DE60037480D1 - Substrat-Transportbehälter - Google Patents

Substrat-Transportbehälter

Info

Publication number
DE60037480D1
DE60037480D1 DE60037480T DE60037480T DE60037480D1 DE 60037480 D1 DE60037480 D1 DE 60037480D1 DE 60037480 T DE60037480 T DE 60037480T DE 60037480 T DE60037480 T DE 60037480T DE 60037480 D1 DE60037480 D1 DE 60037480D1
Authority
DE
Germany
Prior art keywords
transport container
substrate transport
substrate
container
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60037480T
Other languages
English (en)
Other versions
DE60037480T2 (de
Inventor
Akira Tanaka
Kazuo Okubo
Yoko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE60037480D1 publication Critical patent/DE60037480D1/de
Application granted granted Critical
Publication of DE60037480T2 publication Critical patent/DE60037480T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ventilation (AREA)
  • Non-Mechanical Conveyors (AREA)
DE60037480T 1999-07-06 2000-07-05 Substrat-Transportbehälter Expired - Fee Related DE60037480T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP19232299 1999-07-06
JP19232299 1999-07-06
JP2000199520 2000-06-30
JP2000199520A JP3916380B2 (ja) 1999-07-06 2000-06-30 基板搬送容器待機ステーション

Publications (2)

Publication Number Publication Date
DE60037480D1 true DE60037480D1 (de) 2008-01-31
DE60037480T2 DE60037480T2 (de) 2008-12-11

Family

ID=26507252

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60037480T Expired - Fee Related DE60037480T2 (de) 1999-07-06 2000-07-05 Substrat-Transportbehälter

Country Status (6)

Country Link
US (2) US6364922B1 (de)
EP (1) EP1067583B1 (de)
JP (1) JP3916380B2 (de)
KR (1) KR100774018B1 (de)
DE (1) DE60037480T2 (de)
TW (1) TW550220B (de)

Families Citing this family (80)

* Cited by examiner, † Cited by third party
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JP3939101B2 (ja) * 2000-12-04 2007-07-04 株式会社荏原製作所 基板搬送方法および基板搬送容器
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US6875282B2 (en) 2001-05-17 2005-04-05 Ebara Corporation Substrate transport container
CN100449682C (zh) * 2001-05-17 2009-01-07 株式会社荏原制作所 衬底传送容器
US6592318B2 (en) * 2001-07-13 2003-07-15 Asm America, Inc. Docking cart with integrated load port
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KR20020089110A (ko) * 2001-09-04 2002-11-29 주식회사 일진엔지니어링 엘시디기판용 트레이
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US7185764B2 (en) * 2002-06-24 2007-03-06 Macronix International Co., Ltd. Wafer shipping device and storage method for preventing fluoridation in bonding pads
JP4326784B2 (ja) * 2002-11-11 2009-09-09 株式会社半導体エネルギー研究所 生産システム
US6835233B2 (en) * 2003-02-20 2004-12-28 Taiwan Semiconductor Manufacturing Co., Ltd Method and apparatus for reducing particle contamination
US6899145B2 (en) * 2003-03-20 2005-05-31 Asm America, Inc. Front opening unified pod
US7189291B2 (en) 2003-06-02 2007-03-13 Entegris, Inc. Method for the removal of airborne molecular contaminants using oxygen gas mixtures
KR20050006085A (ko) 2003-07-08 2005-01-15 호야 가부시키가이샤 마스크 블랭크 수납용 컨테이너, 마스크 블랭크 수납방법, 및 마스크 블랭크 패키지
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WO2005078771A2 (en) * 2004-02-05 2005-08-25 Entegris Inc. Purging of a wafer conveyance container
TWI247974B (en) * 2004-03-11 2006-01-21 Gudeng Prec Ind Co Ltd Optical mask positioning device
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US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
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US20070084406A1 (en) * 2005-10-13 2007-04-19 Joseph Yudovsky Reaction chamber with opposing pockets for gas injection and exhaust
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KR100746684B1 (ko) 2006-06-13 2007-08-21 성화기술산업 주식회사 음식물 배달박스
KR101395467B1 (ko) * 2006-06-13 2014-05-14 엔테그리스, 아이엔씨. 재사용이 가능한 웨이퍼 용기용 탄성 쿠션
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JP4853178B2 (ja) * 2006-08-24 2012-01-11 大日本印刷株式会社 収納ケースの洗浄方法
JP4807579B2 (ja) * 2006-09-13 2011-11-02 株式会社ダイフク 基板収納設備及び基板処理設備
JP4953010B2 (ja) * 2006-09-13 2012-06-13 株式会社ダイフク 基板収納用の収納容器
JP4756372B2 (ja) * 2006-09-13 2011-08-24 株式会社ダイフク 基板処理方法
JP4670808B2 (ja) * 2006-12-22 2011-04-13 ムラテックオートメーション株式会社 コンテナの搬送システム及び測定用コンテナ
WO2009009780A2 (en) * 2007-07-12 2009-01-15 Asyst Technologies, Inc. Method and apparatus for providing flat panel display environmental isolation
JP2009087972A (ja) * 2007-09-27 2009-04-23 Tokyo Electron Ltd 基板収容機構及び半導体製造装置
US8366371B2 (en) * 2007-11-30 2013-02-05 Sacket Material Handling Systems, Inc. Industrial battery charging, storage and handling system
KR101687836B1 (ko) * 2008-03-13 2016-12-19 엔테그리스, 아이엔씨. 관형 환경 제어 요소를 갖는 웨이퍼 용기
US8827695B2 (en) * 2008-06-23 2014-09-09 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer's ambiance control
US7971722B2 (en) * 2008-08-08 2011-07-05 Gudeng Precision Industral Co, Ltd Wafer container with restrainer
US8387799B2 (en) * 2008-08-27 2013-03-05 Gudeng Precision Industrial Co, Ltd. Wafer container with purgeable supporting module
US8413814B2 (en) * 2008-08-27 2013-04-09 Gudeng Precision Industrial Co, Ltd Front opening unified pod disposed with purgeable supporting module
US8413815B2 (en) * 2008-08-27 2013-04-09 Gudeng Precision Industrial Co, Ltd Wafer container with at least one purgeable supporting module having a long slot
US7947100B1 (en) * 2009-12-15 2011-05-24 Gast Manufacturing, Inc. Combination vertical rotary vane suction pump and liquid separator
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CN104221136B (zh) * 2012-04-16 2017-05-31 日商乐华股份有限公司 收纳容器、收纳容器的开闭器开闭单元、及使用它们的晶圆储料器
KR102164544B1 (ko) * 2014-01-22 2020-10-12 삼성전자 주식회사 가스 충진부를 구비하는 웨이퍼 스토리지 장치를 포함하는 반도체 제조 장치
JP6217977B2 (ja) * 2014-02-27 2017-10-25 Tdk株式会社 ポッド、及び該ポッドを用いたパージシステム
WO2016205159A1 (en) * 2015-06-15 2016-12-22 Entegris, Inc. Wafer carrier having a door with a unitary body
JP6450653B2 (ja) 2015-06-24 2019-01-09 東京エレクトロン株式会社 格納ユニット、搬送装置、及び、基板処理システム
CN107284856A (zh) * 2016-04-11 2017-10-24 深圳市辰中科技有限公司 用于精密生产的环境保持系统及方法
US10790177B2 (en) * 2017-11-14 2020-09-29 Taiwan Semiconductor Manufacturing Co., Ltd. Systems, devices, and methods for using a real time environment sensor in a FOUP
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JP7234527B2 (ja) * 2018-07-30 2023-03-08 Tdk株式会社 センサー内蔵フィルタ構造体及びウエハ収容容器
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CN109212703B (zh) * 2018-11-06 2023-04-18 中国工程物理研究院激光聚变研究中心 用于光学元件离线精密装校的自洁净型自动化夹具库
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Also Published As

Publication number Publication date
EP1067583A2 (de) 2001-01-10
DE60037480T2 (de) 2008-12-11
US20020129707A1 (en) 2002-09-19
KR20010015207A (ko) 2001-02-26
EP1067583B1 (de) 2007-12-19
KR100774018B1 (ko) 2007-11-08
JP3916380B2 (ja) 2007-05-16
US6770109B2 (en) 2004-08-03
JP2001077188A (ja) 2001-03-23
EP1067583A3 (de) 2006-01-25
TW550220B (en) 2003-09-01
US6364922B1 (en) 2002-04-02

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