DE68928256T2 - Verfahren zur Herstellung einer supraleitenden Dünnenschicht des Perovskit-Typs - Google Patents

Verfahren zur Herstellung einer supraleitenden Dünnenschicht des Perovskit-Typs

Info

Publication number
DE68928256T2
DE68928256T2 DE68928256T DE68928256T DE68928256T2 DE 68928256 T2 DE68928256 T2 DE 68928256T2 DE 68928256 T DE68928256 T DE 68928256T DE 68928256 T DE68928256 T DE 68928256T DE 68928256 T2 DE68928256 T2 DE 68928256T2
Authority
DE
Germany
Prior art keywords
producing
thin film
superconducting thin
perovskite type
perovskite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68928256T
Other languages
English (en)
Other versions
DE68928256D1 (de
Inventor
Atsushi Tanaka
Nobuo Kamehara
Koichi Niwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63301637A external-priority patent/JP2748457B2/ja
Priority claimed from JP1114150A external-priority patent/JP2785038B2/ja
Priority claimed from JP1144503A external-priority patent/JPH038722A/ja
Priority claimed from JP1144502A external-priority patent/JPH0310083A/ja
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Application granted granted Critical
Publication of DE68928256D1 publication Critical patent/DE68928256D1/de
Publication of DE68928256T2 publication Critical patent/DE68928256T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming superconductor layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/731—Sputter coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/73—Vacuum treating or coating
    • Y10S505/732—Evaporative coating with superconducting material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/742—Annealing
DE68928256T 1988-11-29 1989-11-29 Verfahren zur Herstellung einer supraleitenden Dünnenschicht des Perovskit-Typs Expired - Fee Related DE68928256T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP63301637A JP2748457B2 (ja) 1988-11-29 1988-11-29 超伝導膜の製造方法
JP1114150A JP2785038B2 (ja) 1989-05-09 1989-05-09 超伝導体膜の製造方法
JP1144503A JPH038722A (ja) 1989-06-06 1989-06-06 超電導膜の製造方法
JP1144502A JPH0310083A (ja) 1989-06-06 1989-06-06 超伝導膜の製造方法

Publications (2)

Publication Number Publication Date
DE68928256D1 DE68928256D1 (de) 1997-09-18
DE68928256T2 true DE68928256T2 (de) 1997-12-04

Family

ID=27470144

Family Applications (1)

Application Number Title Priority Date Filing Date
DE68928256T Expired - Fee Related DE68928256T2 (de) 1988-11-29 1989-11-29 Verfahren zur Herstellung einer supraleitenden Dünnenschicht des Perovskit-Typs

Country Status (5)

Country Link
US (2) US5141917A (de)
EP (1) EP0372808B1 (de)
KR (1) KR930008648B1 (de)
CA (1) CA2003850C (de)
DE (1) DE68928256T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5648114A (en) * 1991-12-13 1997-07-15 Symetrix Corporation Chemical vapor deposition process for fabricating layered superlattice materials
JP2625280B2 (ja) * 1991-05-30 1997-07-02 住友電気工業株式会社 酸化物超電導材料の製造方法
US5458086A (en) * 1993-10-13 1995-10-17 Superconductor Technologies, Inc. Apparatus for growing metal oxides using organometallic vapor phase epitaxy
US5849671A (en) * 1996-03-13 1998-12-15 Industrial Research Limited Separated reactants processing of high Tc superconductors
US5908813A (en) * 1997-02-14 1999-06-01 Micron Technology, Inc. Method making integrated circuit metallization with superconductor BEOL wiring
CA2342376C (en) * 2001-03-20 2013-11-12 Marco Colonna A receptor trem (triggering receptor expressed on myeloid cells) and uses thereof
US7638463B2 (en) * 2005-12-16 2009-12-29 Dowa Electronics Materials Co., Ltd. Method of forming oxide superconductor thick film

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2606698B2 (ja) * 1987-03-23 1997-05-07 株式会社 半導体エネルギー研究所 超電導セラミツクスの作製方法
JPS63241824A (ja) * 1987-03-30 1988-10-07 Fujikura Ltd 超電導体の製造方法
JPS63241825A (ja) * 1987-03-30 1988-10-07 Fujikura Ltd 超電導体の製造方法
JPS63276823A (ja) * 1987-05-06 1988-11-15 Furukawa Electric Co Ltd:The 超電導膜の製造方法

Also Published As

Publication number Publication date
CA2003850A1 (en) 1990-05-29
EP0372808B1 (de) 1997-08-13
CA2003850C (en) 1998-07-28
KR930008648B1 (ko) 1993-09-11
KR900008707A (ko) 1990-06-04
US5141917A (en) 1992-08-25
US5585332A (en) 1996-12-17
EP0372808A1 (de) 1990-06-13
DE68928256D1 (de) 1997-09-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee