DE60218652D1 - Substrattransportbehälter - Google Patents
SubstrattransportbehälterInfo
- Publication number
- DE60218652D1 DE60218652D1 DE60218652T DE60218652T DE60218652D1 DE 60218652 D1 DE60218652 D1 DE 60218652D1 DE 60218652 T DE60218652 T DE 60218652T DE 60218652 T DE60218652 T DE 60218652T DE 60218652 D1 DE60218652 D1 DE 60218652D1
- Authority
- DE
- Germany
- Prior art keywords
- transport container
- substrate transport
- substrate
- container
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Drying Of Gases (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001148526 | 2001-05-17 | ||
JP2001148526 | 2001-05-17 | ||
PCT/JP2002/004724 WO2002093622A2 (en) | 2001-05-17 | 2002-05-16 | Substrate transport container |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60218652D1 true DE60218652D1 (de) | 2007-04-19 |
DE60218652T2 DE60218652T2 (de) | 2007-11-08 |
Family
ID=18993823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60218652T Expired - Fee Related DE60218652T2 (de) | 2001-05-17 | 2002-05-16 | Substrattransportbehälter |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1388165B1 (de) |
JP (1) | JP4052947B2 (de) |
KR (1) | KR20040002969A (de) |
CN (1) | CN100449682C (de) |
DE (1) | DE60218652T2 (de) |
TW (1) | TW561128B (de) |
WO (1) | WO2002093622A2 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100927923B1 (ko) * | 2001-11-27 | 2009-11-19 | 엔테그리스, 아이엔씨. | 도어에 의해 구현되는 접지 경로를 포함하는 전방 개방웨이퍼 캐리어 |
JP2004210421A (ja) | 2002-12-26 | 2004-07-29 | Semiconductor Energy Lab Co Ltd | 製造システム、並びに処理装置の操作方法 |
JP2005031489A (ja) * | 2003-07-08 | 2005-02-03 | Hoya Corp | マスクブランクス等の収納容器及びマスクブランクスの収納方法並びにマスクブランクス収納体 |
KR20050006085A (ko) | 2003-07-08 | 2005-01-15 | 호야 가부시키가이샤 | 마스크 블랭크 수납용 컨테이너, 마스크 블랭크 수납방법, 및 마스크 블랭크 패키지 |
JP5049342B2 (ja) * | 2006-06-02 | 2012-10-17 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | バリヤー・フルオロポリマー・フィルムをベースとするライナーおよびそれを含むパッケージング |
JP5160541B2 (ja) * | 2006-06-19 | 2013-03-13 | インテグリス・インコーポレーテッド | レチクル保管庫をパージするためのシステム |
US20100025277A1 (en) * | 2006-11-24 | 2010-02-04 | Miraial Co., Ltd. | Thin plate storage transport system and reticle case using the same |
JP2008218012A (ja) * | 2007-02-28 | 2008-09-18 | Toshiba Corp | 燃料電池 |
TWI475627B (zh) | 2007-05-17 | 2015-03-01 | Brooks Automation Inc | 基板運送機、基板處理裝置和系統、於基板處理期間降低基板之微粒污染的方法,及使運送機與處理機結合之方法 |
EP2272088B1 (de) | 2008-03-13 | 2016-12-07 | Entegris, Inc. | Wafer-container mit röhrenförmigen umweltsteuerkomponenten |
JP2011018771A (ja) * | 2009-07-09 | 2011-01-27 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
JP5403555B2 (ja) * | 2010-03-09 | 2014-01-29 | 信越ポリマー株式会社 | 基板収納容器及びその搬送設備 |
KR101708087B1 (ko) * | 2010-04-22 | 2017-02-17 | 신에츠 폴리머 가부시키가이샤 | 기판 수납 용기 |
JP2012069825A (ja) * | 2010-09-24 | 2012-04-05 | Toshiba Corp | 搬送機構、搬送治具及び搬送台車 |
KR102076376B1 (ko) * | 2012-04-04 | 2020-02-11 | 신에츠 폴리머 가부시키가이샤 | 기판 수납 용기 |
JP6131534B2 (ja) * | 2012-06-11 | 2017-05-24 | シンフォニアテクノロジー株式会社 | パージノズルユニット、ロードポート、載置台、ストッカー |
JP6116863B2 (ja) * | 2012-11-12 | 2017-04-19 | 東芝ライフスタイル株式会社 | 食品保存庫 |
JP5888288B2 (ja) * | 2013-06-26 | 2016-03-16 | 株式会社ダイフク | 物品保管設備の検査装置 |
US9607873B2 (en) | 2014-02-07 | 2017-03-28 | Taiwan Semiconductor Manufacturing Company Ltd. | Apparatus and operation method thereof |
KR102299882B1 (ko) * | 2014-11-05 | 2021-09-09 | 세메스 주식회사 | 홈포트, 이를 포함하는 기판 처리 장치 및 정전기 제거 방법 |
US20170271188A1 (en) * | 2014-12-01 | 2017-09-21 | Entegris, Inc. | Substrate container valve assemblies |
TWI688533B (zh) | 2015-05-12 | 2020-03-21 | 美商恩特葛瑞斯股份有限公司 | 被動吸氣匣盒及前開式半導體晶圓容置盒總成 |
JP6772498B2 (ja) | 2016-03-18 | 2020-10-21 | 株式会社Sumco | 基板収納容器 |
JP7226684B2 (ja) * | 2017-01-18 | 2023-02-21 | 信越ポリマー株式会社 | 基板収納容器 |
JP6409898B2 (ja) * | 2017-04-04 | 2018-10-24 | シンフォニアテクノロジー株式会社 | パージノズルユニット、ロードポート、ストッカー |
JP6981049B2 (ja) * | 2017-05-30 | 2021-12-15 | Tdk株式会社 | ロードポート装置及びウエハ搬送容器 |
CN109712906B (zh) * | 2017-10-25 | 2021-05-11 | 长鑫存储技术有限公司 | 具有清洗功能的晶圆存储装置及半导体生产设备 |
US10861692B2 (en) | 2017-10-26 | 2020-12-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Substrate carrier deterioration detection and repair |
CN109994403B (zh) * | 2018-01-03 | 2021-04-23 | 台湾积体电路制造股份有限公司 | 半导体制造设备、气帘装置以及半导体元件的保护方法 |
JP7362920B2 (ja) | 2019-11-08 | 2023-10-17 | インテグリス・インコーポレーテッド | 環境調整物質ホルダ |
JP7181476B2 (ja) * | 2020-10-07 | 2022-12-01 | シンフォニアテクノロジー株式会社 | Efem装置 |
US20220233986A1 (en) * | 2021-01-27 | 2022-07-28 | Vironaire Inc. | High-efficiency particulate air filter assembly |
JPWO2022208602A1 (de) * | 2021-03-29 | 2022-10-06 | ||
CN113363184A (zh) * | 2021-05-28 | 2021-09-07 | 上海华力微电子有限公司 | 半导体加工机台、半导体加工系统及晶圆搬运方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0263379U (de) * | 1988-11-01 | 1990-05-11 | ||
US5042655A (en) * | 1989-09-27 | 1991-08-27 | E. I. Du Pont De Nemours & Co. | Pellicle packaging and handling system |
US5785186A (en) * | 1994-10-11 | 1998-07-28 | Progressive System Technologies, Inc. | Substrate housing and docking system |
JPH1030197A (ja) * | 1996-05-15 | 1998-02-03 | Mitsubishi Electric Corp | 固体高分子電解モジュールおよびその製造方法並びにそれを用いた除湿装置 |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
US5879458A (en) * | 1996-09-13 | 1999-03-09 | Semifab Incorporated | Molecular contamination control system |
JPH1140207A (ja) * | 1997-07-22 | 1999-02-12 | Sanyo Electric Co Ltd | パック電池と充電台 |
US6521007B1 (en) * | 1997-12-03 | 2003-02-18 | Ebara Corporation | Clean box |
JP3916380B2 (ja) * | 1999-07-06 | 2007-05-16 | 株式会社荏原製作所 | 基板搬送容器待機ステーション |
CN1169696C (zh) * | 1999-07-08 | 2004-10-06 | 恩特格里斯公司 | 具有闭锁门的输送组件 |
-
2002
- 2002-05-16 KR KR10-2003-7014988A patent/KR20040002969A/ko not_active Application Discontinuation
- 2002-05-16 JP JP2002590398A patent/JP4052947B2/ja not_active Expired - Fee Related
- 2002-05-16 DE DE60218652T patent/DE60218652T2/de not_active Expired - Fee Related
- 2002-05-16 TW TW091110197A patent/TW561128B/zh not_active IP Right Cessation
- 2002-05-16 WO PCT/JP2002/004724 patent/WO2002093622A2/en active IP Right Grant
- 2002-05-16 CN CNB028100913A patent/CN100449682C/zh not_active Expired - Fee Related
- 2002-05-16 EP EP02769611A patent/EP1388165B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1388165B1 (de) | 2007-03-07 |
CN1630930A (zh) | 2005-06-22 |
EP1388165A2 (de) | 2004-02-11 |
WO2002093622A3 (en) | 2003-05-30 |
WO2002093622A2 (en) | 2002-11-21 |
JP2004531064A (ja) | 2004-10-07 |
CN100449682C (zh) | 2009-01-07 |
TW561128B (en) | 2003-11-11 |
KR20040002969A (ko) | 2004-01-07 |
DE60218652T2 (de) | 2007-11-08 |
JP4052947B2 (ja) | 2008-02-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |