DE3837883A1 - Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung - Google Patents

Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung

Info

Publication number
DE3837883A1
DE3837883A1 DE3837883A DE3837883A DE3837883A1 DE 3837883 A1 DE3837883 A1 DE 3837883A1 DE 3837883 A DE3837883 A DE 3837883A DE 3837883 A DE3837883 A DE 3837883A DE 3837883 A1 DE3837883 A1 DE 3837883A1
Authority
DE
Germany
Prior art keywords
electrode
accelerometer
center electrode
electrode structure
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE3837883A
Other languages
German (de)
English (en)
Inventor
Ari Lehto
Kalervo Jaeppinen
Anna-Maija Kaerkkaeinen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of DE3837883A1 publication Critical patent/DE3837883A1/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
DE3837883A 1987-11-09 1988-11-08 Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung Ceased DE3837883A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (sv) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och förfarande för framställning därav

Publications (1)

Publication Number Publication Date
DE3837883A1 true DE3837883A1 (de) 1989-05-18

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3837883A Ceased DE3837883A1 (de) 1987-11-09 1988-11-08 Kapazitiver beschleunigungsmesser und verfahren zu seiner herstellung

Country Status (10)

Country Link
JP (1) JPH01259265A (sv)
KR (1) KR890008569A (sv)
CN (1) CN1022136C (sv)
DE (1) DE3837883A1 (sv)
ES (1) ES2012420A6 (sv)
FI (1) FI81915C (sv)
FR (1) FR2622975B1 (sv)
GB (1) GB2212274A (sv)
IT (1) IT1224301B (sv)
SE (1) SE468067B (sv)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032828A1 (de) * 1989-10-18 1991-04-25 Hitachi Ltd Beschleunigungsdetektor
DE4100451A1 (de) * 1990-01-12 1991-07-25 Nissan Motor Halbleiterbeschleunigungsmesser
DE4222472A1 (de) * 1992-07-09 1994-01-13 Bosch Gmbh Robert Beschleunigungssensor
WO2002082101A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver beschleunigungssensor
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
US7343801B2 (en) 2001-03-08 2008-03-18 Conti Temic Microelectronic Gmbh Micromechanical capacitive acceleration sensor
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
DE4000903C1 (sv) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (ja) * 1990-09-07 1998-08-13 株式会社日立製作所 半導体容量式加速度センサ及びその製造方法
JP2533272B2 (ja) * 1992-11-17 1996-09-11 住友電気工業株式会社 半導体デバイスの製造方法
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
JP2005077349A (ja) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp 加速度センサ
WO2007104289A1 (de) 2006-03-10 2007-09-20 Conti Temic Microelectronic Gmbh Mikromechanischer drehratensensor
EP2259018B1 (en) * 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
WO2013165348A1 (en) * 2012-04-30 2013-11-07 Hewlett-Packard Development Company Control signal based on a command tapped by a user
CN106771361B (zh) * 2016-12-15 2023-04-25 西安邮电大学 双电容式微机械加速度传感器及基于其的温度自补偿系统
CN106841683B (zh) * 2017-04-06 2023-09-01 中国工程物理研究院电子工程研究所 石英摆式加速度计及其制备方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3223987A1 (de) * 1981-07-02 1983-01-20 Centre Electronique Horloger S.A., 2000 Neuchâtel Beschleunigungsmesser
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197572A (ja) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd 半導体加速度センサの製造方法
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3223987A1 (de) * 1981-07-02 1983-01-20 Centre Electronique Horloger S.A., 2000 Neuchâtel Beschleunigungsmesser
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
US-Z.: IEEE Transactions on Electron Devices, Vol. ED-26, No. 12, Dec. 1979, S. 1911-1917 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4032828A1 (de) * 1989-10-18 1991-04-25 Hitachi Ltd Beschleunigungsdetektor
DE4100451A1 (de) * 1990-01-12 1991-07-25 Nissan Motor Halbleiterbeschleunigungsmesser
DE4222472A1 (de) * 1992-07-09 1994-01-13 Bosch Gmbh Robert Beschleunigungssensor
DE4222472C2 (de) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Beschleunigungssensor
US7343801B2 (en) 2001-03-08 2008-03-18 Conti Temic Microelectronic Gmbh Micromechanical capacitive acceleration sensor
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
WO2002082101A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver beschleunigungssensor
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor

Also Published As

Publication number Publication date
FI874942A (fi) 1989-05-10
FI81915C (sv) 1990-12-10
FR2622975B1 (fr) 1991-07-12
CN1022136C (zh) 1993-09-15
CN1033110A (zh) 1989-05-24
GB8826263D0 (en) 1988-12-14
GB2212274A (en) 1989-07-19
ES2012420A6 (es) 1990-03-16
IT1224301B (it) 1990-10-04
SE8804039D0 (sv) 1988-11-08
JPH01259265A (ja) 1989-10-16
FI874942A0 (fi) 1987-11-09
FR2622975A1 (fr) 1989-05-12
KR890008569A (ko) 1989-07-12
FI81915B (fi) 1990-08-31
IT8848532A0 (it) 1988-11-08
SE468067B (sv) 1992-10-26

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection