DE60215408T2 - Verfahren zum Herstellen von Trialkyl-Metallverbindungen der Gruppe Va - Google Patents

Verfahren zum Herstellen von Trialkyl-Metallverbindungen der Gruppe Va Download PDF

Info

Publication number
DE60215408T2
DE60215408T2 DE60215408T DE60215408T DE60215408T2 DE 60215408 T2 DE60215408 T2 DE 60215408T2 DE 60215408 T DE60215408 T DE 60215408T DE 60215408 T DE60215408 T DE 60215408T DE 60215408 T2 DE60215408 T2 DE 60215408T2
Authority
DE
Germany
Prior art keywords
group
metal
compounds
trialkyl
trihalide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60215408T
Other languages
German (de)
English (en)
Other versions
DE60215408D1 (de
Inventor
Deodatta V. Danvers Shenai-khatkhate
Michael B. Newburyport Power
Artashes Wakefield Amamchyan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
DuPont Electronic Materials International LLC
Original Assignee
Shipley Co Inc
Shipley Co LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shipley Co Inc, Shipley Co LLC filed Critical Shipley Co Inc
Application granted granted Critical
Publication of DE60215408D1 publication Critical patent/DE60215408D1/de
Publication of DE60215408T2 publication Critical patent/DE60215408T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/94—Bismuth compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/66—Arsenic compounds
    • C07F9/70—Organo-arsenic compounds
    • C07F9/72—Aliphatic compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/90—Antimony compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
DE60215408T 2001-04-06 2002-04-05 Verfahren zum Herstellen von Trialkyl-Metallverbindungen der Gruppe Va Expired - Fee Related DE60215408T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28197701P 2001-04-06 2001-04-06
US281977P 2001-04-06

Publications (2)

Publication Number Publication Date
DE60215408D1 DE60215408D1 (de) 2006-11-30
DE60215408T2 true DE60215408T2 (de) 2007-08-30

Family

ID=23079564

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60215408T Expired - Fee Related DE60215408T2 (de) 2001-04-06 2002-04-05 Verfahren zum Herstellen von Trialkyl-Metallverbindungen der Gruppe Va

Country Status (7)

Country Link
US (1) US6660874B2 (enExample)
EP (1) EP1247813B1 (enExample)
JP (1) JP2003064090A (enExample)
KR (1) KR100852361B1 (enExample)
CN (1) CN1259326C (enExample)
DE (1) DE60215408T2 (enExample)
TW (1) TWI239334B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3587430A1 (de) * 2018-06-26 2020-01-01 LANXESS Organometallics GmbH Herstellung von trialkylpnictogen

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6787181B2 (en) * 2001-10-26 2004-09-07 Symetrix Corporation Chemical vapor deposition method of making layered superlattice materials using trimethylbismuth
US6956127B2 (en) * 2002-01-17 2005-10-18 Shipley Company, L.L.C. Alkyl group VA metal compounds
US20030171879A1 (en) * 2002-03-08 2003-09-11 Pittalwala Shabbir H. System and method to accomplish pipeline reliability
US6939983B2 (en) * 2003-05-08 2005-09-06 Rohm And Haas Electronic Materials, Llc Alkyl group VA metal compounds
TW200619222A (en) * 2004-09-02 2006-06-16 Rohm & Haas Elect Mat Method for making organometallic compounds
TWI632151B (zh) * 2011-11-28 2018-08-11 烏明克股份有限兩合公司 第iiia族金屬的三烷基化合物之製法
WO2014093419A1 (en) 2012-12-12 2014-06-19 Dow Global Technologies Llc Production of tri-alkyl compounds of group 3a metals
JP2015082573A (ja) * 2013-10-22 2015-04-27 住友電気工業株式会社 エピタキシャルウエハおよびその製造方法
CN106349293B (zh) * 2016-08-27 2018-07-06 广东先导稀材股份有限公司 高纯三乙基锑的制备方法
CN110950911B (zh) * 2018-09-26 2021-10-08 紫石能源有限公司 三甲基胂的制备方法
CN110483580B (zh) * 2019-09-06 2022-04-19 广东先导微电子科技有限公司 一种高纯度三烷基锑及其制备方法与应用
CN113583051B (zh) * 2021-08-03 2022-09-02 安徽亚格盛电子新材料有限公司 利用三甲基铝和三氯化锑制备高纯度三甲基锑的方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103526A (en) * 1963-09-10 Preparation of alkyl compounds of
GB974056A (enExample) * 1961-11-16 1900-01-01
JP2561482B2 (ja) 1987-08-27 1996-12-11 住友化学工業株式会社 トリアルキル砒素化合物の製造方法
US4857655A (en) * 1988-01-20 1989-08-15 American Cyanamid Company Process for making alkyl arsine compounds
DE4214224A1 (de) * 1992-04-30 1993-11-04 Merck Patent Gmbh Verwendung von elementorganischen verbindungen zur abscheidung des elementes auf substraten
US5326425A (en) * 1993-01-28 1994-07-05 The United States Of America As Represented By The Secretary Of The Navy Preparation of tertiarybutyldimethylantimony and use thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3587430A1 (de) * 2018-06-26 2020-01-01 LANXESS Organometallics GmbH Herstellung von trialkylpnictogen

Also Published As

Publication number Publication date
TWI239334B (en) 2005-09-11
JP2003064090A (ja) 2003-03-05
CN1259326C (zh) 2006-06-14
US6660874B2 (en) 2003-12-09
EP1247813A2 (en) 2002-10-09
KR100852361B1 (ko) 2008-08-14
EP1247813A3 (en) 2003-12-17
CN1400214A (zh) 2003-03-05
EP1247813B1 (en) 2006-10-18
DE60215408D1 (de) 2006-11-30
US20020188145A1 (en) 2002-12-12
KR20020077654A (ko) 2002-10-12

Similar Documents

Publication Publication Date Title
DE60215408T2 (de) Verfahren zum Herstellen von Trialkyl-Metallverbindungen der Gruppe Va
EP0260534B1 (de) Metallorganische Verbindungen
EP0432574B1 (de) Heterocyclische metallorganische Verbindungen
EP0325651B1 (de) Cyclische oder bicyclische aluminium-, gallium-, oder indium-organische verbindungen und ihre verwendung zur gasphasenabscheidung des metalls auf substraten
DE60301152T2 (de) Organoindiumverbindungen zur Verwendung in der chemischen Dampfphasenabscheidung
DE602004004943T2 (de) Reinigung von Metallkohlenwasserstoff
DE3742525C2 (de) Verfahren zur Herstellung von Metallalkylverbindungen und deren Verwendung
DE69310363T2 (de) Verfahren zur herstellung von trialkylverbindungen von metallen der gruppe 3a
EP0650973A1 (de) Racemische Metallocenkomplexe und Verfahren zu ihrer Herstellung
DE69421249T2 (de) Verfahren zur Entfernung von Sauerstoff-enthaltenden Verunreinigungen aus Organo-Gallium oder -Indium Verbindungen
EP3630781B1 (de) Herstellung von trialkylindiumverbindungen in gegenwart von carboxylaten
DE2816748A1 (de) Verfahren zur gleichzeitigen herstellung von dimethylaluminiumchlorid und alkylaluminiumchloriden
EP3587430B1 (de) Herstellung von trialkylpnictogen
DE1061302B (de) Verfahren zur Herstellung von Wasserstoffverbindungen der Elemente der IV. und V. Gruppe des Periodischen Systems
US5380895A (en) Method for the synthesis of metal alkyls and metal aryls
DE4214224C2 (enExample)
EP3116883A1 (de) Verfahren zur herstellung von trialkylgallium-verbindungen und deren verwendung
DE69011115T2 (de) Verfahren zur herstellung von organo-tellur- und -selenverbindungen.
EP0507129A1 (de) Metallorganische Verbindungen
DE3612629A1 (de) Verfahren zur herstellung von trimethylphosphin
EP0299171A2 (de) Alkoholfreie Orthoester des Zirkoniums und Hafniums und Verfahren zu deren Herstellung
DE1169447B (de) Verfahren zur Herstellung von Berylliumdiaethyl
US20030199704A1 (en) Alkyl group VA metal compounds
EP1170298A1 (de) Polyfluoralkylsilane
DE102012013941A1 (de) Verfahren zur Herstellung von Galliumtrialkylverbindungen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee