DE602006006237D1 - Verfahren zur Herstellung von keramischen Heizern - Google Patents
Verfahren zur Herstellung von keramischen HeizernInfo
- Publication number
- DE602006006237D1 DE602006006237D1 DE602006006237T DE602006006237T DE602006006237D1 DE 602006006237 D1 DE602006006237 D1 DE 602006006237D1 DE 602006006237 T DE602006006237 T DE 602006006237T DE 602006006237 T DE602006006237 T DE 602006006237T DE 602006006237 D1 DE602006006237 D1 DE 602006006237D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- ceramic heaters
- heaters
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61J—CONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICAL PURPOSES; DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGING PHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL OR ADMINISTERING FORMS; DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY; BABY COMFORTERS; DEVICES FOR RECEIVING SPITTLE
- A61J1/00—Containers specially adapted for medical or pharmaceutical purposes
- A61J1/14—Details; Accessories therefor
- A61J1/16—Holders for containers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61J—CONTAINERS SPECIALLY ADAPTED FOR MEDICAL OR PHARMACEUTICAL PURPOSES; DEVICES OR METHODS SPECIALLY ADAPTED FOR BRINGING PHARMACEUTICAL PRODUCTS INTO PARTICULAR PHYSICAL OR ADMINISTERING FORMS; DEVICES FOR ADMINISTERING FOOD OR MEDICINES ORALLY; BABY COMFORTERS; DEVICES FOR RECEIVING SPITTLE
- A61J1/00—Containers specially adapted for medical or pharmaceutical purposes
- A61J1/14—Details; Accessories therefor
- A61J1/1412—Containers with closing means, e.g. caps
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
- C04B35/6455—Hot isostatic pressing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/658—Atmosphere during thermal treatment
- C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/121—Metallic interlayers based on aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
- C04B2237/343—Alumina or aluminates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/365—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/366—Aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/368—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
- Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US65332005P | 2005-02-16 | 2005-02-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006006237D1 true DE602006006237D1 (de) | 2009-05-28 |
Family
ID=36178239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602006006237T Active DE602006006237D1 (de) | 2005-02-16 | 2006-02-16 | Verfahren zur Herstellung von keramischen Heizern |
Country Status (6)
Country | Link |
---|---|
US (1) | US7854975B2 (de) |
EP (1) | EP1695949B1 (de) |
JP (1) | JP5008875B2 (de) |
KR (1) | KR100709544B1 (de) |
DE (1) | DE602006006237D1 (de) |
TW (1) | TW200633947A (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050106794A1 (en) * | 2002-03-26 | 2005-05-19 | Fuji Electric Holdings Co., Ltd. | Method of manufacturing a semiconductor device |
JP4008401B2 (ja) * | 2003-09-22 | 2007-11-14 | 日本碍子株式会社 | 基板載置台の製造方法 |
US7696455B2 (en) * | 2006-05-03 | 2010-04-13 | Watlow Electric Manufacturing Company | Power terminals for ceramic heater and method of making the same |
NL1034606C2 (nl) * | 2007-10-30 | 2009-05-06 | Assembleon Bv | Verwarmbare plaat voor het verwarmen van een strookvormige drager voor het bevestigen van componenten aan de strookvormige drager alsmede een oven. |
DE102008036836A1 (de) * | 2008-08-07 | 2010-02-11 | Epcos Ag | Formkörper, Heizungsvorrichtung und Verfahren zur Herstellung eines Formkörpers |
DE102008036835A1 (de) * | 2008-08-07 | 2010-02-18 | Epcos Ag | Heizungsvorrichtung und Verfahren zur Herstellung der Heizungsvorrichtung |
US8580593B2 (en) * | 2009-09-10 | 2013-11-12 | Micron Technology, Inc. | Epitaxial formation structures and associated methods of manufacturing solid state lighting devices |
WO2011146810A2 (en) * | 2010-05-21 | 2011-11-24 | Ceramatec, Inc | Ceramic to ceramic joint and associated methods |
US8932690B2 (en) | 2011-11-30 | 2015-01-13 | Component Re-Engineering Company, Inc. | Plate and shaft device |
US11229968B2 (en) | 2011-11-30 | 2022-01-25 | Watlow Electric Manufacturing Company | Semiconductor substrate support with multiple electrodes and method for making same |
US9624137B2 (en) | 2011-11-30 | 2017-04-18 | Component Re-Engineering Company, Inc. | Low temperature method for hermetically joining non-diffusing ceramic materials |
US9556074B2 (en) * | 2011-11-30 | 2017-01-31 | Component Re-Engineering Company, Inc. | Method for manufacture of a multi-layer plate device |
JP6078450B2 (ja) * | 2012-10-26 | 2017-02-08 | 日本碍子株式会社 | 半導体製造装置用部材及びその製法 |
US10679873B2 (en) * | 2016-09-30 | 2020-06-09 | Ngk Spark Plug Co., Ltd. | Ceramic heater |
US11183412B2 (en) * | 2017-08-14 | 2021-11-23 | Watlow Electric Manufacturing Company | Method for joining quartz pieces and quartz electrodes and other devices of joined quartz |
JP7379372B2 (ja) * | 2018-04-17 | 2023-11-14 | ワトロー エレクトリック マニュファクチュアリング カンパニー | オールアルミニウムヒーター |
US10882130B2 (en) | 2018-04-17 | 2021-01-05 | Watlow Electric Manufacturing Company | Ceramic-aluminum assembly with bonding trenches |
JP6583897B1 (ja) * | 2018-05-25 | 2019-10-02 | ▲らん▼海精研股▲ふん▼有限公司 | セラミック製静電チャックの製造方法 |
KR102382375B1 (ko) | 2018-07-13 | 2022-04-08 | 엔지케이 인슐레이터 엘티디 | 세라믹 히터 |
JP6959201B2 (ja) | 2018-08-29 | 2021-11-02 | 日本碍子株式会社 | セラミックヒータ |
TWI785381B (zh) * | 2019-09-12 | 2022-12-01 | 美商瓦特洛威電子製造公司 | 陶瓷加熱器及使用暫態液相接合之形成方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3307701A1 (de) | 1983-03-04 | 1984-09-06 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zum verbinden von keramischen bauteilen mit einer al-cu-legierung |
JPS59217682A (ja) | 1983-05-25 | 1984-12-07 | 新明和工業株式会社 | 拡散接合方法 |
US4552301A (en) * | 1984-05-17 | 1985-11-12 | U.S. Philips Corporation | Method of bonding ceramic components together or to metallic components |
JPH0788262B2 (ja) | 1985-04-01 | 1995-09-27 | 株式会社日立製作所 | 窒化ケイ素と金属との接合方法 |
JPS6270272A (ja) * | 1985-09-20 | 1987-03-31 | 新明和工業株式会社 | セラミツクスの接合構造 |
US5154863A (en) * | 1985-10-31 | 1992-10-13 | Kyocera Corporation | Aluminum nitride-based sintered body and process for the production thereof |
DE3608559A1 (de) | 1986-03-14 | 1987-09-17 | Kernforschungsanlage Juelich | Verfahren zum verbinden von formteilen aus sic mit keramik oder metall und zur oberflaechenbehandlung von sisic sowie eine zum verbinden brauchbare legierung |
WO1991013719A1 (fr) * | 1990-03-09 | 1991-09-19 | Furukawa Aluminum Co., Ltd. | Feuille de brasage comprenant une matiere de brasage a base d'alliage d'aluminium-magnesium-silicium |
JP3119759B2 (ja) * | 1993-03-17 | 2000-12-25 | 日本碍子株式会社 | セラミックス・セラミックス接合体 |
JP2783980B2 (ja) | 1994-09-01 | 1998-08-06 | 日本碍子株式会社 | 接合体およびその製造方法 |
JP3866320B2 (ja) | 1995-02-09 | 2007-01-10 | 日本碍子株式会社 | 接合体、および接合体の製造方法 |
JPH09249462A (ja) | 1996-03-12 | 1997-09-22 | Ngk Insulators Ltd | 接合体、その製造方法およびセラミックス部材用ろう材 |
US6342277B1 (en) * | 1996-08-16 | 2002-01-29 | Licensee For Microelectronics: Asm America, Inc. | Sequential chemical vapor deposition |
US6039918A (en) * | 1996-07-25 | 2000-03-21 | Endress + Hauser Gmbh + Co. | Active brazing solder for brazing alumina-ceramic parts |
JP3604888B2 (ja) | 1997-01-30 | 2004-12-22 | 日本碍子株式会社 | 窒化アルミニウム質セラミックス基材の接合体、窒化アルミニウム質セラミックス基材の接合体の製造方法及び接合剤 |
JPH11312729A (ja) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | 静電チャック |
JP3721284B2 (ja) * | 1999-06-09 | 2005-11-30 | 電気化学工業株式会社 | 回路基板及びその製造方法 |
JP2001114575A (ja) | 1999-10-19 | 2001-04-24 | Taiheiyo Cement Corp | セラミックスとセラミックスとの接合体及びその接合方法 |
AU2001231737B2 (en) * | 2000-03-10 | 2004-06-24 | Corus Aluminium Walzprodukte Gmbh | Brazing sheet product and method of manufacturing an assembly using the brazing sheet product |
JP4596622B2 (ja) * | 2000-09-29 | 2010-12-08 | 京セラ株式会社 | セラミックヒーターとこれを用いたウエハ加熱装置 |
JP2003048786A (ja) * | 2001-08-03 | 2003-02-21 | Mitsubishi Heavy Ind Ltd | 金属とセラミックスとの接合方法 |
JP4026761B2 (ja) * | 2002-03-28 | 2007-12-26 | 日本碍子株式会社 | セラミックヒーター |
JP4107643B2 (ja) * | 2002-07-23 | 2008-06-25 | 日本碍子株式会社 | 接合体の製造方法 |
JP2004063101A (ja) * | 2002-07-24 | 2004-02-26 | Sumitomo Wiring Syst Ltd | 連結端子及びそれを用いたコネクタの組立方法 |
-
2006
- 2006-02-09 TW TW095104341A patent/TW200633947A/zh unknown
- 2006-02-14 KR KR1020060013948A patent/KR100709544B1/ko active IP Right Grant
- 2006-02-14 JP JP2006036858A patent/JP5008875B2/ja active Active
- 2006-02-15 US US11/354,428 patent/US7854975B2/en active Active
- 2006-02-16 DE DE602006006237T patent/DE602006006237D1/de active Active
- 2006-02-16 EP EP06250817A patent/EP1695949B1/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100709544B1 (ko) | 2007-04-20 |
EP1695949B1 (de) | 2009-04-15 |
KR20060092082A (ko) | 2006-08-22 |
JP2006225260A (ja) | 2006-08-31 |
US20060182908A1 (en) | 2006-08-17 |
TW200633947A (en) | 2006-10-01 |
TWI321127B (de) | 2010-03-01 |
US7854975B2 (en) | 2010-12-21 |
JP5008875B2 (ja) | 2012-08-22 |
EP1695949A1 (de) | 2006-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |