JP5160541B2 - レチクル保管庫をパージするためのシステム - Google Patents
レチクル保管庫をパージするためのシステム Download PDFInfo
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- JP5160541B2 JP5160541B2 JP2009516565A JP2009516565A JP5160541B2 JP 5160541 B2 JP5160541 B2 JP 5160541B2 JP 2009516565 A JP2009516565 A JP 2009516565A JP 2009516565 A JP2009516565 A JP 2009516565A JP 5160541 B2 JP5160541 B2 JP 5160541B2
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- reticle
- purge
- pod
- reticle pod
- container
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Images
Classifications
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- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
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Description
一実施形態においては、図1Aおよび1Bにおけるドア部分4の上側周辺部が、入口ポート5.0および抽出器ポート5.1を備えるように構成することができる。入口ポート5.0および抽出器ポート5.1は、ドア部分4の上面と下面との間を通って、その側壁12に略平行な方向に延びている。また入口ポートおよび抽出器ポートは、入口接続具26および抽出器接続具27を同軸に受け入れるように構成することもできる。本発明では、これらの接続具およびポートに関して他の接続手段も企図されている。たとえば、入口接続具を本発明のシステムのパージ・ラインに対して着脱可能に連結することができる。また抽出器接続具も、パージ排気システムに付随させることができるパージ除去ラインに対して着脱可能に連結することができる。入口接続具および抽出器接続具に、一方向の流れを可能にするように構成される逆止弁を設けることもできる。本発明のシステムがレチクル・ポッドをパージしていないときに、逆止弁によって、密閉空間8内への汚染物質の出入りが防止される。
好ましくは、保管庫ハウジングは、保管庫ハウジングの内部全体にわたってパージ・ガスを一様に循環させることができる。パージ・ガス、たとえばCDAまたは超CDAを保管ユニットの全体にわたって一様に循環させることによって、レチクル・ポッドおよびポッド内のレチクルが暴露される潜在的な汚染物質の量を最小限に抑えることができる。図8Aは、本発明のシステムのための例示的な保管庫ハウジングを示す。図示するように、保管庫ハウジング78は、複数の棚80に付随する複数のレチクル保管容器を備える。一実施形態においては、パージ・システムを保管庫ハウジングに付随させることができる。例示的なパージ・システムは、複数のパージ・ラインを備えることができる。図8Aのパージ・ライン82は、保管庫ハウジングの両方のバンクに沿ってレチクル・ポッド84にパージ・ガス源を供給する。パージ・ガス源は、レチクル・ポッドまたはレチクルから汚染物質を除去するためにCDAまたは超CDAの供給源を含むことができる。
Claims (20)
- 密閉された内部環境を画定する保管庫ハウジングと、
レチクルをそれぞれ収容している、保管庫ハウジング内で使用するための複数の閉じられたレチクル・ポッドと、
パージ・ガス源に連通するガス送出システムと
を備え、
保管庫ハウジングは、密閉された内部環境内に複数のレチクル保管容器を備え、
各レチクル保管容器は複数の閉じられたレチクル・ポッドのうちの1つを受け入れるための棚として構成され、各棚は、上面と、上面側において上方に配向されたパージ出口とを有し、各レチクル・ポッドは、レチクルを保持するための構造を有するエンクロージャを備え、レチクル・ポッドはドアおよびシェルを有し、シェルは、底面開口と、底面開口においてシェルとシール係合しているドアとを有し、各レチクル・ポッドはドアのラッチ係合を解除することによって開放可能であり、ドアはパージ入口、および下方を向くパージ出口を有し、
各レチクル保管容器は、ガス送出システムに接続されるパージ出口であって、複数のレチクル・ポッドのうちの1つのパージ入口に対して、閉じられたレチクル・ポッドが保管容器上にあるときに、前記保管容器の所定の位置において接続するためのパージ出口を有し、
レチクル・ポッドが保管容器上に配置されている間、保管容器に配置された閉じられたレチクル・ポッドのパージ出口から空所を通って保管庫ハウジングの密閉された内部環境への排気を可能にするために、各レチクル保管容器は、レチクル・ポッドのパージ出口の下に位置する空所を棚に有する、レチクル・ハンドリング・システム。 - 密閉された内部環境には空気が含まれ、ガス送出システムは、少なくとも清浄乾燥空気である空気を送出する、請求項1に記載のレチクル・ハンドリング・システム。
- 各レチクル・ポッドは、少なくとも清浄乾燥空気である空気に暴露されるときに再生されるとともにパージ出口に位置する水分吸収フィルタを内部に有する、請求項2に記載のレチクル・ハンドリング・システム。
- 各レチクル・ポッドは、個々のレチクル・ポッドのパージ出口に配置される水分吸収フィルタを有し、レチクル・ポッドのパージ出口を出る清浄乾燥空気はすべて水分吸収フィルタを通って排出される、請求項3に記載のレチクル・ハンドリング・システム。
- 複数のレチクル保管容器はそれぞれ、上面と、上面において上方に配向されたパージ出口とを有する棚として構成される、請求項1に記載のレチクル・ハンドリング・システム。
- 複数のレチクル・ポッドのそれぞれに設けられるパージ出口の形状が矩形であり、各空所の形状は各レチクル・ポッドのパージ出口の形状に対応する、請求項5に記載のレチクル・ハンドリング・システム。
- 複数のレチクル保管容器は垂直軸を中心に旋回可能である、請求項5に記載のレチクル・ハンドリング・システム。
- レチクル・ポッドをレチクル保管容器上に配置し、またそこから取り出すために個別に把持するためのロボット・グリッピング・デバイスをさらに備え、ロボット・グリッピング・デバイスは、レチクル保管容器におけるパージ流を確認するための空気流センサをさらに備える、請求項1に記載のレチクル・ハンドリング・システム。
- 空気流センサは、レチクル保管容器上にレチクル・ポッドが配置される前にレチクル保管容器パージ出口から出る内部環境内の空気流を検出するために配置される、請求項8に記載のレチクル・ハンドリング・システム。
- 密閉された内部環境を画定する保管庫ハウジングと、
パージ・ガス源に連通可能なガス送出システムと、
密閉された内部環境内に複数のレチクル保管容器を備える保管庫ハウジングであって、各レチクル保管容器はレチクル・ポッドを受け入れるように構成され、各レチクル・ポッドはパージ入口とパージ出口とを有し、各レチクル保管容器は、ガス送出システムに接続されるパージ出口であって、前記保管容器の所定の位置においてレチクルのパージ入口に接続するためのパージ出口を有する、保管庫ハウジングと、
レチクル・ポッドを、レチクル保管容器上に配置し、またそこから取り出すために個別に把持するためのロボット・グリッピング・デバイスであって、ロボット・グリッピング・デバイスは、レチクル保管容器において内部環境内のパージ流を確認するための、内部環境において移動可能な空気流センサをさらに備える、ロボット・グリッピング・デバイスと
を備えるレチクル・ハンドリング・システム。 - 各レチクル保管容器は、レチクル・ポッドがレチクル保管容器上に配置される位置よりも下方に、保管庫ハウジングの密閉された内部環境へのパージ出口の排気を可能にするための空所を有する、請求項10に記載のレチクル・ハンドリング・システム。
- 複数のレチクル上の低湿度環境を維持するための方法であって、
使用中でないとき、または処理ツールもしくは検査ツール内にない場合に、複数のレチクル・ポッド内にレチクルを保管するステップであって、レチクル・ポッドは各々、パージ入口と、下方を向くパージ出口と、湿分ゲッタと、シェルと、レチクル・ポッドを閉じるために密閉可能にシェルにラッチ掛けされたドアを有し、湿分ゲッタは、レチクル・ポッドを清浄乾燥空気を用いてパージするときに再生可能である、ステップと、
レチクルを収容している閉じられたレチクル・ポッドをレチクル・ポッド・ストッカ内に保管するステップであって、レチクル・ポッド・ストッカは、開放された内部と、複数のレチクル・ポッド容器を有し、複数のレチクル・ポッド容器はそれぞれ内部にレチクルを収容している閉じられたレチクル・ポッドを受け入れるための棚として形成され、同棚は空所を有する、ステップと、
レチクル・ポッドがレチクル・ポッド・ストッカ内にあるときに、少なくとも清浄乾燥空気を用いてレチクルを収容している閉じられたレチクル・ポッドをほとんど常にパージするステップであって、同ステップは、各閉じられたレチクル・ポッド用の各容器において、個々の閉鎖されたレチクル・ポッドのすぐ上に配置された複数のラインからの、個々の閉じられたレチクル・ポッドの外部に向けられて該外部に作用し、それにより閉じられたレチクル・ポッドを清浄乾燥空気で洗浄する清浄乾燥空気の個別の第1の流れと、各レチクル・ポッドの内部への清浄乾燥空気の第2の流れとを生成し、第2の流れは、閉じられた各レチクル・ポッドのパージ出口から出て、同パージ出口の下に位置する棚の空所を通ってレチクル・ポッド・ストッカ内に排気される、ステップと
を含む方法。 - 各レチクルが閉じられたレチクル・ポッドのうちの1つの内部にないときにレチクルを密閉エンクロージャ内に維持し、各レチクルがこのような密閉エンクロージャ内にあって閉じられたレチクル・ポッド内にないときに、清浄乾燥空気を用いてレチクルをほとんど常に洗浄するステップをさらに含む、請求項12に記載の方法。
- 内部にレチクルを収容している閉じられた各レチクル・ポッドがレチクル・ポッド・ストッカ内にあるときに、少なくともCDAを用いてレチクルを収容している閉じられた各レチクル・ポッドを実質的に常にパージするステップをさらに含む、請求項12に記載の方法。
- ゲッタは、閉じられた各レチクル・ポッドのパージ出口に配置されるフィルタを含む、請求項12に記載の方法。
- レチクル・ポッド・ストッカは複数のレチクル保管容器を有し、保管容器はそれぞれ、保管容器上に配置される閉じられたレチクル・ポッドのうちの1つに接続するためのパージ出口を有し、ロボット・グリッパは、保管容器上に配置して、またこれから取り外すために個別に各レチクル・ポッドを掴み、グリッピング・デバイスは、開放された内部において動くことができる、開放された内部における空気流を検知するための空気流センサを有し、前記方法はさらに、開放された内部にあるレチクル保管容器における清浄乾燥空気の流れを検知するステップを含む、請求項12に記載の方法。
- 複数のレチクル保管容器を有するレチクル・ポッド・ストッカ内の流れを確認するための方法であって、複数のレチクル保管容器は、保管容器上に配置されるレチクル・ポッドに接続するための対応するパージ出口を有し、前記方法は、空気流を測定することができる空気流センサを有するレチクル・ポッド・ロボット・グリッパを、開放された内部における空気流を確認するためにパージ出口のうちの1つの近くに配置するステップを含む方法。
- レチクル・ポッド・ストッカであって、
密閉された内部環境を画定する密閉されたハウジングと、
レチクル・ポッド・ストッカに接続された少なくとも清浄乾燥空気の供給源と、
内部にレチクルを収容している閉じられたレチクル・ポッドを各々受け入れるための複数の容器であって、各容器は、上方に延びる開口したパージ出口を有し、各パージ出口は少なくとも清浄乾燥空気の供給源に接続され、それによってパージ流が各開口したパージ出口において上方に排出され、各容器はさらに、容器の1つに配置されるとともにレチクルを収容している閉じられたレチクル・ポッドの1つの外面に個別に作用するために、各容器において下方に排気するパージラインを有する、容器とを備え、
容器は空所を有する棚として構成され、
各レチクル・ポッドはパージ入口、および下方を向くパージ出口を有し、
各容器は、容器上に配置されたパージ可能な閉じられたレチクル・ポッド上のパージ入口と係合する開放されたパージ出口を有し、パージ可能な閉じられたレチクル・ポッドを受け入れるように構成され、
閉じられたレチクル・ポッドが容器上に配置されているときには、対応する容器のパージ出口からレチクル・ポッド内にパージ流が注入され、レチクル・ポッドのパージ出口から出たパージ流が同パージ出口の下に位置する棚の空所を通ってハウジング内の密閉された内部環境内に排気され、閉じられたレチクル・ポッドが容器上に配置されていないときには、容器のパージ出口からパージ流がハウジングの密閉された内部環境内に出る、レチクル・ポッド・ストッカ。 - レチクル・ポッドを容器に配置して、また容器から取り出すためのロボット・グリッパをさらに備え、ロボット・グリッパは、個々の容器における開放された内部の空気流を確認するために、開放された内部を移動可能であり、かつ開放された内部の複数の位置において空気流を測定することができる空気流センサを備える、請求項18に記載のレチクル・ポッド・ストッカ。
- 各容器は一対のパージ出口を有し、各パージ出口は容器内の空所の反対側にあり、閉じられたレチクル・ポッドは2つのパージ入口の中間に位置する出口フィルタを有し、少なくとも清浄乾燥空気流をレチクル・ポッド内に注入するために、2つのパージ入口は2つのパージ出口と係合し、少なくとも清浄乾燥空気流は、容器内の空所においてレチクル・ポッドからストッカの密閉された内部環境へと排出される、請求項18に記載のレチクル・ポッド・ストッカ。
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- 2007-06-19 WO PCT/US2007/014428 patent/WO2007149513A2/en active Application Filing
- 2007-06-19 EP EP07809746A patent/EP2035320A4/en not_active Withdrawn
- 2007-06-19 CN CN200780030581.1A patent/CN101506087B/zh active Active
- 2007-06-19 EP EP12000081.5A patent/EP2453310B1/en active Active
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- 2007-06-19 US US12/305,895 patent/US8776841B2/en active Active
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EP2035320A4 (en) | 2010-07-28 |
TW200817252A (en) | 2008-04-16 |
CN101506087B (zh) | 2011-09-21 |
CN101506087A (zh) | 2009-08-12 |
WO2007149513A2 (en) | 2007-12-27 |
EP2453310B1 (en) | 2015-12-09 |
EP2453310A2 (en) | 2012-05-16 |
EP2035320A2 (en) | 2009-03-18 |
JP2009541998A (ja) | 2009-11-26 |
KR20090053890A (ko) | 2009-05-28 |
TWI404662B (zh) | 2013-08-11 |
WO2007149513A9 (en) | 2008-02-14 |
WO2007149513A3 (en) | 2008-11-13 |
KR101474572B1 (ko) | 2014-12-18 |
WO2007149513A4 (en) | 2009-01-08 |
US20100294397A1 (en) | 2010-11-25 |
US8776841B2 (en) | 2014-07-15 |
EP2453310A3 (en) | 2014-09-17 |
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