DE602009000664D1 - Erhitzer für kompakten Chip - Google Patents

Erhitzer für kompakten Chip

Info

Publication number
DE602009000664D1
DE602009000664D1 DE602009000664T DE602009000664T DE602009000664D1 DE 602009000664 D1 DE602009000664 D1 DE 602009000664D1 DE 602009000664 T DE602009000664 T DE 602009000664T DE 602009000664 T DE602009000664 T DE 602009000664T DE 602009000664 D1 DE602009000664 D1 DE 602009000664D1
Authority
DE
Germany
Prior art keywords
die
heater
package
heat
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602009000664T
Other languages
English (en)
Inventor
Richard Spielberger
Bruce Walker Ohme
Ronald J Jensen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of DE602009000664D1 publication Critical patent/DE602009000664D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124—Aluminium (Al) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Air-Conditioning For Vehicles (AREA)
  • Resistance Heating (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
DE602009000664T 2008-07-14 2009-05-01 Erhitzer für kompakten Chip Active DE602009000664D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/172,317 US7965094B2 (en) 2008-07-14 2008-07-14 Packaged die heater

Publications (1)

Publication Number Publication Date
DE602009000664D1 true DE602009000664D1 (de) 2011-03-10

Family

ID=41262269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602009000664T Active DE602009000664D1 (de) 2008-07-14 2009-05-01 Erhitzer für kompakten Chip

Country Status (5)

Country Link
US (1) US7965094B2 (de)
EP (1) EP2146214B1 (de)
JP (1) JP5484783B2 (de)
AT (1) ATE497173T1 (de)
DE (1) DE602009000664D1 (de)

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US9804223B2 (en) * 2009-11-30 2017-10-31 Essai, Inc. Systems and methods for conforming test tooling to integrated circuit device with heater socket
US20150022226A1 (en) * 2009-11-30 2015-01-22 Essai, Inc. Systems and methods for conforming test tooling to integrated circuit device profiles with coaxial socket
US8756549B2 (en) 2011-01-05 2014-06-17 International Business Machines Corporation Integrated circuit chip incorporating embedded thermal radiators for localized, on-demand, heating and a system and method for designing such an integrated circuit chip
US10147660B2 (en) 2011-10-27 2018-12-04 Global Circuits Innovations, Inc. Remapped packaged extracted die with 3D printed bond connections
US9935028B2 (en) 2013-03-05 2018-04-03 Global Circuit Innovations Incorporated Method and apparatus for printing integrated circuit bond connections
US10002846B2 (en) 2011-10-27 2018-06-19 Global Circuit Innovations Incorporated Method for remapping a packaged extracted die with 3D printed bond connections
US9966319B1 (en) * 2011-10-27 2018-05-08 Global Circuit Innovations Incorporated Environmental hardening integrated circuit method and apparatus
US9870968B2 (en) 2011-10-27 2018-01-16 Global Circuit Innovations Incorporated Repackaged integrated circuit and assembly method
US10109606B2 (en) 2011-10-27 2018-10-23 Global Circuit Innovations, Inc. Remapped packaged extracted die
US10128161B2 (en) 2011-10-27 2018-11-13 Global Circuit Innovations, Inc. 3D printed hermetic package assembly and method
US10177054B2 (en) 2011-10-27 2019-01-08 Global Circuit Innovations, Inc. Method for remapping a packaged extracted die
US9228855B2 (en) 2012-03-07 2016-01-05 Crocus Technology Inc. Magnetic logic units configured to measure magnetic field direction
KR20140106997A (ko) * 2013-02-27 2014-09-04 삼성전자주식회사 반도체 패키지
JP5782070B2 (ja) * 2013-07-19 2015-09-24 日本電信電話株式会社 電気素子のパッケージ
JP6280519B2 (ja) * 2015-05-01 2018-02-14 株式会社ヒットデバイス 電子部品の温度特性評価装置およびそれに用いられる温度制御ユニット
US10499461B2 (en) * 2015-12-21 2019-12-03 Intel Corporation Thermal head with a thermal barrier for integrated circuit die processing
JP2018100838A (ja) * 2016-12-19 2018-06-28 ルネサスエレクトロニクス株式会社 半導体製造装置、半導体製造方法及び半導体装置
US10782316B2 (en) 2017-01-09 2020-09-22 Delta Design, Inc. Socket side thermal system
CN107860483A (zh) * 2017-12-26 2018-03-30 上海理好智能科技有限公司 一种带温度传感器的发热器及其制备方法
US10115645B1 (en) 2018-01-09 2018-10-30 Global Circuit Innovations, Inc. Repackaged reconditioned die method and assembly
CN108622847A (zh) * 2018-05-03 2018-10-09 河北美泰电子科技有限公司 Mems传感器的封装方法及封装结构
JP7308288B2 (ja) * 2019-11-27 2023-07-13 京セラ株式会社 回路基板、プローブカード用基板およびプローブカード
US11508680B2 (en) 2020-11-13 2022-11-22 Global Circuit Innovations Inc. Solder ball application for singular die
CN113097200B (zh) * 2021-03-09 2022-09-20 中国电子科技集团公司第二十九研究所 一种倒装热源芯片及其制备方法和应用方法
EP4364197A1 (de) 2021-06-30 2024-05-08 Delta Design, Inc. Temperatursteuerungssystem mit schützanordnung

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US4561006A (en) 1982-07-06 1985-12-24 Sperry Corporation Integrated circuit package with integral heating circuit
US4777434A (en) 1985-10-03 1988-10-11 Amp Incorporated Microelectronic burn-in system
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Also Published As

Publication number Publication date
JP2010021530A (ja) 2010-01-28
EP2146214B1 (de) 2011-01-26
JP5484783B2 (ja) 2014-05-07
EP2146214A1 (de) 2010-01-20
US7965094B2 (en) 2011-06-21
ATE497173T1 (de) 2011-02-15
US20100007367A1 (en) 2010-01-14

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