DE3854493T2 - Verfahren zur Herstellung eines Dünnschichtsupraleiters. - Google Patents

Verfahren zur Herstellung eines Dünnschichtsupraleiters.

Info

Publication number
DE3854493T2
DE3854493T2 DE19883854493 DE3854493T DE3854493T2 DE 3854493 T2 DE3854493 T2 DE 3854493T2 DE 19883854493 DE19883854493 DE 19883854493 DE 3854493 T DE3854493 T DE 3854493T DE 3854493 T2 DE3854493 T2 DE 3854493T2
Authority
DE
Germany
Prior art keywords
manufacturing
thin film
film superconductor
superconductor
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19883854493
Other languages
English (en)
Other versions
DE3854493D1 (de
Inventor
Saburo C O Itami Works Tanaka
Hideo C O Itami Works Itozaki
Kenjiro C O Itami Works Higaki
Shuji C O Itami Works Yazu
Tetsuji C O Itami Works Jodai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP62322380A external-priority patent/JP2544759B2/ja
Priority claimed from JP62324709A external-priority patent/JPH01167222A/ja
Priority claimed from JP62324708A external-priority patent/JPH01167221A/ja
Priority claimed from JP62324702A external-priority patent/JPH01167218A/ja
Priority claimed from JP62324703A external-priority patent/JP2544761B2/ja
Priority claimed from JP62324707A external-priority patent/JPH01167220A/ja
Priority claimed from JP62324705A external-priority patent/JP2545422B2/ja
Priority claimed from JP62324706A external-priority patent/JP2545423B2/ja
Priority claimed from JP62324704A external-priority patent/JPH01166419A/ja
Priority claimed from JP62324710A external-priority patent/JPH01167223A/ja
Priority claimed from JP62324701A external-priority patent/JP2544760B2/ja
Priority claimed from JP62332304A external-priority patent/JP2525842B2/ja
Priority claimed from JP63012334A external-priority patent/JPH01188665A/ja
Priority claimed from JP63012335A external-priority patent/JPH0829938B2/ja
Priority claimed from JP63012331A external-priority patent/JPH01188662A/ja
Priority claimed from JP63012332A external-priority patent/JPH01188663A/ja
Priority claimed from JP63012333A external-priority patent/JPH01188664A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE3854493D1 publication Critical patent/DE3854493D1/de
Publication of DE3854493T2 publication Critical patent/DE3854493T2/de
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/20—Permanent superconducting devices
    • H10N60/203—Permanent superconducting devices comprising high-Tc ceramic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/901—Printed circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9265—Special properties
    • Y10S428/93—Electric superconducting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/702—Josephson junction present
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/701—Coated or thin film device, i.e. active or passive
    • Y10S505/703—Microelectronic device with superconducting conduction line
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/70—High TC, above 30 k, superconducting device, article, or structured stock
    • Y10S505/704—Wire, fiber, or cable
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE19883854493 1987-12-20 1988-12-20 Verfahren zur Herstellung eines Dünnschichtsupraleiters. Expired - Fee Related DE3854493T2 (de)

Applications Claiming Priority (17)

Application Number Priority Date Filing Date Title
JP62322380A JP2544759B2 (ja) 1987-12-20 1987-12-20 超電導薄膜の作成方法
JP62324707A JPH01167220A (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62324705A JP2545422B2 (ja) 1987-12-22 1987-12-22 複合酸化物超電導薄膜とその作製方法
JP62324706A JP2545423B2 (ja) 1987-12-22 1987-12-22 複合酸化物超電導薄膜とその作製方法
JP62324704A JPH01166419A (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62324708A JPH01167221A (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62324709A JPH01167222A (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62324703A JP2544761B2 (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62324702A JPH01167218A (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62324710A JPH01167223A (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62324701A JP2544760B2 (ja) 1987-12-22 1987-12-22 超電導薄膜の作製方法
JP62332304A JP2525842B2 (ja) 1987-12-29 1987-12-29 超電導線材とその製造方法
JP63012335A JPH0829938B2 (ja) 1988-01-22 1988-01-22 複合酸化物超電導薄膜とその作製方法
JP63012334A JPH01188665A (ja) 1988-01-22 1988-01-22 超電導薄膜の作製方法
JP63012331A JPH01188662A (ja) 1988-01-22 1988-01-22 超電導薄膜の作製方法
JP63012332A JPH01188663A (ja) 1988-01-22 1988-01-22 超電導薄膜の作製方法
JP63012333A JPH01188664A (ja) 1988-01-22 1988-01-22 超電導薄膜の作製方法

Publications (2)

Publication Number Publication Date
DE3854493D1 DE3854493D1 (de) 1995-10-26
DE3854493T2 true DE3854493T2 (de) 1996-05-15

Family

ID=27585907

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19883854493 Expired - Fee Related DE3854493T2 (de) 1987-12-20 1988-12-20 Verfahren zur Herstellung eines Dünnschichtsupraleiters.

Country Status (5)

Country Link
US (1) US5028583A (de)
EP (1) EP0322306B1 (de)
KR (1) KR970005158B1 (de)
CA (1) CA1339020C (de)
DE (1) DE3854493T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5252543A (en) * 1987-12-20 1993-10-12 Sumitomo Electric Industries, Ltd. Superconducting thin film and wire on a smooth substrate
US5356474A (en) * 1992-11-27 1994-10-18 General Electric Company Apparatus and method for making aligned Hi-Tc tape superconductors
JP3579690B2 (ja) * 2000-09-01 2004-10-20 独立行政法人 科学技術振興機構 複合酸化物系薄膜の作製方法及びその装置並びにそれにより作製した複合酸化物系薄膜。
JP2003059352A (ja) * 2001-08-22 2003-02-28 Internatl Superconductivity Technology Center 表面が平坦な高温超電導体膜
DE60239941D1 (de) * 2001-08-22 2011-06-16 Juridical Foundation Hochtemperatursupraleitender josephson-kontakt, supraleitendes elektronisches bauelement damit und verfahren zur herstellung des hochtemperatursupraleitenden josephson-kontakts
JP2003282981A (ja) 2002-03-26 2003-10-03 Fujitsu Ltd ジョセフソン接合素子およびその製造方法
US9356219B2 (en) * 2009-10-02 2016-05-31 Ambature, Inc. High temperature superconducting materials and methods for modifying and creating same
US20110082045A1 (en) * 2009-10-02 2011-04-07 Gilbert Douglas J Extremely low resistance materials and methods for modifying and creating same

Also Published As

Publication number Publication date
US5028583A (en) 1991-07-02
KR890011126A (ko) 1989-08-12
DE3854493D1 (de) 1995-10-26
CA1339020C (en) 1997-03-25
KR970005158B1 (ko) 1997-04-12
EP0322306B1 (de) 1995-09-20
EP0322306A2 (de) 1989-06-28
EP0322306A3 (en) 1990-02-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee