JP2006048806A - 磁気ヘッドとその製造方法 - Google Patents
磁気ヘッドとその製造方法 Download PDFInfo
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
- G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
- G11B5/315—Shield layers on both sides of the main pole, e.g. in perpendicular magnetic heads
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3169—Working or finishing the interfacing surface of heads, e.g. lapping of heads
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3173—Batch fabrication, i.e. producing a plurality of head structures in one batch
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
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- Manufacturing & Machinery (AREA)
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- Electromagnetism (AREA)
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Abstract
【解決手段】 記録ヘッドのスロートハイトを浮上面加工のときに制御するための加工検知パターン15を設けたヘッドを作製し、その加工検知パターンを用いて浮上面加工を行う。このとき、再生ヘッドの加工については、再生ヘッド自身または再生ヘッド用加工検知パターン16を用いて加工することにより、記録ヘッドのスロートハイト及び再生ヘッドの素子高さの両方を制御したヘッドを得る。
【選択図】 図11
Description
Claims (22)
- 磁気抵抗効果膜を備える再生ヘッドと、主磁極と補助磁極を有する記録ヘッドとを備える磁気ヘッドにおいて、
前記主磁極のスロートハイトの制御に用いられる前記記録ヘッド用の浮上面加工用加工検知パターンを有することを特徴とする磁気ヘッド。 - 請求項1記載の磁気ヘッドにおいて、前記主磁極の膜厚方向の一方の面は、前記浮上面加工用加工検知パターンの一方の面と略同一平面に形成されていることを特徴とする磁気ヘッド。
- 請求項1記載の磁気ヘッドにおいて、前記浮上面加工用加工検知パターンの膜厚は前記主磁極の膜厚よりも薄いことを特徴とする磁気ヘッド。
- 請求項1記載の磁気ヘッドにおいて、前記磁気抵抗効果膜の浮上面からの高さの制御に用いられる再生ヘッドの浮上面加工用加工検知パターンを有することを特徴とする磁気ヘッド。
- 請求項4記載の磁気ヘッドにおいて、前記記録ヘッドの浮上面加工用加工検知パターンと前記再生ヘッドの浮上面加工用加工検知パターンは膜の電気抵抗が略同等の材料からなることを特徴とする磁気ヘッド。
- 請求項4記載の磁気ヘッドにおいて、前記記録ヘッドの浮上面加工用加工検知パターンと前記再生ヘッドの浮上面加工用加工検知パターンは加工特性が略同等の材料からなることを特徴とする磁気ヘッド。
- 磁気抵抗効果膜を備える再生ヘッドと、主磁極と補助磁極と前記主磁極近傍に形成されたシールドを有する記録ヘッドとを備える磁気ヘッドにおいて、
前記シールドの浮上面からの厚さの制御に用いられる記録ヘッドの浮上面加工用加工検知パターンを有することを特徴とする磁気ヘッド。 - 請求項7記載の磁気ヘッドにおいて、前記主磁極の膜厚方向の一方の面は、前記浮上面加工用加工検知パターンの一方の面と略同一平面に形成されていることを特徴とする磁気ヘッド。
- 請求項7記載の磁気ヘッドにおいて、前記浮上面加工用加工検知パターンの膜厚は前記主磁極の膜厚よりも薄いことを特徴とする磁気ヘッド。
- 請求項7記載の磁気ヘッドにおいて、前記磁気抵抗効果膜の浮上面からの高さの制御に用いられる再生ヘッドの浮上面加工用加工検知パターンを有することを特徴とする磁気ヘッド。
- 主磁極と補助磁極を有する記録ヘッドを備える磁気ヘッドの製造方法において、
前記記録ヘッドの浮上面加工用加工検知パターンを、当該パターンの一方の面を前記主磁極の膜厚方向の一方の面と略同一平面にして形成する工程と、
前記磁気ヘッドの浮上面を研磨加工する浮上面加工工程とを有し、
前記浮上面加工工程では前記浮上面加工用加工検知パターンを用いて前記主磁極のスロートハイトを制御することを特徴とする磁気ヘッドの製造方法。 - 請求項11記載の磁気ヘッドの製造方法において、前記記録ヘッドの浮上面加工用加工検知パターンの形成工程では、加工検知パターン形成用レジストパターンを、主磁極形成用レジストパターン形成時に同時に形成することを特徴とする磁気ヘッドの製造方法。
- 請求項12記載の磁気ヘッドの製造方法において、前記加工検知パターン形成用レジストパターン及び前記主磁極形成用レジストパターンはフォトリソグラフィー用のパターンであることを特徴とする磁気ヘッドの製造方法。
- 請求項11記載の磁気ヘッドの製造方法において、前記磁気ヘッドは更に磁気抵抗効果膜を有する再生ヘッドと、再生ヘッド用の浮上面加工用加工検知パターンとを有し、前記浮上面加工工程では前記再生ヘッド用の浮上面加工用加工検知パターンも用いて前記磁気ヘッドの浮上面加工を制御することを特徴とする磁気ヘッドの製造方法。
- 請求項11記載の磁気ヘッドの製造方法において、前記磁気ヘッドは更に磁気抵抗効果膜を有する再生ヘッドを有し、前記浮上面加工工程では前記磁気抵抗効果膜を浮上面加工用加工検知パターンとして用いて前記磁気抵抗効果膜の素子高さも制御することを特徴とする磁気ヘッドの製造方法。
- 請求項11記載の磁気ヘッドの製造方法において、前記浮上面加工工程において、浮上面の研磨加工をバー状態で行うことを特徴する磁気ヘッドの製造方法。
- 請求項11記載の磁気ヘッドの製造方法において、前記記録ヘッドの浮上面加工用加工検知パターンをスライダー毎に有し、前記浮上面加工工程において、浮上面の研磨加工を単品のスライダー状態で行うことを特徴する磁気ヘッドの製造方法。
- 主磁極と補助磁極と前記主磁極近傍に設けられたシールドを有する記録ヘッドを備える磁気ヘッドの製造方法において、
前記シールド加工用のレジストパターン形成時に同時に浮上面加工用加工検知パターン用のレジストパターンを形成するステップと、
前記レジストパターンを用いて前記浮上面加工用加工検知パターンを形成する工程と、
前記磁気ヘッドの浮上面を研磨加工する浮上面加工工程とを有し、
前記浮上面加工工程では、前記浮上面加工用加工検知パターンを用いて前記シールドの素子高さ方向の厚さを制御することを特徴とする磁気ヘッドの製造方法。 - 請求項18記載の磁気ヘッドの製造方法において、前記磁気ヘッドは更に磁気抵抗効果膜を有する再生ヘッドと、再生ヘッド用の浮上面加工用加工検知パターンとを有し、前記浮上面加工工程では前記再生ヘッド用の浮上面加工用加工検知パターンも用いて前記磁気ヘッドの浮上面加工を制御することを特徴とする磁気ヘッドの製造方法。
- 請求項18記載の磁気ヘッドの製造方法において、前記磁気ヘッドは更に磁気抵抗効果膜を有する再生ヘッドを有し、前記浮上面加工工程では前記磁気抵抗効果膜を浮上面加工用加工検知パターンとして用いて前記磁気抵抗効果膜の素子高さも制御することを特徴とする磁気ヘッドの製造方法。
- 請求項18記載の磁気ヘッドの製造方法において、前記浮上面加工工程において、浮上面の研磨加工をバー状態で行うことを特徴する磁気ヘッドの製造方法。
- 請求項18記載の磁気ヘッドの製造方法において、前記記録ヘッドの浮上面加工用加工検知パターンをスライダー毎に有し、前記浮上面加工工程において、浮上面の研磨加工を単品のスライダー状態で行うことを特徴する磁気ヘッドの製造方法。
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US8351162B2 (en) | 2013-01-08 |
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