DE3785129T2 - Drahtverbindungsvorrichtung. - Google Patents
Drahtverbindungsvorrichtung.Info
- Publication number
- DE3785129T2 DE3785129T2 DE8787307230T DE3785129T DE3785129T2 DE 3785129 T2 DE3785129 T2 DE 3785129T2 DE 8787307230 T DE8787307230 T DE 8787307230T DE 3785129 T DE3785129 T DE 3785129T DE 3785129 T2 DE3785129 T2 DE 3785129T2
- Authority
- DE
- Germany
- Prior art keywords
- reference character
- pattern
- wire
- generating
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H10W72/071—
-
- H10P72/0446—
-
- H10W72/0711—
-
- H10W72/07531—
-
- H10W72/536—
-
- H10W72/5363—
-
- H10W72/552—
-
- H10W72/932—
-
- H10W90/756—
Landscapes
- Wire Bonding (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61206555A JPS6362242A (ja) | 1986-09-02 | 1986-09-02 | ワイヤボンディング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3785129D1 DE3785129D1 (de) | 1993-05-06 |
| DE3785129T2 true DE3785129T2 (de) | 1993-07-15 |
Family
ID=16525330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE8787307230T Expired - Lifetime DE3785129T2 (de) | 1986-09-02 | 1987-08-14 | Drahtverbindungsvorrichtung. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4855928A (enExample) |
| EP (1) | EP0262777B1 (enExample) |
| JP (1) | JPS6362242A (enExample) |
| KR (1) | KR900007688B1 (enExample) |
| DE (1) | DE3785129T2 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3708795C2 (de) * | 1987-03-18 | 1995-08-03 | Gsf Forschungszentrum Umwelt | Verfahren zur Größenselektion in Videoechtzeit |
| EP0341944A3 (en) * | 1988-05-10 | 1991-06-26 | Gec Plessey Telecommunications Limited | Improvements in or relating to methods of and apparatus for registration |
| US4972311A (en) * | 1988-08-15 | 1990-11-20 | Kulicke And Soffa Industries Inc. | X-Y table error mapping apparatus and method |
| JP2534132B2 (ja) * | 1989-05-15 | 1996-09-11 | 株式会社新川 | ボンデイング方法 |
| JPH039540A (ja) * | 1989-06-07 | 1991-01-17 | Shinkawa Ltd | ワイヤボンデイング方法 |
| JPH07111998B2 (ja) * | 1989-08-18 | 1995-11-29 | 株式会社東芝 | ワイヤボンディング検査装置 |
| JP2668734B2 (ja) * | 1989-10-23 | 1997-10-27 | 株式会社新川 | ワイヤボンデイング方法 |
| US5043589A (en) * | 1990-05-18 | 1991-08-27 | Trigon/Adcotech | Semiconductor device inspection apparatus using a plurality of reflective elements |
| JPH081920B2 (ja) * | 1990-06-08 | 1996-01-10 | 株式会社東芝 | ワイヤボンディング装置 |
| US5459672A (en) * | 1990-07-30 | 1995-10-17 | Hughes Aircraft Company | Electrical interconnect integrity measuring method |
| US5119436A (en) * | 1990-09-24 | 1992-06-02 | Kulicke And Soffa Industries, Inc | Method of centering bond positions |
| JP2913565B2 (ja) * | 1991-01-31 | 1999-06-28 | 株式会社新川 | ワイヤループ曲がり検査方法及びその装置 |
| US5216277A (en) * | 1991-10-31 | 1993-06-01 | National Semiconductor Corporation | Lead frames with location eye point markings |
| JPH07144180A (ja) * | 1992-08-21 | 1995-06-06 | Supply Control:Kk | 洗浄器 |
| JP2823454B2 (ja) * | 1992-12-03 | 1998-11-11 | 株式会社東芝 | ワイヤボンディング装置 |
| US5657394A (en) * | 1993-06-04 | 1997-08-12 | Integrated Technology Corporation | Integrated circuit probe card inspection system |
| US5548326A (en) * | 1993-10-06 | 1996-08-20 | Cognex Corporation | Efficient image registration |
| US5640199A (en) * | 1993-10-06 | 1997-06-17 | Cognex Corporation | Automated optical inspection apparatus |
| US5532739A (en) * | 1993-10-06 | 1996-07-02 | Cognex Corporation | Automated optical inspection apparatus |
| DE69311347T2 (de) * | 1993-11-30 | 1997-09-18 | Sgs Thomson Microelectronics | Einrichtung für die elektrische Verbindung von integrierten Schaltungen |
| US5581632A (en) * | 1994-05-02 | 1996-12-03 | Cognex Corporation | Method and apparatus for ball bond inspection system |
| US6061467A (en) * | 1994-05-02 | 2000-05-09 | Cognex Corporation | Automated optical inspection apparatus using nearest neighbor interpolation |
| US5642158A (en) * | 1994-05-02 | 1997-06-24 | Cognex Corporation | Method and apparatus to detect capillary indentations |
| US6035066A (en) * | 1995-06-02 | 2000-03-07 | Cognex Corporation | Boundary tracking method and apparatus to find leads |
| US5702049A (en) * | 1995-06-07 | 1997-12-30 | West Bond Inc. | Angled wire bonding tool and alignment method |
| US5951475A (en) * | 1997-09-25 | 1999-09-14 | International Business Machines Corporation | Methods and apparatus for registering CT-scan data to multiple fluoroscopic images |
| US6299050B1 (en) | 2000-02-24 | 2001-10-09 | Hitachi, Ltd. | Friction stir welding apparatus and method |
| US6381016B1 (en) * | 2000-07-14 | 2002-04-30 | Advanced Micro Devices, Inc. | Lead width inspection system and methods |
| JP4547117B2 (ja) * | 2001-09-25 | 2010-09-22 | 株式会社雄島試作研究所 | 位置決め機構の制御装置 |
| EP1346793A1 (de) * | 2002-03-19 | 2003-09-24 | ESEC Trading S.A. | Verfahren und Einrichtung für die Bestimmung der vektoriellen Distanz zwischen der Kapillare und dem Bilderkennungssystem eines Wire Bonders |
| TWI221648B (en) * | 2002-03-19 | 2004-10-01 | Esec Trading Sa | Method and device for determining the vectorial distance between the capillary and the image recognition system of a wire bonder |
| US8777086B2 (en) * | 2012-04-20 | 2014-07-15 | Asm Technology Singapore Pte. Ltd. | Image-assisted system for adjusting a bonding tool |
| US12118726B2 (en) * | 2021-01-15 | 2024-10-15 | Kulicke And Soffa Industries, Inc. | Intelligent pattern recognition systems for wire bonding and other electronic component packaging equipment, and related methods |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4070117A (en) * | 1972-06-12 | 1978-01-24 | Kasper Instruments, Inc. | Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask |
| JPS5080763A (enExample) * | 1973-11-14 | 1975-07-01 | ||
| US4163212A (en) * | 1977-09-08 | 1979-07-31 | Excellon Industries | Pattern recognition system |
| US4233625A (en) * | 1978-11-03 | 1980-11-11 | Teledyne, Inc. | Television monitoring system for automatically aligning semiconductor devices during manufacture |
| JPS55154740A (en) * | 1979-05-23 | 1980-12-02 | Hitachi Ltd | Wire bonding device |
| US4450579A (en) * | 1980-06-10 | 1984-05-22 | Fujitsu Limited | Recognition method and apparatus |
| JPS57157378A (en) * | 1981-03-25 | 1982-09-28 | Hitachi Ltd | Setting method of binary-coded threshold level |
| JPS5951536A (ja) * | 1982-09-14 | 1984-03-26 | Fujitsu Ltd | パタ−ン認識方法及びその装置 |
| US4672557A (en) * | 1983-03-26 | 1987-06-09 | Disco Abrasive Systems, Ltd. | Automatic accurate alignment system |
| JPS61102747A (ja) * | 1984-10-26 | 1986-05-21 | Marine Instr Co Ltd | ワイヤ−ボンダ−の認識パタ−ン変更方法 |
| JPS61190953A (ja) * | 1985-02-20 | 1986-08-25 | Hitachi Tokyo Electronics Co Ltd | ワイヤボンダ |
| US4750836A (en) * | 1986-09-18 | 1988-06-14 | Rca Corporation | Method of measuring misalignment between superimposed patterns |
-
1986
- 1986-09-02 JP JP61206555A patent/JPS6362242A/ja active Granted
-
1987
- 1987-08-14 DE DE8787307230T patent/DE3785129T2/de not_active Expired - Lifetime
- 1987-08-14 EP EP19870307230 patent/EP0262777B1/en not_active Expired - Lifetime
- 1987-09-02 US US07/092,369 patent/US4855928A/en not_active Expired - Lifetime
- 1987-09-02 KR KR1019870009698A patent/KR900007688B1/ko not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6362242A (ja) | 1988-03-18 |
| JPH0453094B2 (enExample) | 1992-08-25 |
| KR880004565A (ko) | 1988-06-07 |
| KR900007688B1 (ko) | 1990-10-18 |
| EP0262777A2 (en) | 1988-04-06 |
| US4855928A (en) | 1989-08-08 |
| EP0262777A3 (en) | 1989-08-23 |
| EP0262777B1 (en) | 1993-03-31 |
| DE3785129D1 (de) | 1993-05-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8320 | Willingness to grant licences declared (paragraph 23) |