DE602006010775D1 - Verfahren zur Herstellung von Siliziumscheiben - Google Patents
Verfahren zur Herstellung von SiliziumscheibenInfo
- Publication number
- DE602006010775D1 DE602006010775D1 DE602006010775T DE602006010775T DE602006010775D1 DE 602006010775 D1 DE602006010775 D1 DE 602006010775D1 DE 602006010775 T DE602006010775 T DE 602006010775T DE 602006010775 T DE602006010775 T DE 602006010775T DE 602006010775 D1 DE602006010775 D1 DE 602006010775D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- silicon wafers
- wafers
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 235000012431 wafers Nutrition 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02019—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Weting (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005236255A JP4835069B2 (ja) | 2005-08-17 | 2005-08-17 | シリコンウェーハの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006010775D1 true DE602006010775D1 (de) | 2010-01-14 |
Family
ID=37441561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602006010775T Active DE602006010775D1 (de) | 2005-08-17 | 2006-08-14 | Verfahren zur Herstellung von Siliziumscheiben |
Country Status (8)
Country | Link |
---|---|
US (1) | US7648890B2 (de) |
EP (1) | EP1755156B1 (de) |
JP (1) | JP4835069B2 (de) |
CN (1) | CN100435288C (de) |
DE (1) | DE602006010775D1 (de) |
MY (1) | MY143651A (de) |
SG (1) | SG130148A1 (de) |
TW (1) | TWI346356B (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080206992A1 (en) * | 2006-12-29 | 2008-08-28 | Siltron Inc. | Method for manufacturing high flatness silicon wafer |
CN101459047B (zh) * | 2007-12-13 | 2010-11-10 | 中芯国际集成电路制造(上海)有限公司 | 半导体晶片表面的清洗方法 |
JP2009267159A (ja) * | 2008-04-25 | 2009-11-12 | Sumco Techxiv株式会社 | 半導体ウェーハの製造装置及び方法 |
US8566076B2 (en) | 2008-05-28 | 2013-10-22 | International Business Machines Corporation | System and method for applying bridging models for robust and efficient speech to speech translation |
JP5428214B2 (ja) * | 2008-06-19 | 2014-02-26 | 株式会社Sumco | 半導体ウェーハの製造方法、半導体ウェーハ、及び、半導体ウェーハの結晶評価方法 |
WO2011105255A1 (ja) * | 2010-02-26 | 2011-09-01 | 株式会社Sumco | 半導体ウェーハの製造方法 |
CN102212824A (zh) * | 2010-04-09 | 2011-10-12 | 中国科学院微电子研究所 | 一种单侧硅片湿法腐蚀设备 |
CN103187242B (zh) * | 2011-12-31 | 2016-08-24 | 中芯国际集成电路制造(上海)有限公司 | 提高晶圆的刻蚀cd均匀度的装置和方法 |
CN102768952B (zh) * | 2012-08-01 | 2014-12-17 | 宁波尤利卡太阳能科技发展有限公司 | 扩散后单晶硅片次品返工方法 |
CN103964371B (zh) * | 2013-01-29 | 2016-07-06 | 无锡华润上华半导体有限公司 | 硅晶片的钝化层的腐蚀方法 |
US9281251B2 (en) * | 2013-08-09 | 2016-03-08 | Tokyo Electron Limited | Substrate backside texturing |
US9418865B2 (en) * | 2013-12-26 | 2016-08-16 | Intermolecular, Inc. | Wet etching of silicon containing antireflective coatings |
CN103943496B (zh) * | 2014-05-16 | 2016-09-07 | 南通皋鑫电子股份有限公司 | 高压二极管硅块台面腐蚀工艺 |
CN105826165A (zh) * | 2015-01-07 | 2016-08-03 | 北京华进创威电子有限公司 | 原位刻蚀方法 |
CN105826173A (zh) * | 2015-01-07 | 2016-08-03 | 北京华进创威电子有限公司 | 用于SiC异质外延生长的原位刻蚀方法 |
CN105470108B (zh) * | 2015-09-28 | 2018-12-04 | 阳光中科(福建)能源股份有限公司 | 一种太阳能电池扩散烧焦片的返工处理方法 |
CN108400081A (zh) * | 2017-02-08 | 2018-08-14 | 上海新昇半导体科技有限公司 | 硅片的制作方法 |
KR20200100914A (ko) * | 2019-02-18 | 2020-08-27 | 삼성디스플레이 주식회사 | 디스플레이 패널 및 그 제조방법 |
CN113614890A (zh) | 2019-04-15 | 2021-11-05 | 信越半导体株式会社 | 硅晶圆的蚀刻方法及蚀刻装置 |
JP6761917B1 (ja) * | 2019-11-29 | 2020-09-30 | Jx金属株式会社 | リン化インジウム基板、半導体エピタキシャルウエハ、及びリン化インジウム基板の製造方法 |
JP7056685B2 (ja) | 2020-05-27 | 2022-04-19 | 信越半導体株式会社 | シリコンウェーハのエッチング方法 |
KR20240026193A (ko) * | 2021-06-24 | 2024-02-27 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 방법, 기판 처리 시스템 및 컴퓨터 기억 매체 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09270400A (ja) * | 1996-01-31 | 1997-10-14 | Shin Etsu Handotai Co Ltd | 半導体ウェーハの製造方法 |
US5942449A (en) * | 1996-08-28 | 1999-08-24 | Micron Technology, Inc. | Method for removing an upper layer of material from a semiconductor wafer |
JPH11135474A (ja) * | 1997-10-30 | 1999-05-21 | Komatsu Electron Metals Co Ltd | 半導体鏡面ウェハおよびその製造方法 |
JPH11135464A (ja) | 1997-10-30 | 1999-05-21 | Komatsu Electron Metals Co Ltd | 半導体ウェハの製造方法 |
JP3441979B2 (ja) * | 1997-12-09 | 2003-09-02 | 信越半導体株式会社 | 半導体ウエーハの加工方法および半導体ウエーハ |
JP3329288B2 (ja) * | 1998-11-26 | 2002-09-30 | 信越半導体株式会社 | 半導体ウエーハおよびその製造方法 |
US6294469B1 (en) * | 1999-05-21 | 2001-09-25 | Plasmasil, Llc | Silicon wafering process flow |
JP3797593B2 (ja) * | 1999-11-25 | 2006-07-19 | 日本化成株式会社 | エッチング制御方法 |
KR20020031347A (ko) * | 2000-04-27 | 2002-05-01 | 와다 다다시 | 반도체웨이퍼 및 반도체디바이스 제작프로세스용 장치 |
WO2002001616A1 (fr) * | 2000-06-29 | 2002-01-03 | Shin-Etsu Handotai Co., Ltd. | Procede de traitement d'une plaquette de semi-conducteur et plaquette de semi-conducteur |
WO2002003432A2 (en) * | 2000-06-30 | 2002-01-10 | Memc Electronic Materials, Inc. | Process for etching silicon wafers |
JP2003100701A (ja) * | 2001-09-27 | 2003-04-04 | Sumitomo Mitsubishi Silicon Corp | シリコンウェーハのエッチング方法及びこの方法を用いたシリコンウェーハの表裏面差別化方法 |
US20040108297A1 (en) * | 2002-09-18 | 2004-06-10 | Memc Electronic Materials, Inc. | Process for etching silicon wafers |
DE10302611B4 (de) * | 2003-01-23 | 2011-07-07 | Siltronic AG, 81737 | Polierte Halbleiterscheibe und Verfahren zu deren Herstellung und Anordnung bestehend aus einer Halbleiterscheibe und einem Schild |
JP2004356252A (ja) * | 2003-05-28 | 2004-12-16 | Sumitomo Mitsubishi Silicon Corp | シリコンウェーハの加工方法 |
KR200331009Y1 (ko) | 2003-07-29 | 2003-10-22 | 이미자 | 세면대용 배수트랩 |
JP2005175106A (ja) * | 2003-12-10 | 2005-06-30 | Sumitomo Mitsubishi Silicon Corp | シリコンウェーハの加工方法 |
JP4700333B2 (ja) * | 2003-12-22 | 2011-06-15 | シルトロニック・ジャパン株式会社 | シリコンウエーハ用の高純度アルカリエッチング液およびシリコンウエーハアルカリエッチング方法 |
JP3778204B2 (ja) | 2004-01-23 | 2006-05-24 | ダイキン工業株式会社 | ウェハ温度調整装置及びウェハ温度調整方法 |
-
2005
- 2005-08-17 JP JP2005236255A patent/JP4835069B2/ja not_active Expired - Fee Related
-
2006
- 2006-08-14 EP EP06016964A patent/EP1755156B1/de not_active Expired - Fee Related
- 2006-08-14 TW TW095129784A patent/TWI346356B/zh not_active IP Right Cessation
- 2006-08-14 MY MYPI20063924A patent/MY143651A/en unknown
- 2006-08-14 DE DE602006010775T patent/DE602006010775D1/de active Active
- 2006-08-14 SG SG200605502-4A patent/SG130148A1/en unknown
- 2006-08-15 CN CNB2006101592435A patent/CN100435288C/zh active Active
- 2006-08-15 US US11/504,969 patent/US7648890B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
SG130148A1 (en) | 2007-03-20 |
TWI346356B (en) | 2011-08-01 |
MY143651A (en) | 2011-06-30 |
CN100435288C (zh) | 2008-11-19 |
JP2007053178A (ja) | 2007-03-01 |
EP1755156B1 (de) | 2009-12-02 |
US7648890B2 (en) | 2010-01-19 |
EP1755156A3 (de) | 2008-05-07 |
US20070042567A1 (en) | 2007-02-22 |
TW200725726A (en) | 2007-07-01 |
CN1917151A (zh) | 2007-02-21 |
JP4835069B2 (ja) | 2011-12-14 |
EP1755156A2 (de) | 2007-02-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |