Field effect transistor with enhanced insulator structure |
EP1690286A4 (de) * | 2003-12-05 | 2009-07-08 | Int Rectifier Corp | Feldeffekttransistor mit verbesserter isolatorstruktur |
US20050133816A1 (en) * | 2003-12-19 | 2005-06-23 | Zhaoyang Fan | III-nitride quantum-well field effect transistors |
JP2005210105A (ja) * | 2003-12-26 | 2005-08-04 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US7382001B2 (en) * | 2004-01-23 | 2008-06-03 | International Rectifier Corporation | Enhancement mode III-nitride FET |
US8174048B2 (en) * | 2004-01-23 | 2012-05-08 | International Rectifier Corporation | III-nitride current control device and method of manufacture |
US7465997B2 (en) * | 2004-02-12 | 2008-12-16 | International Rectifier Corporation | III-nitride bidirectional switch |
US8193612B2 (en) * | 2004-02-12 | 2012-06-05 | International Rectifier Corporation | Complimentary nitride transistors vertical and common drain |
JP4889203B2 (ja) * | 2004-04-21 | 2012-03-07 | 新日本無線株式会社 | 窒化物半導体装置及びその製造方法 |
JP4869563B2 (ja) | 2004-04-21 | 2012-02-08 | 新日本無線株式会社 | 窒化物半導体装置及びその製造方法 |
US7573078B2 (en) | 2004-05-11 | 2009-08-11 | Cree, Inc. | Wide bandgap transistors with multiple field plates |
US7550783B2 (en) * | 2004-05-11 | 2009-06-23 | Cree, Inc. | Wide bandgap HEMTs with source connected field plates |
US9773877B2 (en) * | 2004-05-13 | 2017-09-26 | Cree, Inc. | Wide bandgap field effect transistors with source connected field plates |
JP4607506B2 (ja) * | 2004-07-16 | 2011-01-05 | 株式会社東芝 | 半導体装置 |
JP2006086354A (ja) | 2004-09-16 | 2006-03-30 | Toshiba Corp | 窒化物系半導体装置 |
US7525248B1 (en) | 2005-01-26 | 2009-04-28 | Ac Led Lighting, L.L.C. | Light emitting diode lamp |
US7714359B2 (en) | 2005-02-17 | 2010-05-11 | Panasonic Corporation | Field effect transistor having nitride semiconductor layer |
JP2006261642A (ja) * | 2005-02-17 | 2006-09-28 | Matsushita Electric Ind Co Ltd | 電界効果トランジスタおよびその製造方法 |
US11791385B2 (en) * | 2005-03-11 | 2023-10-17 | Wolfspeed, Inc. | Wide bandgap transistors with gate-source field plates |
JP5093991B2 (ja) * | 2005-03-31 | 2012-12-12 | 住友電工デバイス・イノベーション株式会社 | 半導体装置 |
US8272757B1 (en) | 2005-06-03 | 2012-09-25 | Ac Led Lighting, L.L.C. | Light emitting diode lamp capable of high AC/DC voltage operation |
JP2007142243A (ja) * | 2005-11-21 | 2007-06-07 | Matsushita Electric Ind Co Ltd | 窒化物半導体電界効果トランジスタ及びその製造方法 |
CN101331599A (zh) * | 2005-12-14 | 2008-12-24 | 日本电气株式会社 | 场效应晶体管 |
JP5163129B2 (ja) * | 2006-02-10 | 2013-03-13 | 日本電気株式会社 | 半導体装置 |
JP5560519B2 (ja) * | 2006-04-11 | 2014-07-30 | 日産自動車株式会社 | 半導体装置及びその製造方法 |
JP5272727B2 (ja) * | 2006-05-08 | 2013-08-28 | 日本電気株式会社 | 半導体装置 |
JP5179023B2 (ja) * | 2006-05-31 | 2013-04-10 | パナソニック株式会社 | 電界効果トランジスタ |
US7504679B2 (en) * | 2006-07-20 | 2009-03-17 | International Rectifier Corporation | Enhancement mode GaN FET with piezoelectric gate |
JP4282708B2 (ja) * | 2006-10-20 | 2009-06-24 | 株式会社東芝 | 窒化物系半導体装置 |
US8283699B2 (en) * | 2006-11-13 | 2012-10-09 | Cree, Inc. | GaN based HEMTs with buried field plates |
US7838904B2 (en) * | 2007-01-31 | 2010-11-23 | Panasonic Corporation | Nitride based semiconductor device with concave gate region |
JP5313457B2 (ja) * | 2007-03-09 | 2013-10-09 | パナソニック株式会社 | 窒化物半導体装置及びその製造方法 |
US7800116B2 (en) | 2007-03-29 | 2010-09-21 | Panasonic Corporation | Group III-nitride semiconductor device with a cap layer |
CN101295758B (zh) | 2007-04-29 | 2013-03-06 | 晶能光电(江西)有限公司 | 含有碳基衬底的铟镓铝氮发光器件以及其制造方法 |
JP5298559B2 (ja) * | 2007-06-29 | 2013-09-25 | 富士通株式会社 | 半導体装置及びその製造方法 |
JP2009206163A (ja) * | 2008-02-26 | 2009-09-10 | Oki Electric Ind Co Ltd | ヘテロ接合型電界効果トランジスタ |
CN102017193B (zh) * | 2008-03-25 | 2012-05-30 | 晶能光电(江西)有限公司 | 具有双面钝化的半导体发光器件 |
JP5562579B2 (ja) * | 2009-05-12 | 2014-07-30 | 日本碍子株式会社 | 半導体素子用エピタキシャル基板の作製方法 |
US8338860B2 (en) * | 2009-10-30 | 2012-12-25 | Alpha And Omega Semiconductor Incorporated | Normally off gallium nitride field effect transistors (FET) |
TWI420578B (zh) * | 2010-01-14 | 2013-12-21 | Great Power Semiconductor Corp | 低閘極阻抗之溝槽式功率半導體結構及其製造方法 |
JP2011171640A (ja) * | 2010-02-22 | 2011-09-01 | Sanken Electric Co Ltd | 窒化物半導体装置及びその製造方法 |
JP5712583B2 (ja) * | 2010-12-02 | 2015-05-07 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
KR20120060303A (ko) * | 2010-12-02 | 2012-06-12 | 엘지전자 주식회사 | 질화물 반도체 소자의 제조 방법 및 이에 의해 제조된 질화물 반도체 소자 |
JP5519547B2 (ja) * | 2011-01-31 | 2014-06-11 | 日本碍子株式会社 | トランジスタ素子 |
JP2013131650A (ja) * | 2011-12-21 | 2013-07-04 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP5796181B2 (ja) * | 2012-05-22 | 2015-10-21 | パナソニックIpマネジメント株式会社 | 窒化物半導体発光装置 |
US9608085B2 (en) * | 2012-10-01 | 2017-03-28 | Cree, Inc. | Predisposed high electron mobility transistor |
JP6343807B2 (ja) * | 2012-12-20 | 2018-06-20 | パナソニックIpマネジメント株式会社 | 電界効果トランジスタおよびその製造方法 |
JP6197344B2 (ja) * | 2013-04-18 | 2017-09-20 | 住友電気工業株式会社 | 半導体装置 |
CN105229778B (zh) * | 2013-06-06 | 2018-12-11 | 日本碍子株式会社 | 13族氮化物复合基板、半导体元件及13族氮化物复合基板的制造方法 |
US9847411B2 (en) | 2013-06-09 | 2017-12-19 | Cree, Inc. | Recessed field plate transistor structures |
US9679981B2 (en) | 2013-06-09 | 2017-06-13 | Cree, Inc. | Cascode structures for GaN HEMTs |
JP2017041542A (ja) * | 2015-08-20 | 2017-02-23 | 株式会社東芝 | 半導体装置 |
CN106876444B (zh) * | 2017-03-03 | 2019-09-10 | 东南大学 | 基于多周期量子阱结构的hemt器件 |
CN108615756B (zh) * | 2018-06-15 | 2024-06-14 | 苏州汉骅半导体有限公司 | 半导体器件 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02202029A (ja) | 1989-01-31 | 1990-08-10 | Sony Corp | 化合物半導体装置 |
JP2553760B2 (ja) * | 1990-11-16 | 1996-11-13 | 住友電気工業株式会社 | 高電子移動度トランジスタ |
US5192987A (en) * | 1991-05-17 | 1993-03-09 | Apa Optics, Inc. | High electron mobility transistor with GaN/Alx Ga1-x N heterojunctions |
JPH10335637A (ja) | 1997-05-30 | 1998-12-18 | Sony Corp | ヘテロ接合電界効果トランジスタ |
WO2000065663A1 (fr) | 1999-04-26 | 2000-11-02 | Kansai Research Institute | Transistor a heterostructure a effet de champ |
JP3751791B2 (ja) * | 2000-03-28 | 2006-03-01 | 日本電気株式会社 | ヘテロ接合電界効果トランジスタ |
-
2001
- 2001-03-27 JP JP2001090490A patent/JP4220683B2/ja not_active Expired - Fee Related
-
2002
- 2002-01-31 US US10/059,226 patent/US6787820B2/en not_active Expired - Lifetime
- 2002-03-11 CN CNB021070474A patent/CN1240137C/zh not_active Expired - Fee Related
- 2002-03-12 DE DE60222044T patent/DE60222044T2/de not_active Expired - Lifetime
- 2002-03-12 EP EP02005656A patent/EP1246256B1/de not_active Expired - Lifetime
-
2004
- 2004-08-03 US US10/909,425 patent/US20050006664A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP4220683B2 (ja) | 2009-02-04 |
EP1246256B1 (de) | 2007-08-29 |
US20050006664A1 (en) | 2005-01-13 |
EP1246256A2 (de) | 2002-10-02 |
CN1240137C (zh) | 2006-02-01 |
US6787820B2 (en) | 2004-09-07 |
JP2002289837A (ja) | 2002-10-04 |
DE60222044T2 (de) | 2007-12-13 |
EP1246256A3 (de) | 2004-05-26 |
CN1377092A (zh) | 2002-10-30 |
US20020139995A1 (en) | 2002-10-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: PANASONIC CORP., KADOMA, OSAKA, JP |