DE602004010116D1 - Verfahren und vorrichtung zum testen elektrischer eigenschaften eines zu prüfenden objekts - Google Patents

Verfahren und vorrichtung zum testen elektrischer eigenschaften eines zu prüfenden objekts

Info

Publication number
DE602004010116D1
DE602004010116D1 DE602004010116T DE602004010116T DE602004010116D1 DE 602004010116 D1 DE602004010116 D1 DE 602004010116D1 DE 602004010116 T DE602004010116 T DE 602004010116T DE 602004010116 T DE602004010116 T DE 602004010116T DE 602004010116 D1 DE602004010116 D1 DE 602004010116D1
Authority
DE
Germany
Prior art keywords
tested
electrical properties
testing electrical
testing
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004010116T
Other languages
English (en)
Other versions
DE602004010116T2 (de
Inventor
Tadatomo Suga
Toshihiro Itoh
Shigekazu Komatsu
Kenichi Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of DE602004010116D1 publication Critical patent/DE602004010116D1/de
Application granted granted Critical
Publication of DE602004010116T2 publication Critical patent/DE602004010116T2/de
Anticipated expiration legal-status Critical
Active legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
DE602004010116T 2003-06-09 2004-06-08 Verfahren und vorrichtung zum testen elektrischer eigenschaften eines zu prüfenden objekts Active DE602004010116T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003164349 2003-06-09
JP2003164349A JP4387125B2 (ja) 2003-06-09 2003-06-09 検査方法及び検査装置
PCT/JP2004/008300 WO2004109306A1 (ja) 2003-06-09 2004-06-08 被検査体の電気的特性を検査する検査方法及び検査装置

Publications (2)

Publication Number Publication Date
DE602004010116D1 true DE602004010116D1 (de) 2007-12-27
DE602004010116T2 DE602004010116T2 (de) 2008-09-11

Family

ID=33508784

Family Applications (2)

Application Number Title Priority Date Filing Date
DE602004017655T Active DE602004017655D1 (de) 2003-06-09 2004-06-08 Verfahren und Vorrichtung zum Testen elektrischer Eigenschaften eines zu prüfenden Objekts
DE602004010116T Active DE602004010116T2 (de) 2003-06-09 2004-06-08 Verfahren und vorrichtung zum testen elektrischer eigenschaften eines zu prüfenden objekts

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE602004017655T Active DE602004017655D1 (de) 2003-06-09 2004-06-08 Verfahren und Vorrichtung zum Testen elektrischer Eigenschaften eines zu prüfenden Objekts

Country Status (8)

Country Link
US (3) US7262613B2 (de)
EP (2) EP1788401B1 (de)
JP (1) JP4387125B2 (de)
KR (1) KR100810550B1 (de)
CN (1) CN100442068C (de)
AT (2) ATE413605T1 (de)
DE (2) DE602004017655D1 (de)
WO (1) WO2004109306A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4359644B2 (ja) 2005-01-28 2009-11-04 パナソニック株式会社 再生装置、記録媒体、記録方法
CN101151540B (zh) * 2005-03-31 2010-07-21 奥克泰克有限公司 微小结构体的探针卡、微小结构体的检查装置以及检查方法
JP2006319209A (ja) * 2005-05-13 2006-11-24 Tokyo Electron Ltd パワーデバイス用の検査装置
JP5108238B2 (ja) * 2006-02-24 2012-12-26 東京エレクトロン株式会社 検査方法、検査装置及び制御プログラム
JP5016892B2 (ja) * 2006-10-17 2012-09-05 東京エレクトロン株式会社 検査装置及び検査方法
JP2008157818A (ja) * 2006-12-25 2008-07-10 Tokyo Electron Ltd 検査方法、検査装置及びプログラムを記憶したコンピュータ読み取り可能な記憶媒体
WO2008081752A1 (ja) * 2006-12-27 2008-07-10 Tokyo Electron Limited 検査方法、検査装置及びプログラムを記憶したコンピュータ読み取り可能な記憶媒体
JP4664334B2 (ja) * 2007-07-20 2011-04-06 東京エレクトロン株式会社 検査方法
JP4991495B2 (ja) * 2007-11-26 2012-08-01 東京エレクトロン株式会社 検査用保持部材及び検査用保持部材の製造方法
TWI362496B (en) * 2008-03-05 2012-04-21 Nanya Technology Corp Apparatus for testing chip and circuit of probe card
US8344746B2 (en) * 2008-09-29 2013-01-01 Thermo Fisher Scientific Inc. Probe interface for electrostatic discharge testing of an integrated circuit
CN101696992B (zh) * 2009-10-28 2013-03-27 上海宏力半导体制造有限公司 双极型晶体管的基区电阻的测量方法
JP5296117B2 (ja) * 2010-03-12 2013-09-25 東京エレクトロン株式会社 プローブ装置
US8620724B2 (en) * 2010-04-20 2013-12-31 Accenture Global Services Limited Integration framework for enterprise content management systems
JP5291157B2 (ja) 2011-08-01 2013-09-18 東京エレクトロン株式会社 パワーデバイス用のプローブカード
JP5265746B2 (ja) * 2011-09-22 2013-08-14 東京エレクトロン株式会社 プローブ装置
CN103091514A (zh) * 2011-10-27 2013-05-08 无锡华润上华科技有限公司 手动探针台结构
WO2013108452A1 (ja) * 2012-01-20 2013-07-25 東京エレクトロン株式会社 支持基板及び基板の処理方法
JP2014107469A (ja) * 2012-11-29 2014-06-09 Tokyo Electron Ltd 半導体装置の製造方法及び製造装置
KR101794744B1 (ko) 2013-08-14 2017-12-01 에프이아이 컴파니 하전 입자 비임 시스템용 회로 프로브
JP6386923B2 (ja) * 2015-01-26 2018-09-05 三菱電機株式会社 半導体評価装置およびチャックステージの検査方法
JP6809049B2 (ja) * 2016-08-31 2021-01-06 日亜化学工業株式会社 発光装置の検査方法
JP2022013347A (ja) * 2020-07-03 2022-01-18 富士電機株式会社 半導体チップの試験装置および試験方法

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Publication number Priority date Publication date Assignee Title
JPS5545247U (de) * 1978-09-20 1980-03-25
JPS5545247A (en) 1978-09-25 1980-03-29 Matsushita Electric Ind Co Ltd Signal receiving unit
GB8305967D0 (en) * 1983-03-04 1983-04-07 Univ Liverpool Material for treatment of spontaneous abortions
JPH0727951B2 (ja) 1987-04-15 1995-03-29 東京エレクトロン株式会社 ウエハ載置台
JPH02166746A (ja) 1988-12-21 1990-06-27 Tokyo Electron Ltd 測定装置
JP3208734B2 (ja) * 1990-08-20 2001-09-17 東京エレクトロン株式会社 プローブ装置
US5184398A (en) * 1991-08-30 1993-02-09 Texas Instruments Incorporated In-situ real-time sheet resistance measurement method
JPH06151529A (ja) * 1992-11-16 1994-05-31 Mitsubishi Electric Corp 半導体装置の製造方法及びウエハテスト装置
US5557215A (en) * 1993-05-12 1996-09-17 Tokyo Electron Limited Self-bias measuring method, apparatus thereof and electrostatic chucking apparatus
JPH1164385A (ja) 1997-08-21 1999-03-05 Hitachi Electron Eng Co Ltd 検査用基板のプローブ
JP3642456B2 (ja) * 1998-02-24 2005-04-27 株式会社村田製作所 電子部品の検査方法および装置
CN1173665C (zh) * 1998-07-06 2004-11-03 亚历山大·帕斯特尔 估算皮肤阻抗变化的装置
JP2000164665A (ja) 1998-11-27 2000-06-16 Miyazaki Oki Electric Co Ltd 半導体集積回路装置及びその製造方法
EP1256006B1 (de) * 1999-10-19 2006-07-19 Solid State Measurements, Inc. Nicht-invasive elektrische messung von halbleiterscheiben
JP4841737B2 (ja) * 2000-08-21 2011-12-21 東京エレクトロン株式会社 検査方法及び検査装置
JP2002176142A (ja) * 2000-12-07 2002-06-21 Sanyo Electric Co Ltd 半導体装置の製造方法
JP4456325B2 (ja) * 2002-12-12 2010-04-28 東京エレクトロン株式会社 検査方法及び検査装置

Also Published As

Publication number Publication date
EP1637893A4 (de) 2006-07-19
CN100442068C (zh) 2008-12-10
US7262613B2 (en) 2007-08-28
EP1637893B1 (de) 2007-11-14
US20070063725A1 (en) 2007-03-22
EP1788401B1 (de) 2008-11-05
US20080174325A1 (en) 2008-07-24
WO2004109306A1 (ja) 2004-12-16
DE602004010116T2 (de) 2008-09-11
JP2005005331A (ja) 2005-01-06
DE602004017655D1 (de) 2008-12-18
KR20060119719A (ko) 2006-11-24
ATE378607T1 (de) 2007-11-15
EP1788401A1 (de) 2007-05-23
KR100810550B1 (ko) 2008-03-18
JP4387125B2 (ja) 2009-12-16
US7688088B2 (en) 2010-03-30
EP1637893A1 (de) 2006-03-22
ATE413605T1 (de) 2008-11-15
CN1809757A (zh) 2006-07-26
US20060145716A1 (en) 2006-07-06

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: ITOH, TOSHIHIRO, CHIBA 263-0022, JP

Inventor name: SUGA, TADATOMO, TOKYO 164-0003, JP

Inventor name: KOMATSU, SHIGEKAZU, TOKYO 107-8481, JP

Inventor name: KATAOKA, KENICHI, TOKYO 154-0023, JP

8364 No opposition during term of opposition