DE3769224D1 - Verfahren und vorrichtung zum festlegen der spalttiefe von in mengen angefertigten magnetischen duennfilm-wandlern. - Google Patents

Verfahren und vorrichtung zum festlegen der spalttiefe von in mengen angefertigten magnetischen duennfilm-wandlern.

Info

Publication number
DE3769224D1
DE3769224D1 DE8787301276T DE3769224T DE3769224D1 DE 3769224 D1 DE3769224 D1 DE 3769224D1 DE 8787301276 T DE8787301276 T DE 8787301276T DE 3769224 T DE3769224 T DE 3769224T DE 3769224 D1 DE3769224 D1 DE 3769224D1
Authority
DE
Germany
Prior art keywords
determining
thick film
magnetic thick
film converters
converters manufactured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787301276T
Other languages
English (en)
Inventor
Mark Anthony Church
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3769224D1 publication Critical patent/DE3769224D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3173Batch fabrication, i.e. producing a plurality of head structures in one batch
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/187Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/1871Shaping or contouring of the transducing or guiding surface
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/3116Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers
    • G11B5/3133Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
    • G11B5/314Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3166Testing or indicating in relation thereto, e.g. before the fabrication is completed
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49021Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032Fabricating head structure or component thereof
    • Y10T29/49036Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49037Using reference point/surface to facilitate measuring
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/4902Electromagnet, transformer or inductor
    • Y10T29/49021Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49032Fabricating head structure or component thereof
    • Y10T29/49036Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49043Depositing magnetic layer or coating
    • Y10T29/49044Plural magnetic deposition layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/53Means to assemble or disassemble
    • Y10T29/53022Means to assemble or disassemble with means to test work or product
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/53Means to assemble or disassemble
    • Y10T29/53026Means to assemble or disassemble with randomly actuated stopping or disabling means
    • Y10T29/5303Responsive to condition of work or product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Heads (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE8787301276T 1986-07-15 1987-02-13 Verfahren und vorrichtung zum festlegen der spalttiefe von in mengen angefertigten magnetischen duennfilm-wandlern. Expired - Fee Related DE3769224D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/885,894 US4689877A (en) 1985-08-29 1986-07-15 Method and apparatus for controlling the throat height of batch fabricated thin film magnetic transducers

Publications (1)

Publication Number Publication Date
DE3769224D1 true DE3769224D1 (de) 1991-05-16

Family

ID=25387928

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787301276T Expired - Fee Related DE3769224D1 (de) 1986-07-15 1987-02-13 Verfahren und vorrichtung zum festlegen der spalttiefe von in mengen angefertigten magnetischen duennfilm-wandlern.

Country Status (4)

Country Link
US (1) US4689877A (de)
EP (1) EP0253460B1 (de)
JP (1) JPH0697492B2 (de)
DE (1) DE3769224D1 (de)

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US4861398A (en) * 1987-12-04 1989-08-29 Hitachi, Ltd. Method for making a thin film magnetic head
US4839197A (en) * 1988-04-13 1989-06-13 Storage Technology Corporation Process for fabricating thin film magnetic recording heads having precision control of the width tolerance of the upper pole tip
JPH0215407A (ja) * 1988-07-04 1990-01-19 Mitsubishi Electric Corp 磁気ヘッド
US5023991A (en) * 1988-08-31 1991-06-18 Digital Equipment Corporation Electrical guide for tight tolerance machining
US5175938A (en) * 1988-08-31 1993-01-05 Digital Equipment Corporation Electrical guide for tight tolerance machining
US4914868A (en) * 1988-09-28 1990-04-10 International Business Machines Corporation Lapping control system for magnetic transducers
US4912883A (en) * 1989-02-13 1990-04-03 International Business Machines Corporation Lapping control system for magnetic transducers
NL9100191A (nl) * 1991-02-04 1992-09-01 Philips Nv Werkwijze voor het vervaardigen van een magneetkop en magneetkop vervaardigd volgens de werkwijze.
US5210667A (en) * 1991-02-19 1993-05-11 International Business Machines Corporation Magnetic recording heads employing multiple lapping guides
US5065483A (en) * 1991-02-19 1991-11-19 International Business Machines Corporation Method of lapping magnetic recording heads
US5217819A (en) * 1991-05-08 1993-06-08 U.S. Philips Corporation Method of manufacturing a thin-film magnetic head and magnetic head
US5335458A (en) * 1991-09-23 1994-08-09 Read-Rite Corporation Processing of magnetic head flexures with slider elements
US5361547A (en) * 1992-08-28 1994-11-08 International Business Machines Corporation Ultimate inductive head integrated lapping system
JP3199482B2 (ja) * 1992-09-11 2001-08-20 株式会社日立製作所 薄膜磁気ヘッドの製造方法
US5494473A (en) * 1993-07-07 1996-02-27 Quantum Corporation Electrical access for electrical lapping guides
WO1995002241A1 (en) * 1993-07-07 1995-01-19 Digital Equipment Corporation Electrical lapping guides for thin-film disk sliders
US5406694A (en) * 1993-11-24 1995-04-18 Rocky Mountain Magnetics, Inc. Scalable method of fabricating thin-film sliders
US5463805A (en) * 1994-02-07 1995-11-07 Seagate Technology, Inc. Method of lapping MR. sensors
US5531017A (en) * 1994-02-14 1996-07-02 International Business Machines Corporation Thin film magnetic head fabrication method
JP2846235B2 (ja) * 1994-02-17 1999-01-13 ティーディーケイ株式会社 ヘッドピース集合体加工用治具及び薄膜磁気ヘッドの製造方法
JP2784431B2 (ja) * 1994-04-19 1998-08-06 インターナショナル・ビジネス・マシーンズ・コーポレイション 薄膜磁気書込みヘッド、読取り/書込み磁気ヘッド、ディスク駆動装置及び薄膜磁気書込みヘッドの製造方法
US5588199A (en) * 1994-11-14 1996-12-31 International Business Machines Corporation Lapping process for a single element magnetoresistive head
US5612843A (en) * 1994-12-06 1997-03-18 Packard; Edward L. Method for accurately setting the gap in an inductive magnetic head
US5620356A (en) * 1995-01-27 1997-04-15 Lackey; Stanley Row tool balance and bow correction apparatus
US5632669A (en) * 1995-05-26 1997-05-27 Censtor Corporation Interactive method for lapping transducers
US5722155A (en) * 1996-01-11 1998-03-03 Seagate Technology, Inc. Machining guide method for magnetic recording reproduce heads
US6047224A (en) * 1996-04-10 2000-04-04 Seagate Techology, Inc. Machining guide for magnetic recording reproduce heads
US5742995A (en) * 1996-05-24 1998-04-28 Seagate Technology, Inc. Method to predict an accurate MR sensor dimension when viewed from abs
US5755612A (en) * 1996-10-28 1998-05-26 Seagate Technology, Inc. Small foot machining guide for recording heads
KR100422436B1 (ko) * 1996-10-29 2004-03-12 시게이트 테크놀로지 엘엘씨 개선된 전기 랩 가이드 배선 구조
CN1082867C (zh) * 1996-11-04 2002-04-17 西加特技术有限责任公司 用于研磨承载多个滑动体的条杆的装置
USRE38340E1 (en) * 1996-11-04 2003-12-02 Seagate Technology Llc Multi-point bending of bars during fabrication of magnetic recording heads
US5951371A (en) * 1996-11-04 1999-09-14 Seagate Technology, Inc. Multi-point bending of bars during fabrication of magnetic recording heads
US6287170B1 (en) 1996-12-13 2001-09-11 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
US6475064B2 (en) 1996-12-13 2002-11-05 Seagate Technology Llc Multipoint bending apparatus for lapping heads of a data storage device
US5991698A (en) * 1997-01-29 1999-11-23 Seagate Technology, Inc. Electrical lap guide data acquisition unit and measurement scheme
US5738566A (en) * 1997-03-31 1998-04-14 Seagate Technology, Inc. Lapping guide system, method and article of manufacture
JP3403605B2 (ja) * 1997-04-08 2003-05-06 富士通株式会社 部材接着方法及び部材接着装置
JPH10289413A (ja) * 1997-04-10 1998-10-27 Fujitsu Ltd 磁気ヘッドの製造方法
US5876264A (en) * 1997-04-25 1999-03-02 International Business Machines Corporation Deposition process windage calibration
US6027397A (en) * 1997-04-25 2000-02-22 International Business Machines Corporation Dual element lapping guide system
JP3318512B2 (ja) * 1997-06-21 2002-08-26 ティーディーケイ株式会社 磁気ヘッドの研磨方法及び装置
JP3395590B2 (ja) 1997-08-07 2003-04-14 ティーディーケイ株式会社 磁気抵抗効果ヘッドの研磨制御用センサ及び該センサを用いた研磨制御方法
US5997381A (en) * 1997-09-29 1999-12-07 Storage Technology Corporation Lapping sensor for thin film recording elements and method for manufacturing same
JP3331931B2 (ja) 1997-11-12 2002-10-07 ティーディーケイ株式会社 ワークの加工制御方法
US6045431A (en) * 1997-12-23 2000-04-04 Speedfam Corporation Manufacture of thin-film magnetic heads
JP3421983B2 (ja) * 1997-12-25 2003-06-30 ティーディーケイ株式会社 複合型薄膜磁気ヘッドの製造方法
US6217425B1 (en) 1998-06-12 2001-04-17 Tdk Corporation Apparatus and method for lapping magnetic heads
JP2000251222A (ja) 1999-02-26 2000-09-14 Tdk Corp 複合型薄膜磁気ヘッドの製造方法およびそれに用いるウエファ
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US6347983B1 (en) * 1999-06-09 2002-02-19 Seagate Technology Llc ELG for both MRE sensor height and resistance monitoring
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JP2001121394A (ja) 1999-10-25 2001-05-08 Tdk Corp 磁気ヘッドの研磨装置および方法
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JP3914006B2 (ja) * 2000-06-16 2007-05-16 Tdk株式会社 磁気ヘッド用研磨装置および方法
JP3837036B2 (ja) * 2000-06-16 2006-10-25 Tdk株式会社 磁気ヘッド製造工程における研磨量測定装置および方法
US7393262B2 (en) * 2001-08-23 2008-07-01 International Business Machines Corporation Apparatus including pin adapter for air bearing surface (ABS) lapping
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Also Published As

Publication number Publication date
JPS6329315A (ja) 1988-02-08
US4689877A (en) 1987-09-01
JPH0697492B2 (ja) 1994-11-30
EP0253460A1 (de) 1988-01-20
EP0253460B1 (de) 1991-04-10

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8339 Ceased/non-payment of the annual fee