KR100852361B1 - 트리알킬 ｖａ족 금속 화합물 - Google Patents

트리알킬 ｖａ족 금속 화합물 Download PDF

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Publication number
KR100852361B1
KR100852361B1 KR1020020018149A KR20020018149A KR100852361B1 KR 100852361 B1 KR100852361 B1 KR 100852361B1 KR 1020020018149 A KR1020020018149 A KR 1020020018149A KR 20020018149 A KR20020018149 A KR 20020018149A KR 100852361 B1 KR100852361 B1 KR 100852361B1
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South Korea
Prior art keywords
group
metal
compound
alkyl
compounds
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KR1020020018149A
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English (en)
Korean (ko)
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KR20020077654A (ko
Inventor
세나이-카트카테데오다타브이.
파워마이클비.
아맘키얀아타쉐스
Original Assignee
롬 앤드 하스 일렉트로닉 머트어리얼즈, 엘.엘.씨
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Publication of KR20020077654A publication Critical patent/KR20020077654A/ko
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    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/94—Bismuth compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/66—Arsenic compounds
    • C07F9/70—Organo-arsenic compounds
    • C07F9/72—Aliphatic compounds
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F9/00—Compounds containing elements of Groups 5 or 15 of the Periodic Table
    • C07F9/90—Antimony compounds
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020020018149A 2001-04-06 2002-04-03 트리알킬 ｖａ족 금속 화합물 Expired - Fee Related KR100852361B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28197701P 2001-04-06 2001-04-06
US60/281,977 2001-04-06

Publications (2)

Publication Number Publication Date
KR20020077654A KR20020077654A (ko) 2002-10-12
KR100852361B1 true KR100852361B1 (ko) 2008-08-14

Family

ID=23079564

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020018149A Expired - Fee Related KR100852361B1 (ko) 2001-04-06 2002-04-03 트리알킬 ｖａ족 금속 화합물

Country Status (7)

Country Link
US (1) US6660874B2 (enExample)
EP (1) EP1247813B1 (enExample)
JP (1) JP2003064090A (enExample)
KR (1) KR100852361B1 (enExample)
CN (1) CN1259326C (enExample)
DE (1) DE60215408T2 (enExample)
TW (1) TWI239334B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6787181B2 (en) * 2001-10-26 2004-09-07 Symetrix Corporation Chemical vapor deposition method of making layered superlattice materials using trimethylbismuth
US6956127B2 (en) * 2002-01-17 2005-10-18 Shipley Company, L.L.C. Alkyl group VA metal compounds
US20030171879A1 (en) * 2002-03-08 2003-09-11 Pittalwala Shabbir H. System and method to accomplish pipeline reliability
US6939983B2 (en) * 2003-05-08 2005-09-06 Rohm And Haas Electronic Materials, Llc Alkyl group VA metal compounds
TW200619222A (en) * 2004-09-02 2006-06-16 Rohm & Haas Elect Mat Method for making organometallic compounds
TWI632149B (zh) * 2011-11-28 2018-08-11 烏明克股份有限兩合公司 第iii a族金屬的三烷基化合物之製法
WO2014093419A1 (en) 2012-12-12 2014-06-19 Dow Global Technologies Llc Production of tri-alkyl compounds of group 3a metals
JP2015082573A (ja) 2013-10-22 2015-04-27 住友電気工業株式会社 エピタキシャルウエハおよびその製造方法
CN106349293B (zh) * 2016-08-27 2018-07-06 广东先导稀材股份有限公司 高纯三乙基锑的制备方法
EP3587430B1 (de) * 2018-06-26 2022-07-13 KE Materials L.L.C. Herstellung von trialkylpnictogen
CN110950911B (zh) * 2018-09-26 2021-10-08 紫石能源有限公司 三甲基胂的制备方法
CN110483580B (zh) * 2019-09-06 2022-04-19 广东先导微电子科技有限公司 一种高纯度三烷基锑及其制备方法与应用
CN113583051B (zh) * 2021-08-03 2022-09-02 安徽亚格盛电子新材料有限公司 利用三甲基铝和三氯化锑制备高纯度三甲基锑的方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4214224A1 (de) * 1992-04-30 1993-11-04 Merck Patent Gmbh Verwendung von elementorganischen verbindungen zur abscheidung des elementes auf substraten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103526A (en) * 1963-09-10 Preparation of alkyl compounds of
GB974056A (enExample) * 1961-11-16 1900-01-01
JP2561482B2 (ja) 1987-08-27 1996-12-11 住友化学工業株式会社 トリアルキル砒素化合物の製造方法
US4857655A (en) * 1988-01-20 1989-08-15 American Cyanamid Company Process for making alkyl arsine compounds
US5326425A (en) * 1993-01-28 1994-07-05 The United States Of America As Represented By The Secretary Of The Navy Preparation of tertiarybutyldimethylantimony and use thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4214224A1 (de) * 1992-04-30 1993-11-04 Merck Patent Gmbh Verwendung von elementorganischen verbindungen zur abscheidung des elementes auf substraten

Also Published As

Publication number Publication date
EP1247813B1 (en) 2006-10-18
EP1247813A2 (en) 2002-10-09
DE60215408T2 (de) 2007-08-30
US20020188145A1 (en) 2002-12-12
US6660874B2 (en) 2003-12-09
TWI239334B (en) 2005-09-11
EP1247813A3 (en) 2003-12-17
CN1400214A (zh) 2003-03-05
DE60215408D1 (de) 2006-11-30
KR20020077654A (ko) 2002-10-12
JP2003064090A (ja) 2003-03-05
CN1259326C (zh) 2006-06-14

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