DE3705912A1 - Hochvakuumpumpe mit einem glockenfoermigen rotor - Google Patents

Hochvakuumpumpe mit einem glockenfoermigen rotor

Info

Publication number
DE3705912A1
DE3705912A1 DE19873705912 DE3705912A DE3705912A1 DE 3705912 A1 DE3705912 A1 DE 3705912A1 DE 19873705912 DE19873705912 DE 19873705912 DE 3705912 A DE3705912 A DE 3705912A DE 3705912 A1 DE3705912 A1 DE 3705912A1
Authority
DE
Germany
Prior art keywords
rotor
bell
pump
high vacuum
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19873705912
Other languages
German (de)
English (en)
Other versions
DE3705912C2 (https=
Inventor
Claude Saulgeot
Heinz-Dieter Buerger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Hochvakuumtechnik GmbH
Original Assignee
Alcatel Hochvakuumtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Hochvakuumtechnik GmbH filed Critical Alcatel Hochvakuumtechnik GmbH
Priority to DE19873705912 priority Critical patent/DE3705912A1/de
Priority to JP63016021A priority patent/JPS63208695A/ja
Priority to US07/154,563 priority patent/US4806074A/en
Priority to EP88102562A priority patent/EP0283736A3/de
Publication of DE3705912A1 publication Critical patent/DE3705912A1/de
Application granted granted Critical
Publication of DE3705912C2 publication Critical patent/DE3705912C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE19873705912 1987-02-24 1987-02-24 Hochvakuumpumpe mit einem glockenfoermigen rotor Granted DE3705912A1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19873705912 DE3705912A1 (de) 1987-02-24 1987-02-24 Hochvakuumpumpe mit einem glockenfoermigen rotor
JP63016021A JPS63208695A (ja) 1987-02-24 1988-01-28 高真空ポンプ
US07/154,563 US4806074A (en) 1987-02-24 1988-02-10 High-vacuum pump having a bell-shaped rotor
EP88102562A EP0283736A3 (de) 1987-02-24 1988-02-22 Hochvakuumpumpe mit einem glockenförmigen Rotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873705912 DE3705912A1 (de) 1987-02-24 1987-02-24 Hochvakuumpumpe mit einem glockenfoermigen rotor

Publications (2)

Publication Number Publication Date
DE3705912A1 true DE3705912A1 (de) 1988-09-01
DE3705912C2 DE3705912C2 (https=) 1989-03-02

Family

ID=6321656

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19873705912 Granted DE3705912A1 (de) 1987-02-24 1987-02-24 Hochvakuumpumpe mit einem glockenfoermigen rotor

Country Status (4)

Country Link
US (1) US4806074A (https=)
EP (1) EP0283736A3 (https=)
JP (1) JPS63208695A (https=)
DE (1) DE3705912A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5059092A (en) * 1989-08-25 1991-10-22 Leybold Aktiengesellschaft Vacuum pump having emergency bearings
EP2148094A3 (de) * 2008-07-26 2016-04-13 Pfeiffer Vacuum Gmbh Vakuumpumpe

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408792B1 (de) * 1989-07-20 1993-09-29 Leybold Aktiengesellschaft Gasreibungspumpe mit mindestens einer auslassseitigen Gewindestufe
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
ES2069713T3 (es) * 1990-07-06 1995-05-16 Cit Alcatel Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo.
JPH0442296U (https=) * 1990-08-07 1992-04-09
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
DE102004047930A1 (de) * 2004-10-01 2006-04-06 Leybold Vacuum Gmbh Reibungsvakuumpumpe
WO2009142905A1 (en) * 2008-05-20 2009-11-26 Sundew Technologies, Llc Deposition method and apparatus
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
US4512725A (en) * 1982-02-16 1985-04-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel Rotary vacuum pump
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1492846A (en) * 1922-05-11 1924-05-06 Mullard Radio Valve Co Ltd Vacuum pump
CH222288A (de) * 1942-11-24 1942-07-15 Bbc Brown Boveri & Cie Molekularpumpe.
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
NL184487C (nl) * 1977-02-25 1989-08-01 Ultra Centrifuge Nederland Nv Moleculaire pomp.
NL168311C (nl) * 1978-03-01 1982-03-16 Neratoom Afdichtende doorvoer.
EP0129709A3 (en) * 1983-04-26 1985-03-06 Anelva Corporation Combinational molecular pump capable of readily being cleaned
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
US4512725A (en) * 1982-02-16 1985-04-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel Rotary vacuum pump
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5059092A (en) * 1989-08-25 1991-10-22 Leybold Aktiengesellschaft Vacuum pump having emergency bearings
EP2148094A3 (de) * 2008-07-26 2016-04-13 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
DE3705912C2 (https=) 1989-03-02
JPS63208695A (ja) 1988-08-30
US4806074A (en) 1989-02-21
EP0283736A3 (de) 1989-03-08
EP0283736A2 (de) 1988-09-28

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8363 Opposition against the patent
8330 Complete disclaimer