DE3854493D1 - Verfahren zur Herstellung eines Dünnschichtsupraleiters. - Google Patents
Verfahren zur Herstellung eines Dünnschichtsupraleiters.Info
- Publication number
- DE3854493D1 DE3854493D1 DE3854493T DE3854493T DE3854493D1 DE 3854493 D1 DE3854493 D1 DE 3854493D1 DE 3854493 T DE3854493 T DE 3854493T DE 3854493 T DE3854493 T DE 3854493T DE 3854493 D1 DE3854493 D1 DE 3854493D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- thin film
- film superconductor
- superconductor
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002887 superconductor Substances 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0801—Manufacture or treatment of filaments or composite wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/20—Permanent superconducting devices
- H10N60/203—Permanent superconducting devices comprising high-Tc ceramic materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/901—Printed circuit
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9265—Special properties
- Y10S428/93—Electric superconducting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
- Y10S505/702—Josephson junction present
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/701—Coated or thin film device, i.e. active or passive
- Y10S505/703—Microelectronic device with superconducting conduction line
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
- Y10S505/704—Wire, fiber, or cable
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31—Surface property or characteristic of web, sheet or block
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Applications Claiming Priority (17)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62322380A JP2544759B2 (ja) | 1987-12-20 | 1987-12-20 | 超電導薄膜の作成方法 |
JP62324703A JP2544761B2 (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62324708A JPH01167221A (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62324704A JPH01166419A (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62324705A JP2545422B2 (ja) | 1987-12-22 | 1987-12-22 | 複合酸化物超電導薄膜とその作製方法 |
JP62324709A JPH01167222A (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62324701A JP2544760B2 (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62324706A JP2545423B2 (ja) | 1987-12-22 | 1987-12-22 | 複合酸化物超電導薄膜とその作製方法 |
JP62324710A JPH01167223A (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62324702A JPH01167218A (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62324707A JPH01167220A (ja) | 1987-12-22 | 1987-12-22 | 超電導薄膜の作製方法 |
JP62332304A JP2525842B2 (ja) | 1987-12-29 | 1987-12-29 | 超電導線材とその製造方法 |
JP63012334A JPH01188665A (ja) | 1988-01-22 | 1988-01-22 | 超電導薄膜の作製方法 |
JP63012331A JPH01188662A (ja) | 1988-01-22 | 1988-01-22 | 超電導薄膜の作製方法 |
JP63012335A JPH0829938B2 (ja) | 1988-01-22 | 1988-01-22 | 複合酸化物超電導薄膜とその作製方法 |
JP63012332A JPH01188663A (ja) | 1988-01-22 | 1988-01-22 | 超電導薄膜の作製方法 |
JP63012333A JPH01188664A (ja) | 1988-01-22 | 1988-01-22 | 超電導薄膜の作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3854493D1 true DE3854493D1 (de) | 1995-10-26 |
DE3854493T2 DE3854493T2 (de) | 1996-05-15 |
Family
ID=27585907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3854493T Expired - Fee Related DE3854493T2 (de) | 1987-12-20 | 1988-12-20 | Verfahren zur Herstellung eines Dünnschichtsupraleiters. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5028583A (de) |
EP (1) | EP0322306B1 (de) |
KR (1) | KR970005158B1 (de) |
CA (1) | CA1339020C (de) |
DE (1) | DE3854493T2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5252543A (en) * | 1987-12-20 | 1993-10-12 | Sumitomo Electric Industries, Ltd. | Superconducting thin film and wire on a smooth substrate |
US5356474A (en) * | 1992-11-27 | 1994-10-18 | General Electric Company | Apparatus and method for making aligned Hi-Tc tape superconductors |
JP3579690B2 (ja) * | 2000-09-01 | 2004-10-20 | 独立行政法人 科学技術振興機構 | 複合酸化物系薄膜の作製方法及びその装置並びにそれにより作製した複合酸化物系薄膜。 |
ATE508482T1 (de) * | 2001-08-22 | 2011-05-15 | Int Superconductivity Tech | Hochtemperatursupraleitender josephson-kontakt, supraleitendes elektronisches bauelement damit und verfahren zur herstellung des hochtemperatursupraleitenden josephson-kontakts |
JP2003059352A (ja) * | 2001-08-22 | 2003-02-28 | Internatl Superconductivity Technology Center | 表面が平坦な高温超電導体膜 |
JP2003282981A (ja) | 2002-03-26 | 2003-10-03 | Fujitsu Ltd | ジョセフソン接合素子およびその製造方法 |
US8759257B2 (en) * | 2009-10-02 | 2014-06-24 | Ambature, Inc. | High temperature superconducting films and methods for modifying and creating same |
AU2010300364A1 (en) * | 2009-10-02 | 2012-05-24 | Ambature L.L.C. | Extremely low resistance films and methods for modifying or creating same |
-
1988
- 1988-12-20 US US07/286,860 patent/US5028583A/en not_active Expired - Lifetime
- 1988-12-20 CA CA 586516 patent/CA1339020C/en not_active Expired - Fee Related
- 1988-12-20 EP EP19880403254 patent/EP0322306B1/de not_active Expired - Lifetime
- 1988-12-20 KR KR1019880017018A patent/KR970005158B1/ko not_active IP Right Cessation
- 1988-12-20 DE DE3854493T patent/DE3854493T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CA1339020C (en) | 1997-03-25 |
EP0322306A3 (en) | 1990-02-07 |
KR970005158B1 (ko) | 1997-04-12 |
EP0322306A2 (de) | 1989-06-28 |
EP0322306B1 (de) | 1995-09-20 |
KR890011126A (ko) | 1989-08-12 |
US5028583A (en) | 1991-07-02 |
DE3854493T2 (de) | 1996-05-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3752301D1 (de) | Verfahren zur Herstellung eines Dünnschichttransistors | |
DE3886684D1 (de) | Verfahren zur Herstellung eines selbstausrichtenden Dünnschichttransistors. | |
DE68921704D1 (de) | Verfahren zur Herstellung eines Folienkondensators. | |
DE3782683D1 (de) | Verfahren zur herstellung eines duennfilmtransistors. | |
DE3853778D1 (de) | Verfahren zur Herstellung eines Halbleiterbauelements. | |
DE3854238D1 (de) | Verfahren zur Herstellung eines supraleitenden Elements. | |
DE3881077D1 (de) | Verfahren zur herstellung eines diamantfilms. | |
DE68917836D1 (de) | Verfahren zur Herstellung eines Lichtpolarisators. | |
DE69027483D1 (de) | Verfahren zur Herstellung eines Dünnfilm-Magnetkopfes | |
DE68923311D1 (de) | Verfahren zur Herstellung eines Feld-Effekt-Transistors. | |
DE69024246D1 (de) | Verfahren zur Herstellung einer Dünnschichthalbleiterlegierung | |
DE3776240D1 (de) | Verfahren zur herstellung eines ferritfilmes. | |
DE68928482D1 (de) | Verfahren zur Herstellung eines Bipolartransistors | |
DE3677951D1 (de) | Verfahren zur herstellung eines vielschichtigen strukturierten films. | |
DE68920234D1 (de) | Verfahren zur Herstellung eines oxidischen Supraleiters. | |
DE69018558D1 (de) | Verfahren zur Herstellung eines Halbleiterlasers. | |
DE3887907D1 (de) | Verfahren zur Herstellung eines hochmodularen Films. | |
DE3650500D1 (de) | Verfahren zur Herstellung eines Verbundsupraleiters | |
DE3854977D1 (de) | Verfahren zur Abscheidung eines supraleitenden dünnen Filmes | |
DE3889398D1 (de) | Verfahren zur Herstellung eines Supraleiters. | |
DE3574740D1 (de) | Verfahren zur herstellung eines keramischen films. | |
DE69013948D1 (de) | Verfahren zur Herstellung eines dünnen Filmes. | |
DE69202795D1 (de) | Verfahren zur Herstellung eines supraleitenden Kabels. | |
DE3851039D1 (de) | Verfahren zur Herstellung eines Wälzlagers. | |
DE68921795D1 (de) | Verfahren zur Herstellung eines Dünnfilmmagnetkopfes. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |