DE3856007D1 - Lichtfilter für die mikroelektronik - Google Patents

Lichtfilter für die mikroelektronik

Info

Publication number
DE3856007D1
DE3856007D1 DE3856007T DE3856007T DE3856007D1 DE 3856007 D1 DE3856007 D1 DE 3856007D1 DE 3856007 T DE3856007 T DE 3856007T DE 3856007 T DE3856007 T DE 3856007T DE 3856007 D1 DE3856007 D1 DE 3856007D1
Authority
DE
Germany
Prior art keywords
filters
microelectronics
light filters
resin
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3856007T
Other languages
English (en)
Other versions
DE3856007T2 (de
Inventor
Terry Brewer
Dan Hawley
James Lamb
William Latham
Lynn Stichnote
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brewer Science Inc
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/002,107 external-priority patent/US4876165A/en
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Application granted granted Critical
Publication of DE3856007D1 publication Critical patent/DE3856007D1/de
Publication of DE3856007T2 publication Critical patent/DE3856007T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optical Filters (AREA)
  • Silicon Polymers (AREA)
  • Glass Compositions (AREA)
  • Microscoopes, Condenser (AREA)
  • Gyroscopes (AREA)
DE3856007T 1987-01-12 1988-01-12 Lichtfilter für die mikroelektronik Expired - Fee Related DE3856007T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/002,107 US4876165A (en) 1982-09-30 1987-01-12 Light filters for microelectronics
PCT/US1988/000042 WO1988005180A1 (en) 1987-01-12 1988-01-12 Light filters for microelectronics

Publications (2)

Publication Number Publication Date
DE3856007D1 true DE3856007D1 (de) 1997-10-02
DE3856007T2 DE3856007T2 (de) 1998-02-05

Family

ID=21699277

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3856007T Expired - Fee Related DE3856007T2 (de) 1987-01-12 1988-01-12 Lichtfilter für die mikroelektronik

Country Status (6)

Country Link
EP (1) EP0298116B1 (de)
JP (1) JPH01501973A (de)
KR (1) KR960005891B1 (de)
AT (1) ATE157465T1 (de)
DE (1) DE3856007T2 (de)
WO (1) WO1988005180A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0434273B1 (de) * 1989-12-22 1997-08-20 Texas Instruments Incorporated Filter für elektromagnetische Strahlung und Herstellungsverfahren
DE4021556A1 (de) * 1990-07-06 1992-01-09 Draegerwerk Ag Vorrichtung zur messung der konzentration von gas- und/oder dampffoermigen komponenten eines gasgemisches
AU5664196A (en) * 1995-04-17 1996-11-07 Brewer Science, Inc. Modified poly(maleic anhydride-co-styrene) and related polym ers as a base for color filters
JP4111281B2 (ja) * 1997-04-15 2008-07-02 共同印刷株式会社 液晶表示用カラーフィルタ
JP2002278056A (ja) * 2001-03-16 2002-09-27 Sumitomo Chem Co Ltd 着色感光性樹脂組成物
EP1388025A2 (de) * 2001-05-15 2004-02-11 Showa Denko K.K. Lichtempfindliche farbzusammensetzung, damit hergestellter farbfilter und verfahren zu ihren herstellung
AU2002350394A1 (en) * 2001-11-15 2003-06-10 Silicon Vision Ag Colour-filter array for an optical-image sensor
JP4657147B2 (ja) * 2006-05-24 2011-03-23 住友化学株式会社 着色感光性樹脂組成物、カラーフィルタ、イメージセンサおよびカメラシステム
KR101368585B1 (ko) 2009-06-15 2014-02-28 제이에스알 가부시끼가이샤 감방사선성 수지 조성물, 레지스트 패턴 형성 방법, 화합물 및 중합체

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4345011A (en) * 1978-01-30 1982-08-17 Eastman Kodak Company Color imaging devices and color filter arrays using photo-bleachable dyes
JPS55126487A (en) * 1979-03-26 1980-09-30 Fuji Photo Film Co Ltd Colored-picture forming method
US4315978A (en) * 1980-03-06 1982-02-16 Eastman Kodak Company Solid-state color imaging device having a color filter array using a photocrosslinkable barrier
NL8103146A (nl) * 1980-07-03 1982-02-01 Dainippon Screen Mfg Werkwijze voor het vervaardigen van streepzeven.
JPS5840507A (ja) * 1981-09-02 1983-03-09 Sharp Corp 固体撮像素子におけるカラ−フイルタ−の製造方法
US4355087A (en) * 1981-09-04 1982-10-19 Eastman Kodak Company Color imaging device having a color filter array using a metal salt of a long-chain fatty acid as a barrier
JPS58100108A (ja) * 1981-12-10 1983-06-14 Victor Co Of Japan Ltd 色フイルタ素子
JPS6033506A (ja) * 1983-08-04 1985-02-20 Seiko Instr & Electronics Ltd カラ−固体撮像素子の製造方法
JPS60184204A (ja) * 1984-03-02 1985-09-19 Toray Ind Inc カラ−フイルタ用耐熱性着色ペ−スト
JPH0690324B2 (ja) * 1984-03-02 1994-11-14 東レ株式会社 カラ−フイルタ用耐熱着色ペ−スト
JPS60237403A (ja) * 1984-05-10 1985-11-26 Toppan Printing Co Ltd カラ−フィルタ−およびその製造方法
JPS6177804A (ja) * 1984-09-25 1986-04-21 Kyodo Printing Co Ltd カラ−フィルタの製造方法
JPS6199102A (ja) * 1984-10-17 1986-05-17 Sanyo Kokusaku Pulp Co Ltd カラ−フイルタ−の製法
JPH0782124B2 (ja) * 1985-02-05 1995-09-06 共同印刷株式会社 カラーフィルタの製造方法
JPH0690325B2 (ja) * 1985-05-08 1994-11-14 東レ株式会社 カラ−フイルタ
JPS62150202A (ja) * 1985-12-24 1987-07-04 Seiko Epson Corp カラ−フイルタ−の製造方法
FR2595148B1 (fr) * 1986-02-28 1988-04-29 Commissariat Energie Atomique Filtres colores, leur procede de fabrication et solution utilisable pour la mise en oeuvre de ce procede

Also Published As

Publication number Publication date
KR890700856A (ko) 1989-04-27
ATE157465T1 (de) 1997-09-15
EP0298116A1 (de) 1989-01-11
DE3856007T2 (de) 1998-02-05
EP0298116B1 (de) 1997-08-27
KR960005891B1 (ko) 1996-05-03
EP0298116A4 (de) 1990-06-26
WO1988005180A1 (en) 1988-07-14
JPH01501973A (ja) 1989-07-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee