CN1022136C - 容性加速度计及其制造方法 - Google Patents

容性加速度计及其制造方法 Download PDF

Info

Publication number
CN1022136C
CN1022136C CN88107822A CN88107822A CN1022136C CN 1022136 C CN1022136 C CN 1022136C CN 88107822 A CN88107822 A CN 88107822A CN 88107822 A CN88107822 A CN 88107822A CN 1022136 C CN1022136 C CN 1022136C
Authority
CN
China
Prior art keywords
central electrode
electrode
accelerometer
electrode member
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN88107822A
Other languages
English (en)
Chinese (zh)
Other versions
CN1033110A (zh
Inventor
阿里·利托
卡勒沃·雅平伦
安娜-迈雅·卡尔凯伦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vaisala Oy
Original Assignee
Vaisala Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vaisala Oy filed Critical Vaisala Oy
Publication of CN1033110A publication Critical patent/CN1033110A/zh
Application granted granted Critical
Publication of CN1022136C publication Critical patent/CN1022136C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
CN88107822A 1987-11-09 1988-11-09 容性加速度计及其制造方法 Expired - Lifetime CN1022136C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI874942A FI81915C (sv) 1987-11-09 1987-11-09 Kapacitiv accelerationsgivare och förfarande för framställning därav
FI874942 1987-11-09

Publications (2)

Publication Number Publication Date
CN1033110A CN1033110A (zh) 1989-05-24
CN1022136C true CN1022136C (zh) 1993-09-15

Family

ID=8525381

Family Applications (1)

Application Number Title Priority Date Filing Date
CN88107822A Expired - Lifetime CN1022136C (zh) 1987-11-09 1988-11-09 容性加速度计及其制造方法

Country Status (10)

Country Link
JP (1) JPH01259265A (sv)
KR (1) KR890008569A (sv)
CN (1) CN1022136C (sv)
DE (1) DE3837883A1 (sv)
ES (1) ES2012420A6 (sv)
FI (1) FI81915C (sv)
FR (1) FR2622975B1 (sv)
GB (1) GB2212274A (sv)
IT (1) IT1224301B (sv)
SE (1) SE468067B (sv)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4983485A (en) * 1988-04-13 1991-01-08 Shikoku Chemicals Corporation Positively chargeable toner
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US5228341A (en) * 1989-10-18 1993-07-20 Hitachi, Ltd. Capacitive acceleration detector having reduced mass portion
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JPH03210478A (ja) * 1990-01-12 1991-09-13 Nissan Motor Co Ltd 半導体加速度センサ
DE4000903C1 (sv) * 1990-01-15 1990-08-09 Robert Bosch Gmbh, 7000 Stuttgart, De
JP2786321B2 (ja) * 1990-09-07 1998-08-13 株式会社日立製作所 半導体容量式加速度センサ及びその製造方法
DE4222472C2 (de) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Beschleunigungssensor
JP2533272B2 (ja) * 1992-11-17 1996-09-11 住友電気工業株式会社 半導体デバイスの製造方法
FR2698447B1 (fr) * 1992-11-23 1995-02-03 Suisse Electronique Microtech Cellule de mesure micro-usinée.
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117630B4 (de) * 2001-04-09 2005-12-29 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
EP1243930A1 (de) 2001-03-08 2002-09-25 EADS Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
DE10117257A1 (de) * 2001-04-06 2002-10-17 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
JP2005077349A (ja) * 2003-09-03 2005-03-24 Mitsubishi Electric Corp 加速度センサ
US8342022B2 (en) 2006-03-10 2013-01-01 Conti Temic Microelectronic Gmbh Micromechanical rotational speed sensor
EP2259018B1 (en) 2009-05-29 2017-06-28 Infineon Technologies AG Gap control for die or layer bonding using intermediate layers of a micro-electromechanical system
GB2518050A (en) * 2012-04-30 2015-03-11 Hewlett Packard Development Co Control Signal Based On a Command Tapped By A User
CN106771361B (zh) * 2016-12-15 2023-04-25 西安邮电大学 双电容式微机械加速度传感器及基于其的温度自补偿系统
CN117368525A (zh) * 2017-04-06 2024-01-09 中国工程物理研究院电子工程研究所 石英摆式加速度计

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPS6197572A (ja) * 1984-10-19 1986-05-16 Nissan Motor Co Ltd 半導体加速度センサの製造方法
US4744249A (en) * 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
DE3625411A1 (de) * 1986-07-26 1988-02-04 Messerschmitt Boelkow Blohm Kapazitiver beschleunigungssensor
DE3703793A1 (de) * 1987-02-07 1988-08-18 Messerschmitt Boelkow Blohm Detektorelement

Also Published As

Publication number Publication date
SE8804039D0 (sv) 1988-11-08
FR2622975B1 (fr) 1991-07-12
DE3837883A1 (de) 1989-05-18
JPH01259265A (ja) 1989-10-16
ES2012420A6 (es) 1990-03-16
IT1224301B (it) 1990-10-04
FI81915B (fi) 1990-08-31
IT8848532A0 (it) 1988-11-08
FI874942A0 (fi) 1987-11-09
GB2212274A (en) 1989-07-19
FI874942A (fi) 1989-05-10
SE468067B (sv) 1992-10-26
KR890008569A (ko) 1989-07-12
FR2622975A1 (fr) 1989-05-12
CN1033110A (zh) 1989-05-24
GB8826263D0 (en) 1988-12-14
FI81915C (sv) 1990-12-10

Similar Documents

Publication Publication Date Title
CN1022136C (zh) 容性加速度计及其制造方法
KR101286028B1 (ko) 용량형 가속도 센서 및 용량형 가속도 센서의 제조 방법
US4891984A (en) Acceleration detecting apparatus formed by semiconductor
US10274512B2 (en) Microelectromechanical sensor device with reduced stress sensitivity
CN1677056A (zh) 惯性传感器
CN1721858A (zh) 惯性传感器
US7803649B2 (en) Angular rate sensor and method of manufacturing the same
CN1242913C (zh) 陀螺仪及其制造方法
CN101038298A (zh) 对称直梁结构电容式微加速度传感器及其制作方法
CN1677705A (zh) 电子元件、电子元件模块以及制造电子元件的方法
CN107404697A (zh) 具有梳齿式电极的mems声换能器及对应的制造方法
CN1816747A (zh) 单测试质量块的三轴mems传感器
CN1189753C (zh) 加速度传感器及其制造方法和包含该传感器的检测装置
JP2001147236A (ja) 機械的応力に対して不感受性であるマイクロ電気機械構造体
CN1384042A (zh) 制作悬式微结构的方法
CN206640794U (zh) Mems声换能器及电子设备
USRE41889E1 (en) Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced
CN101317263B (zh) 传感器装置及其制造方法
CN1197170C (zh) 半导体结构及其制造方法
CN110113700A (zh) 一种mems结构
JP4591000B2 (ja) 半導体力学量センサおよびその製造方法
US6430999B2 (en) Semiconductor physical quantity sensor including frame-shaped beam surrounded by groove
US20180155188A1 (en) Integrated semiconductor device and manufacturing method
CN1853106A (zh) 三轴加速计
WO1989000294A2 (en) Accelerometer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CX01 Expiry of patent term