DE602008002819D1 - Peroxid-aktivierte formulierungen auf oxometalat-basis zur entfernung von ätzungsresten - Google Patents

Peroxid-aktivierte formulierungen auf oxometalat-basis zur entfernung von ätzungsresten

Info

Publication number
DE602008002819D1
DE602008002819D1 DE602008002819T DE602008002819T DE602008002819D1 DE 602008002819 D1 DE602008002819 D1 DE 602008002819D1 DE 602008002819 T DE602008002819 T DE 602008002819T DE 602008002819 T DE602008002819 T DE 602008002819T DE 602008002819 D1 DE602008002819 D1 DE 602008002819D1
Authority
DE
Germany
Prior art keywords
peroxide
weight
oxometalate
respiratory
residues
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008002819T
Other languages
German (de)
English (en)
Inventor
Glenn Westwood
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AVANTOR PERFORMANCE MATERIALS, INC., PHILLIPSB, US
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE602008002819D1 publication Critical patent/DE602008002819D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02—Inorganic compounds
    • C11D7/04—Water-soluble compounds
    • C11D7/08—Acids
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02—Inorganic compounds
    • C11D7/04—Water-soluble compounds
    • C11D7/10—Salts
    • C11D7/14—Silicates
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3245—Aminoacids
    • C11D2111/22—
DE602008002819T 2007-02-14 2008-01-28 Peroxid-aktivierte formulierungen auf oxometalat-basis zur entfernung von ätzungsresten Active DE602008002819D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US88976207P 2007-02-14 2007-02-14
PCT/US2008/001103 WO2008100377A1 (en) 2007-02-14 2008-01-28 Peroxide activated oxometalate based formulations for removal of etch residue

Publications (1)

Publication Number Publication Date
DE602008002819D1 true DE602008002819D1 (de) 2010-11-11

Family

ID=39495820

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008002819T Active DE602008002819D1 (de) 2007-02-14 2008-01-28 Peroxid-aktivierte formulierungen auf oxometalat-basis zur entfernung von ätzungsresten

Country Status (18)

Country Link
US (1) US8183195B2 (es)
EP (1) EP2111445B1 (es)
JP (1) JP2010518242A (es)
KR (1) KR101446368B1 (es)
CN (1) CN101611130B (es)
AT (1) ATE483012T1 (es)
BR (1) BRPI0808074A2 (es)
CA (1) CA2677964A1 (es)
DE (1) DE602008002819D1 (es)
DK (1) DK2111445T3 (es)
ES (1) ES2356109T3 (es)
IL (1) IL199999A (es)
MY (1) MY145938A (es)
PL (1) PL2111445T3 (es)
PT (1) PT2111445E (es)
TW (1) TWI441920B (es)
WO (1) WO2008100377A1 (es)
ZA (1) ZA200905362B (es)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PT2111445E (pt) * 2007-02-14 2010-12-29 Mallinckrodt Baker Inc Formulações à base de oxometalato activadas por peróxido para a remoção de resíduos de gravação
US8853081B2 (en) 2012-12-27 2014-10-07 Intermolecular, Inc. High dose ion-implanted photoresist removal using organic solvent and transition metal mixtures
TWI618712B (zh) 2012-12-28 2018-03-21 Tosoh Corporation 第五族金屬側氧基－烷側氧基錯合物及其製造方法、製膜用材料及第五族金屬氧化物膜的製作方法
CN103605270B (zh) * 2013-10-31 2016-08-17 合肥中南光电有限公司 一种光刻胶水基硅片清洗液及其制备方法
JP6240495B2 (ja) * 2013-12-25 2017-11-29 東ソー株式会社 ニオブオキソ−アルコキソ錯体、その製造方法及びニオブ酸化物膜の作製方法
JP6240496B2 (ja) * 2013-12-25 2017-11-29 東ソー株式会社 タンタルオキソ−アルコキソ錯体、その製造方法及びタンタル酸化物膜の作製方法
JP6455980B2 (ja) * 2015-05-11 2019-01-23 株式会社エー・シー・イー シリコンウェーハのウェットエッチング方法
JP7041674B2 (ja) 2016-10-14 2022-03-24 シー３ナノ・インコーポレイテッド 安定化された薄く広がった金属導電性フィルム、および安定化化合物の供給のための溶液
KR20180060489A (ko) * 2016-11-29 2018-06-07 삼성전자주식회사 식각용 조성물 및 이를 이용한 반도체 장치 제조 방법
DE102017209332A1 (de) * 2017-06-01 2018-12-06 Henkel Ag & Co. Kgaa Bleichendes Wasch- oder Reinigungsmittel
CN107338126A (zh) * 2017-06-23 2017-11-10 昆山欣谷微电子材料有限公司 一种水基微电子剥离和清洗液组合物
KR102655537B1 (ko) * 2017-12-12 2024-04-09 케메탈 게엠베하 빙정석을 함유하는 침착물을 제거하기 위한 무-붕산 조성물
WO2019151141A1 (ja) * 2018-02-05 2019-08-08 富士フイルム株式会社 処理液、及び、処理方法
KR20220097516A (ko) 2019-11-18 2022-07-07 시쓰리나노 인크 성긴 금속 전도성 층의 안정화를 위한 투명 전도성 필름의 코팅 및 가공
CN112007592B (zh) * 2020-09-03 2022-09-27 中科芯云微电子科技有限公司 一种消除光刻版图形保护集成电路知识产权的酸性胶体及其应用
US11884832B2 (en) 2022-03-17 2024-01-30 Jeffrey Mark Wakelam Material restoration composition and method

Family Cites Families (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE425007B (sv) * 1976-01-05 1982-08-23 Shipley Co Stabil etslosning omfattande svavelsyra och veteperoxid samt anvendning av densamma
US4144119A (en) * 1977-09-30 1979-03-13 Dutkewych Oleh B Etchant and process
US4247490A (en) * 1979-09-10 1981-01-27 Ethyl Corporation Process for the purification of dialkylphosphorochloridothioates
FR2497249A1 (fr) * 1980-12-30 1982-07-02 Soletanche Procede de realisation de panneaux de paroi moulee et paroi moulee ainsi obtenue
US4419183A (en) * 1983-01-18 1983-12-06 Shipley Company Inc. Etchant
JPS63172799A (ja) * 1987-01-12 1988-07-16 日本パ−カライジング株式会社 アルミニウムの表面洗浄剤
US5041142A (en) * 1990-03-23 1991-08-20 Lever Brothers Company, Division Of Conopco Inc. Peroxymetallates and their use as bleach activating catalysts
DE19530787A1 (de) * 1995-08-22 1997-02-27 Hoechst Ag Mangan enthaltende Polyoxometallate, Synthese und Verwendung
DE19530786A1 (de) * 1995-08-22 1997-02-27 Hoechst Ag Bleichmittelzusammensetzung enthaltend Polyoxometallate als Bleichkatalysator
US5817610A (en) * 1996-09-06 1998-10-06 Olin Microelectronic Chemicals, Inc. Non-corrosive cleaning composition for removing plasma etching residues
US5904734A (en) * 1996-11-07 1999-05-18 S. C. Johnson & Son, Inc. Method for bleaching a hard surface using tungsten activated peroxide
JP4141514B2 (ja) * 1996-11-26 2008-08-27 株式会社フジミインコーポレーテッド リンス用組成物
US20050187126A1 (en) * 2002-08-27 2005-08-25 Busch Daryle H. Catalysts and methods for catalytic oxidation
GB9725614D0 (en) * 1997-12-03 1998-02-04 United States Borax Inc Bleaching compositions
CN100370360C (zh) * 1998-05-18 2008-02-20 马林克罗特有限公司 用于清洗微电子衬底的含硅酸盐碱性组合物
JP4565741B2 (ja) * 1998-05-18 2010-10-20 マリンクロッド・ベイカー・インコーポレイテッド マイクロエレクトロニクス基板洗浄用珪酸塩含有アルカリ組成物
KR100447551B1 (ko) * 1999-01-18 2004-09-08 가부시끼가이샤 도시바 복합 입자 및 그의 제조 방법, 수계 분산체, 화학 기계연마용 수계 분산체 조성물 및 반도체 장치의 제조 방법
US6599370B2 (en) * 2000-10-16 2003-07-29 Mallinckrodt Inc. Stabilized alkaline compositions for cleaning microelectronic substrates
JP3398362B2 (ja) * 2000-11-20 2003-04-21 大塚化学株式会社 洗浄剤組成物、及び洗濯槽などの洗浄方法
MY131912A (en) * 2001-07-09 2007-09-28 Avantor Performance Mat Inc Ammonia-free alkaline microelectronic cleaning compositions with improved substrate compatibility
MY139607A (en) * 2001-07-09 2009-10-30 Avantor Performance Mat Inc Ammonia-free alkaline microelectronic cleaning compositions with improved substrate compatibility
WO2003021651A1 (fr) * 2001-08-16 2003-03-13 Asahi Kasei Chemicals Corporation Fluide de polissage conçu pour un film metallique et procede de production d'un substrat semi-conducteur au moyen de ce fluide de polissage
JP2003073323A (ja) * 2001-09-04 2003-03-12 Nippon Shokubai Co Ltd 有機化合物の酸化方法
JP3925296B2 (ja) * 2002-05-13 2007-06-06 栗田工業株式会社 防食方法
US6811747B2 (en) * 2002-06-12 2004-11-02 Bioquest, Llc Corrosion inhibitor
US6803353B2 (en) * 2002-11-12 2004-10-12 Atofina Chemicals, Inc. Copper chemical mechanical polishing solutions using sulfonated amphiprotic agents
JP2004211137A (ja) * 2002-12-27 2004-07-29 Kurita Water Ind Ltd 防食剤組成物
US7018967B2 (en) * 2003-03-12 2006-03-28 Ecolab Inc. Prespotting treatment employing singlet oxygen
US6918820B2 (en) * 2003-04-11 2005-07-19 Eastman Kodak Company Polishing compositions comprising polymeric cores having inorganic surface particles and method of use
WO2005043245A2 (en) * 2003-10-29 2005-05-12 Mallinckrodt Baker Inc. Alkaline, post plasma etch/ash residue removers and photoresist stripping compositions containing metal-halide corrosion inhibitors
SG150509A1 (en) * 2004-03-01 2009-03-30 Mallinckrodt Baker Inc Nanoelectronic and microelectronic cleaning compositions
WO2006075618A1 (ja) * 2005-01-12 2006-07-20 Nippon Shokubai Co., Ltd. 漂白活性化剤及び該化合物を含有する洗浄用組成物
JP2006193593A (ja) * 2005-01-12 2006-07-27 Nippon Shokubai Co Ltd 漂白活性化剤及び該化合物を含有する漂白剤組成物
WO2008013516A2 (en) * 2005-05-13 2008-01-31 Cambrios Technologies Corp. Seed layers, cap layers, and thin films and methods of making thereof
US7358218B2 (en) * 2005-06-03 2008-04-15 Research Foundation Of The University Of Central Florida, Inc. Method for masking and removing stains from rugged solid surfaces
JP4704835B2 (ja) * 2005-07-21 2011-06-22 株式会社片山化学工業研究所 水系における孔食防止剤および孔食防止方法
PT2111445E (pt) * 2007-02-14 2010-12-29 Mallinckrodt Baker Inc Formulações à base de oxometalato activadas por peróxido para a remoção de resíduos de gravação
US7678605B2 (en) * 2007-08-30 2010-03-16 Dupont Air Products Nanomaterials Llc Method for chemical mechanical planarization of chalcogenide materials
SG176151A1 (en) * 2009-05-27 2011-12-29 Rogers Corp Polishing pad, polyurethane layer therefor, and method of polishing a silicon wafer

Also Published As

Publication number Publication date
CA2677964A1 (en) 2008-08-21
ES2356109T8 (es) 2011-10-11
TW200907049A (en) 2009-02-16
CN101611130B (zh) 2011-05-18
KR20090110906A (ko) 2009-10-23
IL199999A0 (en) 2010-04-15
ZA200905362B (en) 2010-05-26
US20100035786A1 (en) 2010-02-11
DK2111445T3 (da) 2011-01-17
EP2111445B1 (en) 2010-09-29
TWI441920B (zh) 2014-06-21
MY145938A (en) 2012-05-31
JP2010518242A (ja) 2010-05-27
ATE483012T1 (de) 2010-10-15
IL199999A (en) 2013-03-24
CN101611130A (zh) 2009-12-23
PT2111445E (pt) 2010-12-29
PL2111445T3 (pl) 2011-04-29
US8183195B2 (en) 2012-05-22
EP2111445A1 (en) 2009-10-28
ES2356109T3 (es) 2011-04-05
BRPI0808074A2 (pt) 2014-08-05
KR101446368B1 (ko) 2014-10-01
WO2008100377A1 (en) 2008-08-21

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Legal Events

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8327 Change in the person/name/address of the patent owner

Owner name: AVANTOR PERFORMANCE MATERIALS, INC., PHILLIPSB, US