DE3854977D1 - Verfahren zur Abscheidung eines supraleitenden dünnen Filmes - Google Patents

Verfahren zur Abscheidung eines supraleitenden dünnen Filmes

Info

Publication number
DE3854977D1
DE3854977D1 DE3854977T DE3854977T DE3854977D1 DE 3854977 D1 DE3854977 D1 DE 3854977D1 DE 3854977 T DE3854977 T DE 3854977T DE 3854977 T DE3854977 T DE 3854977T DE 3854977 D1 DE3854977 D1 DE 3854977D1
Authority
DE
Germany
Prior art keywords
deposition
thin film
superconducting thin
superconducting
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3854977T
Other languages
English (en)
Other versions
DE3854977T2 (de
DE3854977T3 (de
Inventor
Nobuhiko Fujita
Naoji Fujimori
Hideo Itozaki
Saburo Tanaka
Keizo Harada
Tetsuji Jodai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=27550745&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3854977(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE3854977D1 publication Critical patent/DE3854977D1/de
Publication of DE3854977T2 publication Critical patent/DE3854977T2/de
Publication of DE3854977T3 publication Critical patent/DE3854977T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/45—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides
    • C04B35/4504—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on copper oxide or solid solutions thereof with other oxides containing rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0268—Manufacture or treatment of devices comprising copper oxide
    • H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
    • H10N60/0408—Processes for depositing or forming copper oxide superconductor layers by sputtering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/816—Sputtering, including coating, forming, or etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/818—Coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/818—Coating
    • Y10S505/819—Vapor deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
DE3854977T 1987-03-14 1988-03-14 Verfahren zur Abscheidung eines supraleitenden dünnen Filmes Expired - Lifetime DE3854977T3 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP5921487 1987-03-14
JP6031787 1987-03-16
JP6320387 1987-03-18
JP6320687 1987-03-18
JP6320487 1987-03-18
JP6320587 1987-03-18

Publications (3)

Publication Number Publication Date
DE3854977D1 true DE3854977D1 (de) 1996-03-21
DE3854977T2 DE3854977T2 (de) 1996-07-18
DE3854977T3 DE3854977T3 (de) 2002-11-21

Family

ID=27550745

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3854977T Expired - Lifetime DE3854977T3 (de) 1987-03-14 1988-03-14 Verfahren zur Abscheidung eines supraleitenden dünnen Filmes

Country Status (6)

Country Link
US (1) US5057201A (de)
EP (1) EP0284489B2 (de)
KR (1) KR0132061B1 (de)
AU (1) AU598113B2 (de)
CA (1) CA1331868C (de)
DE (1) DE3854977T3 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1339019C (en) * 1987-02-05 1997-03-25 Sumitomo Electric Industries, Ltd. Process for preparing a superconducting thin film
AU615014B2 (en) * 1987-02-17 1991-09-19 Sumitomo Electric Industries, Ltd. Superconducting thin film and wire and a process for producing the same
AU598113B2 (en) * 1987-03-14 1990-06-14 Sumitomo Electric Industries, Ltd. Process for depositing a superconducting thin film
DE3711842A1 (de) * 1987-04-08 1988-10-27 Asea Brown Boveri Faserbuendel und verfahren zu seiner herstellung
CA1326976C (en) * 1987-05-26 1994-02-15 Satoshi Takano Superconducting member
US5206214A (en) * 1987-05-31 1993-04-27 Sumitomo Electric Industries, Ltd. Method of preparing thin film of superconductor
US4908346A (en) * 1987-07-01 1990-03-13 Eastman Kodak Company Crystalline rare earth alkaline earth copper oxide thick film circuit element with superconducting onset transition temperature in excess of 77%
EP0300499B2 (de) * 1987-07-24 1998-08-19 Matsushita Electric Industrial Co., Ltd. Zusammengesetzte supraleitende Schicht
KR0125876B1 (ko) * 1988-02-25 1997-12-18 나까하라 쯔네오 초전도 재료와 그 제조 방법
EP0361265A1 (de) * 1988-09-29 1990-04-04 Siemens Aktiengesellschaft Herstellung von dünnen Schichten eines Hochtemperatur-Supraleiters (HTSL) durch ein plasmaaktiviertes PVD-Verfahren
DE3930063A1 (de) * 1988-10-10 1990-04-12 Licentia Gmbh Verfahren zum abscheiden einer schicht aus einem hochtemperatur-supraleiter
JPH02260674A (ja) * 1989-03-31 1990-10-23 Sumitomo Electric Ind Ltd トンネル型ジョセフソン素子とその作製方法
RO107134B1 (ro) * 1989-04-18 1993-09-30 Usinor Sacilor Procedeu pentru colorarea suprafetelor materialelor metalice
US5395704A (en) * 1992-11-19 1995-03-07 North Western Univ. Technology Transfer Prog. Solid-oxide fuel cells
JPH0715051A (ja) * 1993-06-24 1995-01-17 Mitsubishi Electric Corp Ｙｂｃｏ超電導薄膜の製造方法
US6207027B1 (en) 1997-05-07 2001-03-27 Applied Materials, Inc. Method to reduce overhead time in an ion metal plasma process
US7250196B1 (en) * 1999-10-26 2007-07-31 Basic Resources, Inc. System and method for plasma plating
US8791018B2 (en) 2006-12-19 2014-07-29 Spansion Llc Method of depositing copper using physical vapor deposition

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3914389A (en) * 1974-03-22 1975-10-21 American Cyanamid Co Lanthanum oxidation catalyst and method for utilizing the same
US3932315A (en) * 1974-09-24 1976-01-13 E. I. Du Pont De Nemours & Company Superconductive barium-lead-bismuth oxides
US4107163A (en) * 1976-04-12 1978-08-15 E. I. Du Pont De Nemours And Company Perovskite-type compositions containing pentavalent Ru
US4316785A (en) † 1979-11-05 1982-02-23 Nippon Telegraph & Telephone Public Corporation Oxide superconductor Josephson junction and fabrication method therefor
JPS56109824A (en) * 1980-02-05 1981-08-31 Nippon Telegr & Teleph Corp <Ntt> Manufacture of oxide superconductive thin film
JPS6096599A (ja) * 1983-10-31 1985-05-30 Nippon Telegr & Teleph Corp <Ntt> 酸化物超伝導体薄膜の製造方法
CA1339019C (en) † 1987-02-05 1997-03-25 Sumitomo Electric Industries, Ltd. Process for preparing a superconducting thin film
CA1338396C (en) † 1987-02-05 1996-06-18 Kazuo Sawada Process for manufacturing a superconducting wire of compound oxide-type ceramics
AU615014B2 (en) * 1987-02-17 1991-09-19 Sumitomo Electric Industries, Ltd. Superconducting thin film and wire and a process for producing the same
AU598113B2 (en) * 1987-03-14 1990-06-14 Sumitomo Electric Industries, Ltd. Process for depositing a superconducting thin film
DE3872430T2 (de) * 1987-04-10 1992-12-03 American Telephone & Telegraph Verfahren zur herstellung einer schicht aus supraleitendem material.
EP0287325B1 (de) * 1987-04-13 1994-07-27 Hitachi, Ltd. Supraleitendes Material und Verfahren zu dessen Herstellung
JPH0772349B2 (ja) * 1987-05-12 1995-08-02 住友電気工業株式会社 大面積化合物薄膜の作製方法および装置
US4992415A (en) * 1987-07-31 1991-02-12 Olin Corporation Method for fabricating ceramic superconductors

Also Published As

Publication number Publication date
AU598113B2 (en) 1990-06-14
US5057201A (en) 1991-10-15
KR0132061B1 (ko) 1998-04-24
DE3854977T2 (de) 1996-07-18
EP0284489B2 (de) 2002-04-10
CA1331868C (en) 1994-09-06
AU1309388A (en) 1988-09-15
EP0284489B1 (de) 1996-02-07
DE3854977T3 (de) 2002-11-21
KR880011827A (ko) 1988-10-31
EP0284489A1 (de) 1988-09-28

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings