SG11201601675RA - Substrate containment with enhanced solid getter - Google Patents
Substrate containment with enhanced solid getterInfo
- Publication number
- SG11201601675RA SG11201601675RA SG11201601675RA SG11201601675RA SG11201601675RA SG 11201601675R A SG11201601675R A SG 11201601675RA SG 11201601675R A SG11201601675R A SG 11201601675RA SG 11201601675R A SG11201601675R A SG 11201601675RA SG 11201601675R A SG11201601675R A SG 11201601675RA
- Authority
- SG
- Singapore
- Prior art keywords
- enhanced solid
- solid getter
- substrate containment
- containment
- substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
- H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67389—Closed carriers characterised by atmosphere control
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361874697P | 2013-09-06 | 2013-09-06 | |
| PCT/US2014/054399 WO2015035240A1 (en) | 2013-09-06 | 2014-09-05 | Substrate containment with enhanced solid getter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201601675RA true SG11201601675RA (en) | 2016-04-28 |
Family
ID=52628982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201601675RA SG11201601675RA (en) | 2013-09-06 | 2014-09-05 | Substrate containment with enhanced solid getter |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20160204012A1 (en) |
| EP (1) | EP3042392A4 (en) |
| JP (1) | JP2016536800A (en) |
| KR (1) | KR20160052645A (en) |
| CN (1) | CN105637627A (en) |
| SG (1) | SG11201601675RA (en) |
| TW (1) | TW201518190A (en) |
| WO (1) | WO2015035240A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207046088U (en) * | 2017-06-27 | 2018-02-27 | 合肥京东方显示技术有限公司 | A kind of panel case and device |
| US10910204B2 (en) * | 2017-07-18 | 2021-02-02 | Applied Materials Israel Ltd. | Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber |
| US10217621B2 (en) * | 2017-07-18 | 2019-02-26 | Applied Materials Israel Ltd. | Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber |
| TW202039650A (en) | 2019-03-27 | 2020-11-01 | 日商倉敷紡績股份有限公司 | Fiber-reinforced resin complex, and method for producing fiber-reinforced resin complex |
| US11651982B2 (en) * | 2019-10-11 | 2023-05-16 | Winbond Electronics Corp. | Drying block structure and storage device |
| CN111041257A (en) * | 2019-12-27 | 2020-04-21 | 上海晶维材料科技有限公司 | Preparation method of air suction material with surface high-flux air distribution system |
| CN115501724B (en) * | 2022-10-12 | 2023-10-03 | 新疆四方实业股份有限公司 | Multistage processing apparatus of industry flue gas |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5346518A (en) * | 1993-03-23 | 1994-09-13 | International Business Machines Corporation | Vapor drain system |
| US6284020B1 (en) * | 1997-12-02 | 2001-09-04 | Kabushiki Kaisha Toshiba | Method of maintaining cleanliness of substrates and box for accommodating substrates |
| JP4292361B2 (en) * | 2002-03-14 | 2009-07-08 | 日本ゼオン株式会社 | Precision substrate protective film |
| US20050238803A1 (en) * | 2003-11-12 | 2005-10-27 | Tremel James D | Method for adhering getter material to a surface for use in electronic devices |
| DE102004063912B4 (en) * | 2004-04-22 | 2007-09-20 | Siltronic Ag | Method for ready-to-ship packaging of semiconductor wafers |
| JP3850852B2 (en) * | 2004-10-05 | 2006-11-29 | 俊郎 藤原 | Substrate transport container |
| CN2770087Y (en) * | 2004-12-23 | 2006-04-05 | 陈雅柔 | Device with gas adsorbing function |
| US7789949B2 (en) * | 2005-11-23 | 2010-09-07 | Integrated Sensing Systems, Inc. | Getter device |
| CN101506087B (en) * | 2006-06-19 | 2011-09-21 | 诚实公司 | System for purging reticle storage |
| TWI466807B (en) * | 2008-03-13 | 2015-01-01 | Entegris Inc | Wafer container with tubular environmental control components |
| JP2011018771A (en) * | 2009-07-09 | 2011-01-27 | Shin Etsu Polymer Co Ltd | Substrate-storing container |
| JP2011162237A (en) * | 2010-02-10 | 2011-08-25 | Sk Electronics:Kk | Portable container |
| KR101588490B1 (en) * | 2011-11-16 | 2016-01-26 | (주)엘지하우시스 | Vacuum glass panel with pillar having getter function and method of manufacturing the same |
-
2014
- 2014-09-05 KR KR1020167008678A patent/KR20160052645A/en not_active Application Discontinuation
- 2014-09-05 CN CN201480049236.2A patent/CN105637627A/en active Pending
- 2014-09-05 EP EP14842511.9A patent/EP3042392A4/en not_active Withdrawn
- 2014-09-05 SG SG11201601675RA patent/SG11201601675RA/en unknown
- 2014-09-05 WO PCT/US2014/054399 patent/WO2015035240A1/en active Application Filing
- 2014-09-05 JP JP2016540441A patent/JP2016536800A/en active Pending
- 2014-09-05 US US14/917,234 patent/US20160204012A1/en not_active Abandoned
- 2014-09-09 TW TW103130978A patent/TW201518190A/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN105637627A (en) | 2016-06-01 |
| EP3042392A1 (en) | 2016-07-13 |
| US20160204012A1 (en) | 2016-07-14 |
| TW201518190A (en) | 2015-05-16 |
| EP3042392A4 (en) | 2017-08-23 |
| JP2016536800A (en) | 2016-11-24 |
| KR20160052645A (en) | 2016-05-12 |
| WO2015035240A1 (en) | 2015-03-12 |
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